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基于微加工工艺的光纤消逝场传感器及其长度特性研究 被引量:5
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作者 庄须叶 吴一辉 +2 位作者 王淑荣 张平 刘永顺 《物理学报》 SCIE EI CAS CSCD 北大核心 2009年第4期2501-2506,共6页
用硅光刻工艺和二氧化硅湿法腐蚀工艺制作了针状封装结构的光纤消逝场传感器.该结构的传感器体积小、试剂消耗量少,减轻了测量过程中光纤的变形,密封的结构可以有效地防止传感器受到污染.从理论和实验角度研究了不同长度的光纤消逝场传... 用硅光刻工艺和二氧化硅湿法腐蚀工艺制作了针状封装结构的光纤消逝场传感器.该结构的传感器体积小、试剂消耗量少,减轻了测量过程中光纤的变形,密封的结构可以有效地防止传感器受到污染.从理论和实验角度研究了不同长度的光纤消逝场传感器的测量结果,分析了传感光纤长度对传感器吸光度的影响,指出随着传感器传感光纤长度的继续增加,会使后续增加的传感光纤对传感器灵敏度的贡献越来越小. 展开更多
关键词 硅光刻工艺 针状封装 光纤消逝场 传感光纤长度
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Response Analysis of Ultrasonic Sensing System Based on Fiber Bragg Gratings of Different Lengths 被引量:3
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作者 Dandan PANG Qingmei SUI 《Photonic Sensors》 SCIE EI CAS 2014年第3期281-288,共8页
In recent years, fiber Bragg gratings (FBGs) have been widely used in ultrasonic detection for practical structural health monitoring in light of its unique advantages over the conventional sensors. Although FBGs ha... In recent years, fiber Bragg gratings (FBGs) have been widely used in ultrasonic detection for practical structural health monitoring in light of its unique advantages over the conventional sensors. Although FBGs have been successfully tested in ultrasonic inspection, the effect of the grating length on the sensitivity of the FBG ultrasonic sensing system is yet to be analyzed. Hence, using the simulation model, the main influencing factor on the sensitivity of the ultrasonic sensing system with different lengths gratings was first investigated. In the following experiment, the ultrasonic responses of the sensing system with six different lengths FBGs were obtained, respectively. The theoretical analysis and the experimental results would be useful for sensitivity improvement of the FBG-based ultrasonic and acoustic emission sensing system. 展开更多
关键词 Fiber Bragg gratings Bragg reflectors optical sensing and sensors
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