期刊文献+
共找到787篇文章
< 1 2 40 >
每页显示 20 50 100
谐振耦合无线传电系统探索实验
1
作者 林万霖 李景聪 曾莉珊 《科学技术与工程》 北大核心 2013年第34期10155-10161,共7页
讨论了基于谐振耦合的无线传电系统,建立了辅助设计的准静态电路模型。同时讨论了双线圈与三线圈增强的无线传电系统建模,并通过实验验证了谐振耦合理论。在系统的发射端采用E类开关电路,给出了高效率高功率的无线传电系统设计方案并进... 讨论了基于谐振耦合的无线传电系统,建立了辅助设计的准静态电路模型。同时讨论了双线圈与三线圈增强的无线传电系统建模,并通过实验验证了谐振耦合理论。在系统的发射端采用E类开关电路,给出了高效率高功率的无线传电系统设计方案并进行了实验验证。 展开更多
关键词 关谐振耦合 E类开关 无线传电
下载PDF
“传电”
2
作者 贾克军 《体育教学》 2004年第3期53-53,共1页
关键词 小学 体育教学 传电 体育游戏 游戏目的 游戏方法 游戏规则
下载PDF
发电车组合升压传电系统的应用研究
3
作者 宋怡昆 兰国良 +4 位作者 黄昌辉 梁少南 齐凯 林权 赵伟 《通信电源技术》 2017年第5期233-234,共2页
电能不仅关系到国家建设和发展的各个方面,还关系到人们的工作和生活。配电网在长期运行中难免会出现故障,进行检修时就需要用到发电车。这是一种装配有发电机组的车型,可用于野外作业、电路设备检修以及发电等,文章主要分析探讨发电车... 电能不仅关系到国家建设和发展的各个方面,还关系到人们的工作和生活。配电网在长期运行中难免会出现故障,进行检修时就需要用到发电车。这是一种装配有发电机组的车型,可用于野外作业、电路设备检修以及发电等,文章主要分析探讨发电车组合升压传电系统的应用。 展开更多
关键词 发电车 升压操作 故障 组合升压传电系统 应用
下载PDF
中办、国办发出特急明传电报,要求必须切实做好当前减轻农民负担工作
4
《农村经营管理》 1998年第9期3-4,共2页
本刊讯1998年7月21日,中共中央办公厅、国务院办公厅向各省、自治区、直辖市党委和人民政府,各大军区党委,中央和国家机关各部委,军委各总部、各军兵种党委,各人民团体发出《关于切实做好当前减轻农民负担工作的通知》(以... 本刊讯1998年7月21日,中共中央办公厅、国务院办公厅向各省、自治区、直辖市党委和人民政府,各大军区党委,中央和国家机关各部委,军委各总部、各军兵种党委,各人民团体发出《关于切实做好当前减轻农民负担工作的通知》(以下简称《通知》)的特急明传电报,要... 展开更多
关键词 减轻农民负担 提留统筹费 粮食收购 领导干部 增加农民收入 特急 农业特产税 农业税 农民人均纯收入 传电
下载PDF
宣传电大 完善电大 振兴电大——中央电大副校长张达同志在《中国电大教育》第二届通讯员工作会议上的讲话
5
《中国远程教育》 1987年第6期4-5,共2页
《中国电大教育》通讯员会议的全体同志们: 原来打算出席这次会议,想同大家一起来研究如何进一步办好《中国电大教育》,因为要预备全国电大校长联席会议,实在抽不出身来,请允许我用书面的形式向与会的全体同志们致以深切的问候和良好的... 《中国电大教育》通讯员会议的全体同志们: 原来打算出席这次会议,想同大家一起来研究如何进一步办好《中国电大教育》,因为要预备全国电大校长联席会议,实在抽不出身来,请允许我用书面的形式向与会的全体同志们致以深切的问候和良好的祝愿。 广播电视教育是一种新型的教育形式,她是顺应科学技术和社会发展的产物,她的历史虽然很短,但是在国内外都得到了迅速的发展。在中国,短短八年的时间,已经取得了重大成就。八年来,经过各方面的努力,广播电视大学从无到有,从小到大,从大中城市发展到农村的小城镇,从经济发达地区到经济不发达地区,已形成一个相当规模的教育体系;广播电视大学几年来为国家培养了一大批人才;有了一支数万人的教师、技术人员和管理人员的专职队伍;从上到下建设了初具规模的物质技术基础;编纂了一批教科书和音像教材;积累了一定的办学经验。中国式的广播电视教育体系受到了国内外的瞩目。 展开更多
关键词 中国电大 通讯员工作 传电 大副 广播电视大学 广播电视教育 校长 教育形式 传统教育思想 重大成就
原文传递
Fabrication of a novel electrochemical sensor based on MnFe_(2)O_(4)/graphene modified glassy carbon electrode for the sensitive detection of bisphenol A
6
作者 GAO Si-lei TANG Jian-she +1 位作者 XIANG Li LONG Jin-wei 《Journal of Central South University》 SCIE EI CAS CSCD 2024年第6期1856-1869,共14页
Manganese ferrite(MnFe_(2)O_(4))has the advantages of simple preparation,high resistivity,and high crystal symmetry.Herein,we have developed an electrochemical sensor utilizing graphene and MnFe_(2)O_(4) nanocomposite... Manganese ferrite(MnFe_(2)O_(4))has the advantages of simple preparation,high resistivity,and high crystal symmetry.Herein,we have developed an electrochemical sensor utilizing graphene and MnFe_(2)O_(4) nanocomposites modified glassy carbon electrode(GCE),which is very efficient and sensitive to detect bisphenol A(BPA).MnFe_(2)O_(4)/graphene(GR)was synthesized by immobilizing the MnFe_(2)O_(4) microspheres on the graphene nanosheets via a simple one-pot solvothermal method.The morphology and structure of the MnFe_(2)O_(4)/GR nanocomposite have been characterized through scanning electron microscopy(SEM),Fourier transform infrared spectroscopy(FT-IR),X-ray diffraction(XRD)and X-ray photoelectron spectroscopy(XPS).In addition,electrochemical properties