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面向半导体工艺的平面线圈感性耦合氩等离子体源的三维流体模拟研究
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作者 赵明亮 邢思雨 +3 位作者 唐雯 张钰如 高飞 王友年 《物理学报》 SCIE EI CAS CSCD 北大核心 2024年第21期167-176,共10页
针对平面线圈感性耦合氩气放电,本文基于自主开发的三维等离子体流体力学程序,数值模拟了线圈结构以及放电气压对等离子体空间分布的影响.研究表明,由于线圈在环向上具有不对称性,电子密度也具有明显的环向不均匀性.随着气压的增大,这... 针对平面线圈感性耦合氩气放电,本文基于自主开发的三维等离子体流体力学程序,数值模拟了线圈结构以及放电气压对等离子体空间分布的影响.研究表明,由于线圈在环向上具有不对称性,电子密度也具有明显的环向不均匀性.随着气压的增大,这种环向不均匀性逐渐增强.通过减小线圈的开口,可以提高等离子体的环向均匀性.此外,针对双线圈驱动放电,还研究了内外双线圈电流幅值之比对于等离子体均匀性的影响.结果表明,通过改变内外线圈电流幅值的比值,有利于提高等离子体的径向均匀性. 展开更多
关键词 感性耦合等离子体 三维流体模拟 等离子体均匀性 线圈形状
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大面积矩形感性耦合等离子体源的三维流体力学模拟
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作者 赵明亮 张钰如 +2 位作者 高飞 宋远红 王友年 《力学学报》 EI CAS CSCD 北大核心 2023年第12期2891-2899,共9页
利用自主开发的三维流体力学模型程序,对面向平板显示工艺和光伏工艺的大面积矩形感性耦合氩等离子体源进行了数值模拟.该模型自洽地求解了带电粒子以及中性粒子的流体方程和感应电场的波动方程.利用此模型,研究了气压、功率以及线圈形... 利用自主开发的三维流体力学模型程序,对面向平板显示工艺和光伏工艺的大面积矩形感性耦合氩等离子体源进行了数值模拟.该模型自洽地求解了带电粒子以及中性粒子的流体方程和感应电场的波动方程.利用此模型,研究了气压、功率以及线圈形状对各种等离子体参数的三维空间分布和均匀性的影响.研究结果表明,当放电气压较低时(4 mTorr),电子密度的空间分布比较均匀,且电子密度的最大值出现在腔室的中心区域.感性沉积功率密度、激发态氩原子密度以及电子温度的最大值出现在线圈的下方.随着放电功率的增加,即从1000 W增加到4000 W,电子密度显著提高,但电子密度的空间分布变化不大.随着放电气压的升高,电子密度的均匀性明显下降,即电子密度的最大值主要局域在线圈下方.这是因为在较高的气压下,带电粒子与背景气体的碰撞增加,因此使得带电粒子的密度分布变得局域.此外,文章还研究了不同的线圈结构对于等离子体均匀性的影响.结果表明当气压较高(20 mTorr)时,使用3×3阵列线圈产生的等离子体的均匀性优于盘香型线圈,即通过改变线圈结构可以实现对等离子体均匀性的调控.文章的研究成果有助于加深对大面积矩形感性耦合等离子体放电特性的认知,这对于优化平板显示工艺以及光伏工艺至关重要. 展开更多
关键词 大面积矩形感性耦合等离子体源 三维流体力学模拟 平板显示工艺 光伏工艺
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串联式放射性废水衰变池优化设计 被引量:1
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作者 刘颖 苏晓书 +1 位作者 冀东 乔宇洁 《同位素》 CAS 2022年第4期341-347,I0006,共8页
为解决某医院核医学科放射性废水串联式衰变池结构不合理、死水区较大、不能使放射性核素有效停留衰变而导致放射性废水不能达标排放的问题,开展串联式衰变池的研究。利用三维流体模拟软件对串联式衰变池内部的水体流动规律、^(131)I核... 为解决某医院核医学科放射性废水串联式衰变池结构不合理、死水区较大、不能使放射性核素有效停留衰变而导致放射性废水不能达标排放的问题,开展串联式衰变池的研究。利用三维流体模拟软件对串联式衰变池内部的水体流动规律、^(131)I核素浓度分布、死水区体积等进行模拟研究,提出一种优化的串联式衰变池结构型式。结果表明,通过对串联式衰变池采取对角排水、增加折流板和折流板开孔、池底设置不同角度的倒角等结构优化措施,可使串联式衰变池排放口的放射性废水活度浓度低于10 Bq/L,最终实现达标排放。本研究结果可为后续放射性废水的处理提供参考。 展开更多
关键词 串联式衰变池 三维流体模拟 放射性废水
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基于流路设计的斜隔板引流喷射换热器研究 被引量:1
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作者 李传玺 张婷 +3 位作者 郭凯 尹海蛟 刘辉 刘春江 《天津大学学报(自然科学与工程技术版)》 EI CSCD 北大核心 2018年第1期41-49,共9页
为提高原油加热等壳程蒸汽冷凝换热工况的换热效果,本文基于流路设计提出了一种斜隔板层间引流喷射型换热器,并采用数值模拟方法进行分析.分别探究了斜隔板倾角、进口流速、层间引流喷射、换热单元层数对换热性能的影响,获得了换热器综... 为提高原油加热等壳程蒸汽冷凝换热工况的换热效果,本文基于流路设计提出了一种斜隔板层间引流喷射型换热器,并采用数值模拟方法进行分析.分别探究了斜隔板倾角、进口流速、层间引流喷射、换热单元层数对换热性能的影响,获得了换热器综合性能(JF因子)与倾斜角、进口流速的经验关联式.结果表明:壳程斜隔板结构能够提高换热器的JF因子,且倾斜角和进口流速的适当增大有利于换热器性能的提高;多段引流喷射能利用进料气引流上一层的乏汽,提高上层乏汽热品位;斜隔板引流喷射结构放大效应小,有利于工业生产. 展开更多
关键词 管壳式换热器 换热强化 壳程蒸汽冷凝 三维模型的流体力学模拟
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Using a Time-domain Higher-order Boundary Element Method to Simulate Wave and Current Diffraction from a 3-D Body 被引量:2
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作者 刘珍 滕斌 +1 位作者 宁德志 孙亮 《Journal of Marine Science and Application》 2010年第2期156-162,共7页
To study wave-current actions on 3-D bodies a time-domain numerical model was established using a higher-order boundary element method(HOBEM).By assuming small flow velocities,the velocity potential could be expressed... To study wave-current actions on 3-D bodies a time-domain numerical model was established using a higher-order boundary element method(HOBEM).By assuming small flow velocities,the velocity potential could be expressed for linear and higher order components by perturbation expansion.A 4th-order Runge-Kutta method was applied for time marching.An artificial damping layer was adopted at the outer zone of the free surface mesh to dissipate scattering waves.Validation of the numerical method was carried out on run-up,wave exciting forces,and mean drift forces for wave-currents acting on a bottom-mounted vertical cylinder.The results were in close agreement with the results of a frequency-domain method and a published time-domain method.The model was then applied to compute wave-current forces and run-up on a Seastar mini tension-leg platform. 展开更多
