Since 1992 the author has led research group in Xi'an Jiaotong University to investigate and develop micro-electro mechanical systems(MEMS) sensors,including pressure sensor,acceleration sensor,gas sensor,viscosit...Since 1992 the author has led research group in Xi'an Jiaotong University to investigate and develop micro-electro mechanical systems(MEMS) sensors,including pressure sensor,acceleration sensor,gas sensor,viscosity & density sensor,polymerase chain reaction(PCR) chip and integrated sensor etc.This paper introduces the technologies and research results related to MEMS sensors we achieved in the last 20 years.展开更多
文摘Since 1992 the author has led research group in Xi'an Jiaotong University to investigate and develop micro-electro mechanical systems(MEMS) sensors,including pressure sensor,acceleration sensor,gas sensor,viscosity & density sensor,polymerase chain reaction(PCR) chip and integrated sensor etc.This paper introduces the technologies and research results related to MEMS sensors we achieved in the last 20 years.