of the modified materials are comparably explored by means of cyclic voltammetry(CV),electrochemical impedance spectroscopy(EIS)and differential pulse voltammetry(DPV).Under the optimal conditions,the proposed electrochemical sensor for the detection of BPA has a linear range of 0.8-400μmol/L and a detection limit of 0.0235μmol/L(S/N=3)with high sensitivity,good selectivity and high stability.In addition,the proposed sensor was used to measure the content of BPA in real water samples with a recovery rate of 97.94%-104.56%.At present,the synthesis of MnFe_(2)O_(4)/GR provides more opportunities for the electrochemical detection of BPA in practical applications. 展开更多
关键词 MnFe_(2)O_(4) GRAPHENE electrochemical sensor bisphenol A
下载PDF
Data-Driven Viewpoint for Developing Next-Generation Mg-Ion Solid-State Electrolytes
7
作者 Fang-Ling Yang Ryuhei Sato +5 位作者 Eric Jianfeng Cheng Kazuaki Kisu Qian Wang Xue Jia Shin-ichi Orimo Hao Li 《电化学(中英文)》 CAS 北大核心 2024年第7期38-49,共12页
Magnesium(Mg)is a promising alternative to lithium(Li)as an anode material in solid-state batteries due to its abundance and high theoretical volumetric capacity.However,the sluggish Mg-ion conduction in the lattice o... Magnesium(Mg)is a promising alternative to lithium(Li)as an anode material in solid-state batteries due to its abundance and high theoretical volumetric capacity.However,the sluggish Mg-ion conduction in the lattice of solidstate electrolytes(SSEs)is one of the key challenges that hamper the development of Mg-ion solid-state batteries.Though various Mg-ion SSEs have been reported in recent years,key insights are hard to be derived from a single literature report.Besides,the structure-performance relationships of Mg-ion SSEs need to be further unraveled to provide a more precise design guideline for SSEs.In this viewpoint article,we analyze the structural characteristics of the Mg-based SSEs with high ionic conductivity reported in the last four decades based upon data mining-we provide big-data-derived insights into the challenges and opportunities in developing next-generation Mg-ion SSEs. 展开更多
关键词 Data mining Magnesium-ion solid-state electrolytes All-solid-state batteries Magnesium-ion conductivity
下载PDF
俄罗斯主流媒体有关“中俄文化交流”的报道研究
8
作者 陈艳蓉 《时代人物》 2023年第27期22-24,共3页
中国文化融合了传统文化和现代元素,为世界发展和文明贡献了重要的作用,中国文化对世界影响深远而持久。中俄两国文化交流源远流长。本文考察了近五年俄罗斯国际文传电讯社(Интерфакс)对于中国和俄罗斯两国在教育领域的交流,... 中国文化融合了传统文化和现代元素,为世界发展和文明贡献了重要的作用,中国文化对世界影响深远而持久。中俄两国文化交流源远流长。本文考察了近五年俄罗斯国际文传电讯社(Интерфакс)对于中国和俄罗斯两国在教育领域的交流,汉语在俄罗斯的影响,中国电影、音乐、绘画在俄罗斯的影响。分析中国文化活动在俄罗斯的影响力,以及两国在相关领域的合作。 展开更多
关键词 国际文传电讯社 中国文化 报道
下载PDF
促进微生物胞外电子转移的纳米材料研究进展 被引量:2
9
作者 苏紫荆 刘远峰 +3 位作者 孙亚昕 任婷莉 李惠雨 李从举 《精细化工》 EI CAS CSCD 北大核心 2023年第4期791-801,共11页
胞外电子转移(EET)是产电微生物在代谢过程中将自身产生的电子转移到外部电子受体的过程,然而较缓慢的胞外电子转移速率显著影响了微生物燃料电池(MFCs)的产电性能,提高胞外电子转移的效率对推动微生物燃料电池的大规模应用具有重要意... 胞外电子转移(EET)是产电微生物在代谢过程中将自身产生的电子转移到外部电子受体的过程,然而较缓慢的胞外电子转移速率显著影响了微生物燃料电池(MFCs)的产电性能,提高胞外电子转移的效率对推动微生物燃料电池的大规模应用具有重要意义。纳米材料具备优异的导电性、稳定性以及生物相容性,对改善阳极与产电微生物之间的电子传递速率具有重要作用。该文综述了胞外电子转移的主要路径,阐述了不同种类的纳米材料在促进胞外电子转移过程中的机理和其对应的MFCs产电性能,并展望了纳米材料强化微生物EET过程在微生物电化学技术利用方面的研究前景。 展开更多
