A whole-field 3D surface measurement system for semiconductor wafer inspection is described.The system consists of an optical fiber plate,which can split the light beam into N^2 subbeams to realize the whole-field ins...A whole-field 3D surface measurement system for semiconductor wafer inspection is described.The system consists of an optical fiber plate,which can split the light beam into N^2 subbeams to realize the whole-field inspection.A special prism is used to separate the illumination light and signal light.This setup is characterized by high precision,high speed and simple structure.展开更多
One of the most basic characteristics of photonic crystal is frequency band gap. When defects are introduced into the periodic photonic crystal, a number of defect modes appear in the stop band. In this paper, we expl...One of the most basic characteristics of photonic crystal is frequency band gap. When defects are introduced into the periodic photonic crystal, a number of defect modes appear in the stop band. In this paper, we exploit transfer matrix method based on photonic crystal theory, and assume the sampled fiber Bragg grating as one-dimensional dual photonic crystal with a large size defect. Characteristics of the sampled fiber Bragg grating are analyzed. Experimental results show that the sampled fiber Bragg grating has many reflective peaks. Its reflectivity, center wavelength, reflective peak intervals and band width all change with the grating parameters, including grating length, duty ratio of the material with high dielectric constant, and index modulation depth and period. Results agree with the conventional couple mode theory which can be used when analyzing other characteristics of the sampled fiber Bragg grating or applying it into practice.展开更多
文摘A whole-field 3D surface measurement system for semiconductor wafer inspection is described.The system consists of an optical fiber plate,which can split the light beam into N^2 subbeams to realize the whole-field inspection.A special prism is used to separate the illumination light and signal light.This setup is characterized by high precision,high speed and simple structure.
文摘One of the most basic characteristics of photonic crystal is frequency band gap. When defects are introduced into the periodic photonic crystal, a number of defect modes appear in the stop band. In this paper, we exploit transfer matrix method based on photonic crystal theory, and assume the sampled fiber Bragg grating as one-dimensional dual photonic crystal with a large size defect. Characteristics of the sampled fiber Bragg grating are analyzed. Experimental results show that the sampled fiber Bragg grating has many reflective peaks. Its reflectivity, center wavelength, reflective peak intervals and band width all change with the grating parameters, including grating length, duty ratio of the material with high dielectric constant, and index modulation depth and period. Results agree with the conventional couple mode theory which can be used when analyzing other characteristics of the sampled fiber Bragg grating or applying it into practice.
