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Gd_2CuO_4薄膜与Si,SiO_2/Si基底界面相互作用研究
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作者 张英侠 朱永法 +1 位作者 姚文清 曹立礼 《高等学校化学学报》 SCIE EI CAS CSCD 北大核心 2001年第10期1703-1706,共4页
采用 XRD和俄歇电子能谱 ( AES)等技术研究了钙钛矿型 Gd2 Cu O4薄膜与基底 Si和 Si O2 /Si的界面相互作用 ,发现衬底对 Gd2 Cu O4薄膜的晶化特性有很大影响 .以单晶 Si为基底时 ,Gd2 Cu O4薄膜经 60 0℃热处理 1 h即可形成钙钛矿型晶... 采用 XRD和俄歇电子能谱 ( AES)等技术研究了钙钛矿型 Gd2 Cu O4薄膜与基底 Si和 Si O2 /Si的界面相互作用 ,发现衬底对 Gd2 Cu O4薄膜的晶化特性有很大影响 .以单晶 Si为基底时 ,Gd2 Cu O4薄膜经 60 0℃热处理 1 h即可形成钙钛矿型晶体结构 ,而以 Si O2 /Si为基底时 ,经 70 0℃热处理 1 h才能形成较完善的钙钛矿型晶体结构 .Gd2 Cu O4薄膜的晶粒度随热处理温度的升高而增大 ,热处理时间对晶粒度则影响较小 .AES深度剖析表明 ,形成的薄膜组成均匀 ,在界面上有一定程度的扩散 .以 Si为基底时 ,Gd2 Cu O4与基底Si相互扩散 ,以 Si O2 /Si为基底时则主要是薄膜中 Gd,Cu向 Si O2 层中的扩散 .AES线性分析表明 ,在薄膜与基底的界面上 ,各元素的俄歇电子动能发生位移 。 展开更多
关键词 Gd2CuO4薄膜 晶化 界面扩散 AES 界面相互作用 铜酸钆 旋转镀膜技术 二氧化硅/硅基底
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XPS study of BZT thin film deposited on Pt/Ti/SiO_2/Si substrate by pulsed laser deposition
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作者 蒋艳平 唐新桂 +2 位作者 刘秋香 程铁栋 周益春 《中国有色金属学会会刊:英文版》 CSCD 2007年第A02期862-865,共4页
Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surfac... Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surface morphology of the thin film were studied by X-ray diffractometry(XRD) and scan electronic microscopy(SEM). The composition and chemical state near the film surface were obtained by X-ray photoelectron spectroscopy(XPS). On the sample surface,O 1s spectra can be assigned to those from the lattice and surface adsorbed oxygen ions,while C1s only result from surface contamination. The result shows that only one chemical state is found for each spectrum of Ba 3d,Zr 3d and Ti 2p photoelectron in the BZT thin film. 展开更多
关键词 BZT薄膜 脉冲激光沉积 化学状态 铂/钛/二氧化硅/硅基底
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Fast growth of graphene on SiO2/Si substrates by atmospheric pressure chemical vapor deposition with floating metal catalysts
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作者 Na Liu Jia Zhang +2 位作者 Yunfeng Qiu Jie Yang PingAn Hu 《Science China Chemistry》 SCIE EI CAS CSCD 2016年第6期707-712,共6页
Graphene on dielectric substrates is essential for its electronic applications. Graphene is typically synthesized on the surface of metal and then transferred to an appropriate substrate for fabricating device applica... Graphene on dielectric substrates is essential for its electronic applications. Graphene is typically synthesized on the surface of metal and then transferred to an appropriate substrate for fabricating device applications. This post growth transfer process is detrimental to the quality and performance of the as-grown graphene. Therefore, direct growth of graphene films on dielectric substrates without any transfer process is highly desirable. However, fast growth of graphene on dielectric substrates remains challenging. Here, we demonstrate a transfer-free chemical vapor deposition (CVD) method to directly grow graphene films on dielectric substrates at fast growth rate using Cu as floating catalyst. A large area (centimeter level) graphene can be grown within 15 min using this CVD method, which is increased by 500 times compared to other direct CVD growth on dielectric substrate in the literatures. This research presents a significant progress in transfer-free growth of graphene and graphene device applications. 展开更多
关键词 GRAPHENE fast growth dielectric substrates
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