关键词 胞外电子传递 纳米材料 产电微生物 电子传电机制 微生物燃料电池
下载PDF
Organic Photovoltaic Cells with Improved Performance Using Bathophenanthroline as a Buffer Layer 被引量:5
10
作者 王娜娜 于军胜 +1 位作者 林慧 蒋亚东 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2010年第1期84-88,I0002,共6页
The role of bathophenanthroline (Bphen) as a buffer layer inserted between fullerene (C60) and Ag cathode in organic photovoltaic (OPV) cell was discussed. By introducing Bphen as a buffer layer with thicknes fr... The role of bathophenanthroline (Bphen) as a buffer layer inserted between fullerene (C60) and Ag cathode in organic photovoltaic (OPV) cell was discussed. By introducing Bphen as a buffer layer with thicknes from 0 to 2.5 nm, the power conversion efficiency of the OPV cell based on copper phthalocyanine (CuPc) and C60 was increased from 0.87% to 2.25% under AM 1.5 solar illumination at an intensity of 100 mW/cm^2, which was higher than that of bathocuproine used as a buffer layer. The photocurrent-voltage characteristics showed that Bphen effectively improves electron transport through C60 layer into Ag electrode and leads to balance charge carrier transport capability. The influence of Bphen thickness on OPV cells was also investigated. Furthermore, the absorption spectrum shows that an additional Bphen layer enhances the light harvest capability of CuPc/C60. 展开更多
关键词 Organic photovoltaic cell Buffer layer Bathophenanthroline Charge carrier transport
下载PDF
A Novel Capacitive Pressure Sensor 被引量:7
11
作者 黄晓东 黄见秋 +1 位作者 秦明 黄庆安 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第3期428-432,共5页
A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etchi... A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410~ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change. 展开更多
关键词 capacitive pressure senor ELECTROSTRICTION pn junction self-stop etching adhesive bonding LINEARITY
下载PDF
Enhancement of Photophosphorylation and Photosynthesis in Rice by Low Concentrations of NaHSO_3 Under Field Conditions 被引量:25
12
作者 王宏炜 魏家绵 +2 位作者 沈允钢 张荣铣 杨图南 《Acta Botanica Sinica》 CSCD 2000年第12期1295-1299,共5页
Spraying 1-2 mmol/L solution of NaHSO 3 on rice ( Oryza sativa L.) leaves resulted in the enhancement of net photosynthetic rate for more than three days. It was also observed that NaHSO 3 application caused incr... Spraying 1-2 mmol/L solution of NaHSO 3 on rice ( Oryza sativa L.) leaves resulted in the enhancement of net photosynthetic rate for more than three days. It was also observed that NaHSO 3 application caused increases both in ATP content in leaves and the millisecond_delayed light emission of leaves. The increase in net photosynthetic rate caused by NaHSO 3 treatment was similar to that by PMS (phenazine methosulfate) treatment. The grain yield of treated rice was enhanced approximately by 10% after duplicated application of NaHSO 3 in milk_ripening stage. It is suggested that the enhancement of photosynthesis by NaHSO 3 treatment resulted from the effect of increasing ATP supplement. Concomitant with an increase in the photosynthetic rate and ATP content in leaves, the transient increase in chlorophyll fluorescence after the termination of actinic light, which could be used as an index of the cyclic electron flow, was also enhanced by low concentration of NaHSO 3 treatment. Basing on these results it is proposed that the increase in rice photosynthesis caused by low concentrations of NaHSO 3 could be due to the stimulation of the cyclic electron flow around PSⅠ which in turn the enhancement of the coupled photophosphorylation and photosynthesis. 展开更多
