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基于计算机仿真技术的混合介质电特性研究
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作者 于洋 《电子测试》 2022年第23期73-76,共4页
本文采用于计算机仿真技术对混合介质的电特性进行了研究。使用了COMSOL模拟软件,采用计算机仿真的方法,将几何分布的影响因素引入到一个混合公式中,再用MTALAB程序将几何分布系数转换成几何校正系数,再把几何校正系数作为空隙系数。通... 本文采用于计算机仿真技术对混合介质的电特性进行了研究。使用了COMSOL模拟软件,采用计算机仿真的方法,将几何分布的影响因素引入到一个混合公式中,再用MTALAB程序将几何分布系数转换成几何校正系数,再把几何校正系数作为空隙系数。通过对各种模型的检验,发现改进后的计算公式与数值计算的结果吻合较好,从而证明了所提出的改进算法是正确的。这种改进的计算方法可以为混合介质电特性的研究提供一定的理论基础。 展开更多
关键词 计算机 仿真技术 混合介质电特性
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碱性抛光液在CMP过程中对低k介质的影响 被引量:2
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作者 王立冉 邢哲 +2 位作者 刘玉岭 胡轶 刘效岩 《半导体技术》 CAS CSCD 北大核心 2012年第1期29-32,共4页
以p型<111>硅片为衬底,经过旋涂固化制备低介电常数(低k)材料聚酰亚胺。经过化学机械抛光(CMP)过程,考察实验前后低k材料介电性能的变化。实验中分别使用阻挡层抛光液、Cu抛光液以及新型抛光液对低k材料进行抛光后,利用电参数仪对... 以p型<111>硅片为衬底,经过旋涂固化制备低介电常数(低k)材料聚酰亚胺。经过化学机械抛光(CMP)过程,考察实验前后低k材料介电性能的变化。实验中分别使用阻挡层抛光液、Cu抛光液以及新型抛光液对低k材料进行抛光后,利用电参数仪对低k材料进行电性能测试。结果显示,低k材料介电常数经pH值为7.09新型抛光液抛光后,k值由2.8变为2.895,漏电流在3.35 pA以下,去除速率为59 nm/min。经新型抛光液抛光后的低k材料,在电学性能等方面均优于阻挡层抛光液和Cu抛光液,抛光后的低k材料的性能能够满足应用要求。 展开更多
关键词 低K材料 化学机械抛光 抛光液 介质电特性 聚酰亚胺
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Capacitance Evaluation on Non-parallel Thick-Plate Capacitors by Means of Finite Element Analysis 被引量:1
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作者 J.M. Bueno-Barrachina C.S. Cafias-Pefiuelas S. Catalan-Izquierdo 《Journal of Energy and Power Engineering》 2011年第4期373-378,共6页
In this work we show the influence of the edge-effect on the electric field distribution and, hence, on the inner and outer capacitance in an inclined-plate capacitor system surrounded by an insulating medium taking i... In this work we show the influence of the edge-effect on the electric field distribution and, hence, on the inner and outer capacitance in an inclined-plate capacitor system surrounded by an insulating medium taking into account the thickness of the conducting plates for a complete set of dimensions and insulating characteristics. Where available, we compare our results with previously published works. Finally, using statistical tools, we obtain approximate expression for computing the relationship between capacitance and insulation material characteristics, insulation gap, plate dimensions and angle. 展开更多
关键词 CAPACITANCE edge-effect electric field finite elements method modeling.
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Measurement of Swarm Parameters of c-C_4F_8/CO_2 and Its Insulation Characteristics Analysis 被引量:1
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作者 张刘春 肖登明 +1 位作者 张栋 吴变桃 《Journal of Shanghai Jiaotong university(Science)》 EI 2008年第4期448-452,共5页
In c-C4F8 and c-C4F8/CO2 mixtures, the swarm parameters including ionization coefficient, attachment coefficient and effective ionization coefficient were obtained at the ratio of the electric field strength to the ga... In c-C4F8 and c-C4F8/CO2 mixtures, the swarm parameters including ionization coefficient, attachment coefficient and effective ionization coefficient were obtained at the ratio of the electric field strength to the gas density between 150-550 Td by the steady-state Townsend (SST) method. Static breakdown voltages at each ratio were also measured at the SST condition. The limiting field strengths were obtained by two methods: computing the density-normalized effective ionization coefficient as a function of the overall density-reduced electric field strength; and measuring static breakdown voltages as a function of the product of gas density and electrode separation. Good agreement was obtained by these two methods, which ensures the correctness of the former method. The limiting field strengths of c-C4F8 and c-C4F8/CO2 mixtures were compared with those of pure SF6, 8F6/602 mixtures and pure c-C4F8. It is found that buffer gas CO2 does not reduce the limiting field strengths of c-C4F8 greatly, the limiting field strengths of c-C4F8/CO2 mixtures are higher than those of SF6/CO2 mixtures or even pure SF6, and so c-C4F8/CO2 mixtures are suggested to be possible substitutes for SF6. 展开更多
关键词 c-C4F8/CO2 SF6 steady state Townsend (SST) swarm parameters dielectric strength
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Preliminary Research on Relationship Between Dielectric Property and Microstructure of Rabbit Liver
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作者 ZHU Jian-bo SHI Xue-tao +4 位作者 YOU Fu-sheng WANG Hang WANG Hui CAI Zhan-xiu DONG Xiu-zhen 《Chinese Journal of Biomedical Engineering(English Edition)》 2014年第2期74-79,共6页
The dielectric properties in vitro present characteristic changes along with the alteration of metabolic activities, which can be detected from tissue micro- structure. The dielectric properties of tissues are closely... The dielectric properties in vitro present characteristic changes along with the alteration of metabolic activities, which can be detected from tissue micro- structure. The dielectric properties of tissues are closely related to its viability, but the relationship remains unclear to us. This study aims to specify the relationship between dielectric parameters and microstructure of living tissues and to try to explain the influence of tissue viability on dielectric properties. Nine rabbits were studied in this experiment. The impedance spectroscopy (10 Hz-1 MHz) and microstructure were determined at different time intervals (from 5 rain to 7 h) after samples were prepared. Some characteristic parameters were extracted to analyze the relationship between them. The inactivation process characterized by the mierostrueturs could be detected by means of dielectric parameters: the microstructures had no obvious change within 30 rain a.nd cell swelling caused by osmosis led to the decrease of extracellular ion concentration, resulting in the rise of lowfrequency impedance after 30 rain. The reduction of impedance was accompanied by the expanding intercellular area and irregular cell shape caused by the gradual destruction of cell membrane.The functions between alteration rate of intercellular area and Cole-Cole model parameters were also established. There is a strong correlative relationship between dielectric properties and microstructure. The dielectric spectrum can be a rapid and innocuous method to monitor the status of tissues. In the future, it may be of great help for clinical application, especially in transplantation. 展开更多
关键词 impedance measurement dielectric properties Cole-Cole model VIABILITY micro structure
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