关键词 wave-current diffraction time-domain simulation drift force higher-order boundary element method (HOBEM)
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Three-dimensional numerical simulation of a vertical axis tidal turbine using the two-way fluid structure interaction approach 被引量:7
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作者 Syed-shah KHALID Liang ZHANG +1 位作者 Xue-wei ZHANG Ke SUN 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2013年第8期574-582,共9页
The objective of this study was to develop, as well as validate the strongly coupled method (two-way fluid structural interaction (FSI)) used to simulate the transient FSI response of the vertical axis tidal turbine (... The objective of this study was to develop, as well as validate the strongly coupled method (two-way fluid structural interaction (FSI)) used to simulate the transient FSI response of the vertical axis tidal turbine (VATT) rotor, subjected to spatially varying inflow. Moreover, this study examined strategies on improving techniques used for mesh deformation that account for large displacement or deformation calculations. The blade's deformation for each new time step is considered in transient two-way FSI analysis, to make the design more reliable. Usually this is not considered in routine one-way FSI simulations. A rotor with four blades and 4-m diameter was modeled and numerically analyzed. We observed that two-way FSI, utilizing the strongly coupled method, was impossible for a complex model; and thereby using ANSYS-CFX and ANSYS-MECHANICAL in work bench, as given in ANSYS-WORKBENCH, helped case examples 22 and 23, by giving an error when the solution was run. To make the method possible and reduce the computational power, a novel technique was used to transfer the file in ANSYS-APDL to obtain the solution and results. Consequently, the results indicating a two-way transient FSI analysis is a time- and resource-consuming job, but with our proposed technique we can reduce the computational time. The ANSYS STRUCTURAL results also uncover that stresses and deformations have higher values for two-way FSI as compared to one-way FSI. Similarly, fluid flow CFX results for two-way FSI are closer to experimental results as compared to one-way simulation results. Additionally, this study shows that, using the proposed method we can perform coupled simulation with simple multi-node PCs (core i5). 展开更多
关键词 Vertical axis tidal turbine Renewable energy Two-way fluid structure interaction (FSI)
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Streamwise Vortex Interaction with a Horseshoe Vortex
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作者 Piotr Doerffer Pawel Flaszynski Franco Magagnato 《Journal of Thermal Science》 SCIE EI CAS CSCD 2003年第4期304-309,共6页
How control in turbomachinery is very difficult because of the complexity of its fully 3-D flow structure. The authors propose to introduce streamwise vortices into the control of internal flows. A simple configuratio... How control in turbomachinery is very difficult because of the complexity of its fully 3-D flow structure. The authors propose to introduce streamwise vortices into the control of internal flows. A simple configuration of vortices was investigated in order to better understand the flow control methods by means of streamwise vortices. The research presented here concerns streamwise vortex interaction with a horseshoe vortex. The effects of such an interaction are significantly dependent on the relative location of the streamwise vortex in respect to the leading edge of the profile. The streamwise vortex is induced by an air jet. The horseshoe vortex is generated by the leading edge of a symmetric profile. Such a configuration gives possibility to investigate the interaction of these two vortices alone. The presented analysis is based on numerical simulations by means of N-S compressible solver with a two-equation turbulence model. 展开更多
关键词 flow control horseshoe vortex streamwise vortex.
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