Extreme ultraviolet lithography is most promising for the next generation lithography. However, debris from laser-produced plasma, particularly energetic ions, severely decreases the lifetime of extreme ultraviolet op...Extreme ultraviolet lithography is most promising for the next generation lithography. However, debris from laser-produced plasma, particularly energetic ions, severely decreases the lifetime of extreme ultraviolet optics. We measured the characteris- tics of ions from tin plasma by the time of flight method with a frequency-doubled Nd： YAG laser at the intensity of 3.5x1010 W/cm2 （532 nm, 8 ns）. Our measurement shows that the maximum and peak of tin ions energies from plasma under the above experimental parameters are about 4.2 and 1.8 keV, respectively. Moreover, it is found that kinetic energy angular distribution of tin ions can be fitted by cos0.8（θ）, where θ is the angle with respect to the target normal. We also investigated the mitigation effect of argon, helium gases to the tin ions, and found that tin ions from the plasma can be mitigated effectively at the pressure -38 mTorr for argon or -375 mTorr for helium, respectively.展开更多
Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semic...Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semiconductor industry is Moore’s Law,nowadays referring to a doubling of transistor counts per chip every 18 months.Sustaining Moore’s Law is economically beneficial;while the manufacturing cost per chip has been held constant,展开更多
This paper studies the following cooperative investment game with two agents. At the start of the game, both the agents＇ capital are collected. The total capital are then invested according to a certain trading strat...This paper studies the following cooperative investment game with two agents. At the start of the game, both the agents＇ capital are collected. The total capital are then invested according to a certain trading strategy. At a certain time To one agent quits the cooperation and they divide the wealth among themselves. During the remaining period [To, T], the other agent invests his/her capital following a possibly different trading strategy. By stochastic optimization method combined with the theory of Backward Stochastic Differential Equations （BSDEs, for short）, we give an equivalent characterization of the Pareto optimal cooperative strategies.展开更多
基金supported by the National Natural Science Foundation ofChina (Grant Nos. 60978014,61178022 and 11074027)the Basic Research Fund from Sci. & Tech. Department of Jilin Province (Grant Nos.20100521,20100168 and 20111812)
文摘Extreme ultraviolet lithography is most promising for the next generation lithography. However, debris from laser-produced plasma, particularly energetic ions, severely decreases the lifetime of extreme ultraviolet optics. We measured the characteris- tics of ions from tin plasma by the time of flight method with a frequency-doubled Nd： YAG laser at the intensity of 3.5x1010 W/cm2 （532 nm, 8 ns）. Our measurement shows that the maximum and peak of tin ions energies from plasma under the above experimental parameters are about 4.2 and 1.8 keV, respectively. Moreover, it is found that kinetic energy angular distribution of tin ions can be fitted by cos0.8（θ）, where θ is the angle with respect to the target normal. We also investigated the mitigation effect of argon, helium gases to the tin ions, and found that tin ions from the plasma can be mitigated effectively at the pressure -38 mTorr for argon or -375 mTorr for helium, respectively.
文摘Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semiconductor industry is Moore’s Law,nowadays referring to a doubling of transistor counts per chip every 18 months.Sustaining Moore’s Law is economically beneficial;while the manufacturing cost per chip has been held constant,
基金supported by the Natural Science Foundation of China under Grant Nos.11001029 and 10971220the Fundamental Research Funds for the Central Universities(BUPT2009RC0705)
文摘This paper studies the following cooperative investment game with two agents. At the start of the game, both the agents＇ capital are collected. The total capital are then invested according to a certain trading strategy. At a certain time To one agent quits the cooperation and they divide the wealth among themselves. During the remaining period [To, T], the other agent invests his/her capital following a possibly different trading strategy. By stochastic optimization method combined with the theory of Backward Stochastic Differential Equations （BSDEs, for short）, we give an equivalent characterization of the Pareto optimal cooperative strategies.