关键词 cyclic electron transport millisecond delayed light emission PHOTOPHOSPHORYLATION post_illumination transient increase in chlorophyll fluorescen
下载PDF
Synergy Decision for Radar and IRST Data Fusion 被引量:5
13
作者 窦丽华 杨国胜 +1 位作者 陈杰 侯朝桢 《Journal of Beijing Institute of Technology》 EI CAS 2002年第3期229-233,共5页
A new synergy decision method for radar and infrared search and track (IRST) data fusion is proposed, to solve such problems as how to decrease opportunities for radar suffering from being locked on by adverse electr... A new synergy decision method for radar and infrared search and track (IRST) data fusion is proposed, to solve such problems as how to decrease opportunities for radar suffering from being locked on by adverse electronic support measures (ESM), how to retrieve range information of the target during radar off, and how to detect the maneuver of the target. Firstly, polynomials used to predict target motion states are constructed. Secondly, a set of discriminants for detecting target maneuver are established by comparing the predicted values with the observations from IRST. Thirdly, a set of decisions are presented. Lastly, simulation is performed on the given scenario to test the validity of the method. 展开更多
关键词 IRST RADAR data fusion multi sensor electromagnetic covertness POLYNOMIAL synergy decision approximation
下载PDF
穿戴式监护仪概述 被引量:5
14
作者 黄家祺 卢家宾 《科技资讯》 2012年第22期248-250,共3页
随着生理信号检测技术的进步,以及人们保健需求的日益提高,用户对生理参数监测系统的舒适性和移动性的要求越来越高。医疗模式变革",战略前移,重心下移",社区医疗和家庭医疗将在国民健康保障方面发挥重要作用。人体基本生理信... 随着生理信号检测技术的进步,以及人们保健需求的日益提高,用户对生理参数监测系统的舒适性和移动性的要求越来越高。医疗模式变革",战略前移,重心下移",社区医疗和家庭医疗将在国民健康保障方面发挥重要作用。人体基本生理信号(如心跳、呼吸、体温、脉搏等)的低负荷、长时间、连续动态监测技术是家庭和社区医疗中的一类关键技术,通过这些信号的分析,可获取丰富有关人体健康状态的信息。在保证信号传感质量的情况下,舒适性和移动性决定了这类健康监测技术能否真正应用到百姓的日常生活中。低生理、心理负荷甚至无负荷(unobtrusively)状态下的生理参数获取是当今生物医学工程的前沿,可穿戴技术被认为是实现低负荷甚至无负荷生理参数检测/监测的有效途径之一。可穿戴技术(生物医学工程领域)是近年来兴起的一种低负荷生命信息检测技术,该技术将生理信息获取与人的日常穿戴相结合,以腰带、衬衣、短裤、臂章等形式来获取人的呼吸、心跳、血压、体温、体动等生命参数。 展开更多
关键词 穿戴 监护仪 信息传递 无线传电
下载PDF
Organic Light-Emitting Diodes by Doping Liq into an Electron Transport Layer 被引量:1
15
作者 徐维 鲁富翰 +3 位作者 蒋雪茵 张志林 朱文清 徐贵 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第1期33-38,共6页
Organic light emitting diodes (OLEDs) incorporating an n-doping transport layer comprised of 8-hydroxy-quin- olinato lithium (Liq) doped into 4' 7- diphyenyl-1,10-phenanthroline (BPhen) as ETL and a p-doping tr... Organic light emitting diodes (OLEDs) incorporating an n-doping transport layer comprised of 8-hydroxy-quin- olinato lithium (Liq) doped into 4' 7- diphyenyl-1,10-phenanthroline (BPhen) as ETL and a p-doping transport layer that includes tetrafluro-tetracyano-quinodimethane (F4- TCNQ) doped into 4,4′, 4″-tris (3-methylphenylphenylamono) triphe- nylamine (m-MTDATA) are demonstrated. In order to examine the improvement in the conductivity of transport layers, hole-only and electron-only devices are fabricated. The current and power efficiency Of organic light-emitting diodes are improved significantly after introducing an n-doping (BPhen:33wt% Liq) layer as an electron transport layer (ETL) and a p-doping layer composed of m-MTDATA and F4- TCNQ as a hole transport layer (HTL). Compared with the control device (without doping) , the current efficiency and power efficiency of the most efficient device (device C) are enhanced by approximately 51% and 89% ,respectively, while driving voltage is reduced by 29%. This improvement is attributed to the improved conductivity of the transport layers that leads to efficient charge balance in the emission zone. 展开更多
关键词 P-I-N N-DOPING current efficiency electron transport CONDUCTIVITY
下载PDF
FINITE ELEMENT MODELING OF MODERATELY THICK COMPOSITE PLATE WITH PIEZOELECTRIC SENSORS AND ACTUATORS 被引量:2
16
作者 周勇 王鑫伟 谈梅兰 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2003年第2期205-210,共6页
A rectangular finite element for laminated plate with bonded and/or embedded piezoelectric sensors and actuators is developed based on the variational principle and the first order shear deformation theory. The elemen... A rectangular finite element for laminated plate with bonded and/or embedded piezoelectric sensors and actuators is developed based on the variational principle and the first order shear deformation theory. The element has four-node, 20-degrees-of-freedom with one potential degree of freedom for each piezoelectric layer to represent the piezoelectric behavior. The higher order derivation of deflection is obtained by using the normal rotation expressions to take the effects of transverse shear deformation into considerations. The finite element can accurately simulate the deformation of both thin and moderately thick plates. A Fortran program is written and a number of benchmark tests are exercised to verify its effectiveness. Results are compared well with the existing data. The unbalanced composite with piezoelectric layers is then analyzed by using the model. Results show that the changes of the ratio between the thickness of positive angle layers and the negative angle layers have an effect on the deformation of the structure under the same electric loading. 展开更多
关键词 finite element COMPOSITE moderately thick plate PIEZOELECTRIC ACTUATOR SENSOR
下载PDF
A Monolithic Integrated CMOS Thermal Vacuum Sensor 被引量:2
17
作者 张凤田 唐祯安 +1 位作者 汪家奇 余隽 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第6期1103-1107,共5页
The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate (MHP) and operating... The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate (MHP) and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable. 展开更多
关键词 thermal vacuum sensor monolithic integration CMOS micro hotplate
下载PDF
Effects of Membrane Lipids on the Electron Transfer Activity of Cytochrome b_6f Complex from Spinach 被引量:1
