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Gd_2CuO_4薄膜与Si,SiO_2/Si基底界面相互作用研究
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作者 张英侠 朱永法 +1 位作者 姚文清 曹立礼 《高等学校化学学报》 SCIE EI CAS CSCD 北大核心 2001年第10期1703-1706,共4页
采用 XRD和俄歇电子能谱 ( AES)等技术研究了钙钛矿型 Gd2 Cu O4薄膜与基底 Si和 Si O2 /Si的界面相互作用 ,发现衬底对 Gd2 Cu O4薄膜的晶化特性有很大影响 .以单晶 Si为基底时 ,Gd2 Cu O4薄膜经 60 0℃热处理 1 h即可形成钙钛矿型晶... 采用 XRD和俄歇电子能谱 ( AES)等技术研究了钙钛矿型 Gd2 Cu O4薄膜与基底 Si和 Si O2 /Si的界面相互作用 ,发现衬底对 Gd2 Cu O4薄膜的晶化特性有很大影响 .以单晶 Si为基底时 ,Gd2 Cu O4薄膜经 60 0℃热处理 1 h即可形成钙钛矿型晶体结构 ,而以 Si O2 /Si为基底时 ,经 70 0℃热处理 1 h才能形成较完善的钙钛矿型晶体结构 .Gd2 Cu O4薄膜的晶粒度随热处理温度的升高而增大 ,热处理时间对晶粒度则影响较小 .AES深度剖析表明 ,形成的薄膜组成均匀 ,在界面上有一定程度的扩散 .以 Si为基底时 ,Gd2 Cu O4与基底Si相互扩散 ,以 Si O2 /Si为基底时则主要是薄膜中 Gd,Cu向 Si O2 层中的扩散 .AES线性分析表明 ,在薄膜与基底的界面上 ,各元素的俄歇电子动能发生位移 。 展开更多
关键词 Gd2CuO4薄膜 晶化 界面扩散 AES 界面相互作用 铜酸钆 旋转镀膜技术 二氧化硅/硅
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SiO_2基底表面VO_2薄膜的生长模式及相变性能分析
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作者 岳芳 黄婉霞 +4 位作者 施奇武 邓贤进 王成 张敬雨 李丹霞 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2014年第8期1955-1958,共4页
采用无机溶胶-凝胶法在二氧化硅基底上制备不同厚度的二氧化钒薄膜,通过X射线光电子能谱、X射线衍射和场发射扫描电子显微镜分析薄膜的化学组成和微观结构,并利用变温傅里叶变换红外光谱对薄膜在红外波段的相变性能进行检测。结果发现:... 采用无机溶胶-凝胶法在二氧化硅基底上制备不同厚度的二氧化钒薄膜,通过X射线光电子能谱、X射线衍射和场发射扫描电子显微镜分析薄膜的化学组成和微观结构,并利用变温傅里叶变换红外光谱对薄膜在红外波段的相变性能进行检测。结果发现:薄膜均沿(110)晶面择优生长;随厚度增加,其结晶度提高,表面晶粒明显增大,大小分布越不均匀,并导致薄膜在红外波段的低温和高温透过率均降低,滞后温宽变窄,相变陡然性增强。 展开更多
关键词 二氧化钒薄膜 二氧化硅基底 溶胶凝胶 微观结构 相变性能
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Microstructures and magnetic properties of [SiO_2/FePt]_5/Ag thin films 被引量:2
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作者 范九萍 许小红 +2 位作者 江凤仙 田宝强 武海顺 《Journal of Central South University of Technology》 EI 2008年第1期11-14,共4页
[SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied... [SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied to study the magnetic properties and microstructures of the films. The results show that without Ag underlayer [SiO2/FePt]5 films deposited onto the glass are FCC disordered; with the addition of Ag underlayer [SiO]FePt]5/Ag films are changed into L10 and (111) mixed texture. The variation of the SiO2 nonmagnetic layer thickness in [SiO2/FePt]5/Ag films indicates that SiO2-doping plays an important role in improving the order parameter and the perpendicular magnetic anisotropy, and reducing the grain size and intergrain interactions. By controlling SiO2 thickness the highly perpendicular magnetic anisotropy can be obtained in the [SiO2 (0.6 nm)/FePt (3 nm)]5/Ag (50 nm) films and highly (001)-oriented films can be obtained in the [SiO2 (2 nm)/FePt (3 nm)]5/Ag (50 nm) films. 展开更多
关键词 [SiO2/FePt]5 multilayer films SiO2-doping Ag underlayer (001) orientation
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XPS study of BZT thin film deposited on Pt/Ti/SiO_2/Si substrate by pulsed laser deposition
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作者 蒋艳平 唐新桂 +2 位作者 刘秋香 程铁栋 周益春 《中国有色金属学会会刊:英文版》 CSCD 2007年第A02期862-865,共4页
Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surfac... Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surface morphology of the thin film were studied by X-ray diffractometry(XRD) and scan electronic microscopy(SEM). The composition and chemical state near the film surface were obtained by X-ray photoelectron spectroscopy(XPS). On the sample surface,O 1s spectra can be assigned to those from the lattice and surface adsorbed oxygen ions,while C1s only result from surface contamination. The result shows that only one chemical state is found for each spectrum of Ba 3d,Zr 3d and Ti 2p photoelectron in the BZT thin film. 展开更多
关键词 BZT薄膜 脉冲激光沉积 化学状态 铂/钛/二氧化硅/硅
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Fast growth of graphene on SiO2/Si substrates by atmospheric pressure chemical vapor deposition with floating metal catalysts
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作者 Na Liu Jia Zhang +2 位作者 Yunfeng Qiu Jie Yang PingAn Hu 《Science China Chemistry》 SCIE EI CAS CSCD 2016年第6期707-712,共6页
Graphene on dielectric substrates is essential for its electronic applications. Graphene is typically synthesized on the surface of metal and then transferred to an appropriate substrate for fabricating device applica... Graphene on dielectric substrates is essential for its electronic applications. Graphene is typically synthesized on the surface of metal and then transferred to an appropriate substrate for fabricating device applications. This post growth transfer process is detrimental to the quality and performance of the as-grown graphene. Therefore, direct growth of graphene films on dielectric substrates without any transfer process is highly desirable. However, fast growth of graphene on dielectric substrates remains challenging. Here, we demonstrate a transfer-free chemical vapor deposition (CVD) method to directly grow graphene films on dielectric substrates at fast growth rate using Cu as floating catalyst. A large area (centimeter level) graphene can be grown within 15 min using this CVD method, which is increased by 500 times compared to other direct CVD growth on dielectric substrate in the literatures. This research presents a significant progress in transfer-free growth of graphene and graphene device applications. 展开更多
关键词 GRAPHENE fast growth dielectric substrates
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