三层硅加速度敏感芯片BCB键合工艺研究

采用非光敏苯并环丁烯(BCB)进行MEMS压阻式加速度敏感芯片三层结构制作。BCB键合具有工艺温度低、键合表面要求低等特点,适用于芯片的圆片级封装。但是固化过程中BCB粘度随温度升高而下降,流动性变大,在毛细作用的影响下沿着微小间隙流淌,导致可动部件粘连,器件失效。通过控制BCB厚度、增加BCB阻挡槽解决了可动部件粘连问题,制作了三层硅结构的加速度敏感芯片。样品漏率小于1.0×10-10Pa·m3/s,键合剪切强度大于20MPa,能够满足航天、工业、消费电子等各领域的应用需求。

A review of the carbon coating of the silicon anode in highperformance lithium-ion batteries

In the development of rechargeable lithium ion batteries(LIBs),silicon anodes have attracted much attention because of their extremely high theoretical capacity,relatively low Li-insertion voltage and the availability of silicon resources.However,their large volume expansion and fragile solid electrolyte interface(SEI)film hinder their commercial application.To solve these problems,Si has been combined with various carbon materials to increase their structural stability and improve their interface properties.The use of different carbon materials,such as amorphous carbon and graphite,as three-dimensional(3D)protective anode coatings that help buffer mechanical strain and isolate the electrolyte is detailed,and novel methods for applying the coatings are outlined.However,carbon materials used as a protective layer still have some disadvantages,necessitating their modification.Recent developments have focused on modifying the protective carbon shells,and substitutes for the carbon have been suggested.

Synthesis, characteristics of hierarchical EU-1 zeolite for xylene isomerization probe reaction

Introduced a method of synthesizing hierarchical EU-1 zeolite with organosilanes as additive, and studied the influences of following different kinds of organosilanes on the synthesis of hierarchical EU-1 zeolite: γ-glycidoxy propyl trimethoxy silane(GPTMS), N-β-(aminoethyl)-γ-aminopropyl methyl dimethoxyl silane(APAEDMS),and N-(β-aminoethyl)-γ-aminopropyl dimethoxyl(ethyoxyl) silane(TMPED). The hierarchical EU-1 samples were characterized by XRD, SEM, N_2 adsorption, FT-IR and NH_3-TPD to analyze the crystallinity, morphology, surface area, pore size distribution and acidity. The results showed that hierarchical EU-1 zeolites were successfully synthesized; organosilanes have great influence on crystal morphology of EU-1 zeolites; the exterior surface area of hierarchical EU-1 zeolite, which synthesized with organosilanes(APAEDMS) adding into synthesis system, increased by 62.1% and mesopore volume increased by 129.1% compared with conventional EU-1 zeolites, thus can reduce the diffusional restriction markedly in catalytic reaction. The catalytic performance of hierarchical EU-1zeolites were evaluated in m-xylene isomerization on fixed bed reactor. The catalytic data showed that the isomerization activity PX/X of the hierarchical EU-1 zeolites reached around 24.09% in theoretical thermodynamic equilibrium from 23.83%, and the selectivity of C_8 aromatic hydrocarbon increased from 75.16% to 84.87%. The conversion of p-xylene increased from 16.30% to 18.41%.

Effect of Boundary Layers on Polycrystalline Silicon Chemical Vapor Deposition in a Trichlorosilane and Hydrogen System

This paper presents the numerical investigation of the effects of momentum, thermal and species boundary layers on the characteristics of polycrystalline silicon deposition by comparing the deposition rates in three chemical vapor deposition （CVD） reactors. A two-dimensional model for the gas flow, heat transfer, and mass transfer was coupled to the gas-phase reaction and surface reaction mechanism for the deposition of polycrystalline silicon from trichlorosilane （TCS）-hydrogen system. The model was verified by comparing the simulated growth rate with the experimental and numerical data in the open literature. Computed results in the reactors indicate that the deposition characteristics are closely related to the momentum, thermal and mass boundary layer thickness. To yield higher deposition rate, there should be higher concentration of TCS gas on the substrate, and there should also be thinner boundary layer of HCl gas so that HCl gas could be pushed away from the surface of the substrate immediately.

Influence of heating parameters on properties of the Al-Si coating applied to hot stamping

The Al-Si coating of ultra-high strength steel has been applied to hot stamping more and more widely, owing to solving the problem of oxidation and decarburization. However, the evolution of Al-Si coating during the heating process was rarely studied in the previous study. The tests about the influence of heating parameters, such as heating temperature, heating rates and dwell time, on properties of the Al-Si coating were carried out on the Gleeble-3500 thermal simulator. The properties of the Al-Si coating, for instance, volume fraction of FeAl intermetallics, α-Fe layer as well as porosity and 3D surface topography, were explored in the study. Results showed that more and more Kirkendall voids and cracks appeared in the Al-Si coating when the heating temperature exceeded 600°C. The heating rates almost had no influence on properties of the Al-Si coating when the temperature was equal to or lower than 500°C. The volume fraction of FeAl intermetallics in the coating with dwell time from 3 s to 8 min at 930°C was0, 6.19%, 17.03% and 20.65%, separately. The volume fraction of the α-Fe layer in the coating changed from zero to 31.52%with the prolonged dwell time. The porosity of the coating ranged from 0.51% to 4.98% with the extension of dwell time. The unsmooth degree of the surface of the coating rose gradually with the increasing of heating rates and the extension of dwell time.The 3D surface topography of the coating was determined by the comprehensive effect of atoms diffusion, new formed phases,surface tension and the degree of oxidation of the coating surface. Experiments indicated that rapid heating was not suitable for the coating when the temperature exceeded 500°C. Experiments also demonstrated that enough dwell time was essential to obtain the superior properties of the coating.