18
作者 阎久胜 毛大璋 +2 位作者 陈晖 匡廷云 李良璧 《Acta Botanica Sinica》 CSCD 2000年第12期1267-1270,共4页
A lipid_depleted cytochrome b 6f (Cyt b 6f) preparation was obtained from spinach (Spinacia oleracea L.) chloroplasts. Upon reconstitution of this preparation with the membrane lipids purified from spinach thylakoid... A lipid_depleted cytochrome b 6f (Cyt b 6f) preparation was obtained from spinach (Spinacia oleracea L.) chloroplasts. Upon reconstitution of this preparation with the membrane lipids purified from spinach thylakoid, the effects of different membrane lipids on the electron transfer activity were studied. The results show that the electron transfer activity of Cyt b 6f is obviously stimulated to different extents, respectively, by monogalactosyldiacylglycerol (MGDG), digalactosyldiacylglycerol (DGDG), phosphatidylcholine (PC), phosphatidylglycerol (PG) and sulfoquinovosyldiacylglycerol (SQDG), and that the extents of stimulation may be closely related to the charge of the membrane lipids. The stimulation of non_charged lipids (MGDG, DGDG) and neutrally_charged lipid (PC) was high with a maximum enhancement of 89%, 75% and 77%, respectively; but the stimulation of two kinds of negatively_charged lipid (PG and SQDG) was relatively low with a maximum enhancement of 43% and 26%, respectively. 展开更多
关键词 cytochrome b_(6)f complex thylakoid membrane lipid RECONSTITUTION electron transfer
下载PDF
CHAOTIC TRANSDUCER 被引量:1
19
作者 裴文江 黄靖 +2 位作者 黄俊 刘文波 于盛林 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 1997年第2期109-114,共6页
Utilizing the character of chaos, the sensitivity to the initial conditions, the concept and the structure of so-called chaotic transducer based on Tent map is provided in this paper creatively. The possibility of app... Utilizing the character of chaos, the sensitivity to the initial conditions, the concept and the structure of so-called chaotic transducer based on Tent map is provided in this paper creatively. The possibility of applying the basic theory of symbolic dynamics to the measurement is presented and proved. Then, the theoretical model of chaotic transducer is realized by using the switched capacitor and the basic experimental results are given. The transducer has such characters as high sensitivity, resolution, the simple structure and combining signal amplification with A/D. The new area of the application of chaos is exploited. Meanwhile, it provides a new method of exploring the structure of new type transducer. 展开更多
关键词 CHAOS SENSORS switched capacitor symbolic dynamics Gray code
下载PDF
A Novel Capacitive Biaxial Microaccelerometer Based on the Slide-Film Damping Effect 被引量:1
20
作者 董林玺 颜海霞 +1 位作者 钱忺 孙玲玲 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第2期219-223,共5页
A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting comb... A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design,which depresses the requirement of the DRIE process, and de- creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process. 展开更多
关键词 capacitive accelerometer inertial sensor high resolution MEMS
下载PDF
上一页 1 2 40 下一页 到第
使用帮助 返回顶部