Y2000-62031-161 0006455光临近校正(OPC)和非均匀性对电阻率和线宽测量性能的影响研究=Investigation of optical proximity cor-rection(OPC)and non-(?)formities on the performariceof resistivity and linewidth measurements[会,...Y2000-62031-161 0006455光临近校正(OPC)和非均匀性对电阻率和线宽测量性能的影响研究=Investigation of optical proximity cor-rection(OPC)and non-(?)formities on the performariceof resistivity and linewidth measurements[会,英]/Smith, S. & Walton, A(?)//1999 IEEE InternationalConference on Microelectronic Test Structures.—161~166(AZ)展开更多
文摘Y2000-62031-161 0006455光临近校正(OPC)和非均匀性对电阻率和线宽测量性能的影响研究=Investigation of optical proximity cor-rection(OPC)and non-(?)formities on the performariceof resistivity and linewidth measurements[会,英]/Smith, S. & Walton, A(?)//1999 IEEE InternationalConference on Microelectronic Test Structures.—161~166(AZ)