Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching res...Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching responses,including etching rate and selectivity as functions of variation of parameters,are modeled with a 3D neural network.A novel resist/metal combined mask that can overcome the single-layer masks’ limitations is developed for enhancing the waveguides deep etching and low-loss optical waveguides are fabricated at last.展开更多
From an ordinary condition,using a full three-dimensional model theory and an infinite perturbation expansion method,an exact solution of the reflection coefficient for the coated narrow stripe-geometry optical wavegu...From an ordinary condition,using a full three-dimensional model theory and an infinite perturbation expansion method,an exact solution of the reflection coefficient for the coated narrow stripe-geometry optical waveguide devices has been derived.All six components and the vector property of the electromagnetic field have been considered.The results are suitable for the symmetric and asymmetric waveguides.展开更多
文摘Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching responses,including etching rate and selectivity as functions of variation of parameters,are modeled with a 3D neural network.A novel resist/metal combined mask that can overcome the single-layer masks’ limitations is developed for enhancing the waveguides deep etching and low-loss optical waveguides are fabricated at last.
文摘From an ordinary condition,using a full three-dimensional model theory and an infinite perturbation expansion method,an exact solution of the reflection coefficient for the coated narrow stripe-geometry optical waveguide devices has been derived.All six components and the vector property of the electromagnetic field have been considered.The results are suitable for the symmetric and asymmetric waveguides.
