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First demonstration of 1.3μm quarter-wavelength shift distributed feedback(DFB) semiconductor laser based on conventional photolithography 被引量:6
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作者 LU LinLin SHI YueChun CHEN XiangFei 《Chinese Science Bulletin》 SCIE EI CAS 2013年第7期554-557,共4页
A 1.3 μm distributed feedback(DFB) semiconductor laser with equivalent λ/4 phase shift based on reconstruction equivalent chirp(REC) technique is numerically studied and experimentally demonstrated.The simulation re... A 1.3 μm distributed feedback(DFB) semiconductor laser with equivalent λ/4 phase shift based on reconstruction equivalent chirp(REC) technique is numerically studied and experimentally demonstrated.The simulation results show that the 1.3 μm DFB laser with equivalent λ/4 phase shift based on the REC technique performs the same as that of actual λ/4 phase shift DFB laser,with nearly the same P-I curves,the internal power distributions and the output ASE spectra.Compared with the traditional λ/4 phase shift DFB laser,the REC based laser only changes the sampling structures with the uniform seed waveguide grating instead of the actual grating structures.As a result,the fabrication of such laser will be very easy.In this paper,we successfully fabricated the 1.3 μm DFB laser based on the REC technique for the first time to the best of our knowledge. 展开更多
关键词 dfb激光器 半导体激光器 分布反馈 传统 拍摄技术 光刻 波长 光栅结构
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