The influence of the distribution of nano-pores on the mechanical properties evaluation of porous low-k films by surface acoustic waves （SAW） is studied. A theoretical SAW propagation model is set up to characterize...The influence of the distribution of nano-pores on the mechanical properties evaluation of porous low-k films by surface acoustic waves （SAW） is studied. A theoretical SAW propagation model is set up to characterize the periodic porous dielectrics by transversely isotropic symmetry. The theoretical deductions of SAW propagating in the low-k film/Si substrate layered structure are given in detail. The dispersive characteristics of SAW in differ- ent propagation directions and the effects of the Young＇s moduli E, E′ and shear modulus G′ of the films on these dispersive curves are found. Computational results show that E′ and G′ cannot be measured along the propagation direction that is perpendicular to the nano-pores＇ direction.展开更多
Micromixing efficiency of viscous media in Y-type micro-channel reactor was studied by using iodide-iodate test reaction as working system.Experiments were carried out in water-glycerin mixtures with 7 different visco...Micromixing efficiency of viscous media in Y-type micro-channel reactor was studied by using iodide-iodate test reaction as working system.Experiments were carried out in water-glycerin mixtures with 7 different viscosities.The experimental results showed that segregation index of the micro-channel reactor increases with the decrease of volumetric flow rate and the increase of solution viscosity.Based on the incorporation model,the micromixing time tm of the micro-channel reactor was estimated in the range of 10-4-10-3s at different viscosities,which indicated that the micro-channel reactor possesses a much better micromixing performance compared to the stirred tank(tm=0.02-0.2s).展开更多
文摘The influence of the distribution of nano-pores on the mechanical properties evaluation of porous low-k films by surface acoustic waves （SAW） is studied. A theoretical SAW propagation model is set up to characterize the periodic porous dielectrics by transversely isotropic symmetry. The theoretical deductions of SAW propagating in the low-k film/Si substrate layered structure are given in detail. The dispersive characteristics of SAW in differ- ent propagation directions and the effects of the Young＇s moduli E, E′ and shear modulus G′ of the films on these dispersive curves are found. Computational results show that E′ and G′ cannot be measured along the propagation direction that is perpendicular to the nano-pores＇ direction.
基金Supported by the National-Natural Science Foundation of China （20821004, 20806004） and the National High Technology Research and Development Program of China （2007AA030207, 2006AA030202, 2006AA030203）.
文摘Micromixing efficiency of viscous media in Y-type micro-channel reactor was studied by using iodide-iodate test reaction as working system.Experiments were carried out in water-glycerin mixtures with 7 different viscosities.The experimental results showed that segregation index of the micro-channel reactor increases with the decrease of volumetric flow rate and the increase of solution viscosity.Based on the incorporation model,the micromixing time tm of the micro-channel reactor was estimated in the range of 10-4-10-3s at different viscosities,which indicated that the micro-channel reactor possesses a much better micromixing performance compared to the stirred tank(tm=0.02-0.2s).
