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英寸级少层MoS_(2)薄膜的低温可控制备 被引量:2
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作者 郭才胜 吴隽 +4 位作者 牛犇 熊芬 祝柏林 黄成斌 刘静 《材料导报》 EI CAS CSCD 北大核心 2021年第12期12039-12043,共5页
大面积二硫化钼(MoS_(2))薄膜的可控制备是其走向应用的关键环节,尤其是少层及P型电导的MoS_(2),对于器件应用具有重要意义,但鲜有文献报道。本工作采用室温射频(RF)磁控溅射法,在玻璃衬底上制备了英寸级的少层MoS_(2)薄膜,并经低温退火... 大面积二硫化钼(MoS_(2))薄膜的可控制备是其走向应用的关键环节,尤其是少层及P型电导的MoS_(2),对于器件应用具有重要意义,但鲜有文献报道。本工作采用室温射频(RF)磁控溅射法,在玻璃衬底上制备了英寸级的少层MoS_(2)薄膜,并经低温退火,实现了大面积较高质量的MoS_(2)薄膜可控制备。原子力显微镜(AFM)、拉曼光谱(Raman)、X射线光电子能谱(XPS)、高分辨透射电子显微镜(HRTEM)和紫外可见吸收光谱(UV-vis)分析结果表明:所制得的大面积超薄薄膜为3层的多晶膜,厚度约2.2 nm,且均匀、平整、可控,薄膜结晶性好、稳定性高。使用同样的工艺在Si/SiO_(2)基片上制备少层MoS_(2)薄膜,并将其制成背栅场效应晶体管(TFT),电学表征表明该薄膜呈现P型导电特征,载流子迁移率为0.183 cm^(2)·V^(-1)·s^(-1)。本工作提供了一种大面积少层MoS_(2)薄膜的可控制备方法,而且制备温度低,工艺简单且兼容性强,易实现大规模工业化生产。 展开更多
关键词 MoS_(2) 低温硫化退火 大面积制备 场效应晶体管
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Efficient and stable all-inorganic Sb_(2)(S,Se)_(3)solar cells via manipulating energy levels in MnS hole transporting layers 被引量:1
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作者 Shaoying Wang Yuqi Zhao +5 位作者 Liquan Yao Chuang Li Junbo Gong Guilin Chen Jianmin Li Xudong Xiao 《Science Bulletin》 SCIE EI CSCD 2022年第3期263-269,共7页
The use of organic hole transport layer(HTL)Spiro-OMeTAD in various solar cells imposes serious stabil-ity and cost problems,and thus calls for inorganic substitute materials.In this work,a novel inorganic MnS film pr... The use of organic hole transport layer(HTL)Spiro-OMeTAD in various solar cells imposes serious stabil-ity and cost problems,and thus calls for inorganic substitute materials.In this work,a novel inorganic MnS film prepared by thermal evaporation has been demonstrated to serve as a decent HTL in high-performance Sb_(2)(S,Se)_(3)solar cells,providing a cost-effective all-inorganic solution.A low-temperature air-annealing process for the evaporated MnS layer was found to result in a significant positive effect on the power conversion efficiency(PCE)of Sb_(2)(S,Se)_(3)solar cells,due to its better-matched energy band alignment after partial oxidation.Impressively,the device with the optimized MnS HTL has achieved an excellent PCE of about 9.24%,which is the highest efficiency among all-inorganic Sb_(2)(S,Se)_(3)solar cells.Our result has revealed that MnS is a feasible substitute for organic HTL in Sb-based solar cells to achieve high PCE,low cost,and high stability. 展开更多
关键词 Sb^(2)(S Se)_(3) All-inorganic Solar cells MNS Hole transporting layer
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