Principle of X-ray Ф-scan and Application ofHigh T_c Bi-epitaxial Junction

The X-ray Ф-scan technique was applied to determine the in-plane orientation relationship of the high T_csuperconductins bi-epitaxial junction. The result shows that the in-plane orientation relation of the films in thetwo sides of the grain boundary can be easily obtained with this method. By controlling the growth condition,a 45° YBCO grain boundary can be made on the SrTiO_3 substrate.

ω扫描和φ扫描在薄膜结构表征中的应用

X射线衍射作为一种无损检测手段已经广泛应用于薄膜材料的结构分析和相分析。ω扫描和φ扫描都基于布拉格方程,可以对薄膜材料丝织构和面内织构进行表征。着重阐述了这两种扫描方式的X射线衍射几何、相关原理和在X射线四圆衍射仪实验过程中的实验参数设置,并介绍了它们的适用范围。最后列举了两种方法在金属薄膜、氧化物薄膜和半导体薄膜结构分析中的应用,显示出这两种表征手段在薄膜结构表征中的优势。