To achieve high quality factor and high-sensitivity refractive index sensor,a slot micro-ring resonator(MRR)based on asymmetric Fabry-Perot(FP)cavity was proposed.The structure consisted of a pair of elliptical holes ...To achieve high quality factor and high-sensitivity refractive index sensor,a slot micro-ring resonator(MRR)based on asymmetric Fabry-Perot(FP)cavity was proposed.The structure consisted of a pair of elliptical holes to form an FP cavity and a microring resonator.The two different optical modes generated by the micro-ring resonator were destructively interfered to form a Fano line shape,which improved the system sensitivity while obtaining a higher quality factor and extinction ratio.The transmission principle of the structure was analyzed by the transfer matrix method.The transmission spectrum and mode field distribution of the proposed structure were simulated by the finite difference time domain(FDTD)method,and the key structural parameters affecting the Fano line shape in the device were optimized.The simulation results show that the quality factor of the device reached 22037.1,and the extinction ratio was 23.9 dB.By analyzing the refractive index sensing characteristics,the sensitivity of the structure was 354 nm·RIU−1,and the detection limit of the sensitivity was 2×10−4 RIU.Thus,the proposed compact asymmetric FP cavity slot micro-ring resonator has obvious advantages in sensing applications owing to its excellent performance.展开更多
The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating...The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.展开更多
This paper presents a new class of semiconductor integrated sensor which consists of sensitive components and flip flop circuit. The sensors have high sensitivity and digital output. This paper describes the operatin...This paper presents a new class of semiconductor integrated sensor which consists of sensitive components and flip flop circuit. The sensors have high sensitivity and digital output. This paper describes the operating principle and structure of the sensor. And noise effect on characteristics of the sensor is analysed in detail. The modulated effect of the triangular wave voltage is quantified. As an example, an integrated pressure sensor is introduced and the experimental results agree with the theoretical analyses.展开更多
The novel integrated circuit (IC) temperature sensor presented in this paper works similarly as a two terminal Zener, has breakdown voltage directly proportional to Kelvin temperature at 10 mV/℃, with typical error ...The novel integrated circuit (IC) temperature sensor presented in this paper works similarly as a two terminal Zener, has breakdown voltage directly proportional to Kelvin temperature at 10 mV/℃, with typical error of less than ±1.0℃ over a temperature range from -50℃ to +125℃. In addition to all the features that conventional IC temperature sensors have, the new device also has very low static power dissipation ( 0.5 mW ) , low output impedance ( less than 1Ω), excellent stability, high reproducibility, and high precision. The sensor's circuit design and layout are discussed in detail. Applications of the sensor include almost any type of temperature sensing over the range of -50℃-+125℃. The low impedance and linear output of the device make interfacing the readout or control circuitry especially easy. Due to the excellent performance and low cost of this sensor, more applications of the sensor over wide temperature range are expected.展开更多
A CMOS integrated signal processing circuit based on capacitance resonance principle whose structure is simple in capacitive sensors is designed. The waveform of output voltage is improved by choosing bootstrap refere...A CMOS integrated signal processing circuit based on capacitance resonance principle whose structure is simple in capacitive sensors is designed. The waveform of output voltage is improved by choosing bootstrap reference current mirror with initiate circuit, CMOS analogy switch and positive feedback of double-stage inverter in the circuit. Output voltage of this circuit is a symmetric square wave signal. The variation of sensitive capacitance, which is part of the capacitive sensors, can be denoted by the change of output vohage＇s frequency. The whole circuit is designed with 1.5 μm P-weU CMOS process and simulated by PSpice software. Output frequency varies from 261.05 kHz to 47. 93 kHz if capacitance varies in the range of 1PF - 15PF. And the variation of frequency can be easily detected using counter or SCU.展开更多
The multisensor online measure system for high precision marking and cutting robot system is designed and the data fusion method is introduced, which combines augment state multiscale process with extend Kalman filter...The multisensor online measure system for high precision marking and cutting robot system is designed and the data fusion method is introduced, which combines augment state multiscale process with extend Kalman filter. The technology measuring the three-dimensional deforming information of profiled bars is applied. The experimental result shows that applying the multisensor data fusion technology can enhance the measure precision and the reliability of measure system.展开更多
基金supported by Natural Science Foundation of Gansu Province(No.22JR5RA320).
文摘To achieve high quality factor and high-sensitivity refractive index sensor,a slot micro-ring resonator(MRR)based on asymmetric Fabry-Perot(FP)cavity was proposed.The structure consisted of a pair of elliptical holes to form an FP cavity and a microring resonator.The two different optical modes generated by the micro-ring resonator were destructively interfered to form a Fano line shape,which improved the system sensitivity while obtaining a higher quality factor and extinction ratio.The transmission principle of the structure was analyzed by the transfer matrix method.The transmission spectrum and mode field distribution of the proposed structure were simulated by the finite difference time domain(FDTD)method,and the key structural parameters affecting the Fano line shape in the device were optimized.The simulation results show that the quality factor of the device reached 22037.1,and the extinction ratio was 23.9 dB.By analyzing the refractive index sensing characteristics,the sensitivity of the structure was 354 nm·RIU−1,and the detection limit of the sensitivity was 2×10−4 RIU.Thus,the proposed compact asymmetric FP cavity slot micro-ring resonator has obvious advantages in sensing applications owing to its excellent performance.
文摘The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.
文摘This paper presents a new class of semiconductor integrated sensor which consists of sensitive components and flip flop circuit. The sensors have high sensitivity and digital output. This paper describes the operating principle and structure of the sensor. And noise effect on characteristics of the sensor is analysed in detail. The modulated effect of the triangular wave voltage is quantified. As an example, an integrated pressure sensor is introduced and the experimental results agree with the theoretical analyses.
文摘The novel integrated circuit (IC) temperature sensor presented in this paper works similarly as a two terminal Zener, has breakdown voltage directly proportional to Kelvin temperature at 10 mV/℃, with typical error of less than ±1.0℃ over a temperature range from -50℃ to +125℃. In addition to all the features that conventional IC temperature sensors have, the new device also has very low static power dissipation ( 0.5 mW ) , low output impedance ( less than 1Ω), excellent stability, high reproducibility, and high precision. The sensor's circuit design and layout are discussed in detail. Applications of the sensor include almost any type of temperature sensing over the range of -50℃-+125℃. The low impedance and linear output of the device make interfacing the readout or control circuitry especially easy. Due to the excellent performance and low cost of this sensor, more applications of the sensor over wide temperature range are expected.
文摘A CMOS integrated signal processing circuit based on capacitance resonance principle whose structure is simple in capacitive sensors is designed. The waveform of output voltage is improved by choosing bootstrap reference current mirror with initiate circuit, CMOS analogy switch and positive feedback of double-stage inverter in the circuit. Output voltage of this circuit is a symmetric square wave signal. The variation of sensitive capacitance, which is part of the capacitive sensors, can be denoted by the change of output vohage＇s frequency. The whole circuit is designed with 1.5 μm P-weU CMOS process and simulated by PSpice software. Output frequency varies from 261.05 kHz to 47. 93 kHz if capacitance varies in the range of 1PF - 15PF. And the variation of frequency can be easily detected using counter or SCU.
文摘The multisensor online measure system for high precision marking and cutting robot system is designed and the data fusion method is introduced, which combines augment state multiscale process with extend Kalman filter. The technology measuring the three-dimensional deforming information of profiled bars is applied. The experimental result shows that applying the multisensor data fusion technology can enhance the measure precision and the reliability of measure system.
