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体硅微机械湿法加工技术研究进展 被引量:1
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作者 蒋玉荣 边长贤 秦瑞平 《材料导报》 EI CAS CSCD 北大核心 2011年第19期13-17,共5页
湿法腐蚀技术成本低,是硅微机械(Micromachining)加工中最基础、最关键的技术。着重讨论了3种主要湿法技术的优缺点,概述了硅的各向同性存在侧向腐蚀、各向异性受晶格限制以及电化学腐蚀受图形尺寸限制的缺点和局限性,探讨了国内外研究... 湿法腐蚀技术成本低,是硅微机械(Micromachining)加工中最基础、最关键的技术。着重讨论了3种主要湿法技术的优缺点,概述了硅的各向同性存在侧向腐蚀、各向异性受晶格限制以及电化学腐蚀受图形尺寸限制的缺点和局限性,探讨了国内外研究现状和湿法腐蚀技术存在的问题及今后电化学腐蚀技术在湿法技术中的地位。 展开更多
关键词 体硅技术 各向异性 电化学腐蚀
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用于微电子机械系统封装的体硅键合技术和薄膜密封技术 被引量:3
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作者 王渭源 王跃林 《中国工程科学》 2002年第6期56-62,共7页
对静电键合、体硅直接键合和界面层辅助键合等三种体硅键合技术 ,整片操作、局部操作和选择保护等三种密封技术 ,以及这些技术用于微电子机械系统的密封作了评述 ,强调在器件研究开始时应考虑封装问题 ,具体技术则应在保证器件功能和尽... 对静电键合、体硅直接键合和界面层辅助键合等三种体硅键合技术 ,整片操作、局部操作和选择保护等三种密封技术 ,以及这些技术用于微电子机械系统的密封作了评述 ,强调在器件研究开始时应考虑封装问题 ,具体技术则应在保证器件功能和尽量减少芯片复杂性两者之间权衡决定。 展开更多
关键词 键合技术 薄膜密封技术 微电子机械系统 封装技术 芯片
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偏晶向(111)硅片闪耀光栅的制作 被引量:6
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作者 鞠挥 张平 +1 位作者 王淑荣 吴一辉 《光子学报》 EI CAS CSCD 北大核心 2004年第6期755-757,共3页
硅光栅的制作可以利用湿法腐蚀体硅工艺 湿法腐蚀利用硅的各向异性 ,由硅的晶面形成光栅工作凹槽 ,利用湿法工艺可以制作在不同光谱波段内工作的闪耀光栅 设计了一种利用偏晶向 (111)硅片制作闪耀光栅的方法 ,使用这种方法可以批量制... 硅光栅的制作可以利用湿法腐蚀体硅工艺 湿法腐蚀利用硅的各向异性 ,由硅的晶面形成光栅工作凹槽 ,利用湿法工艺可以制作在不同光谱波段内工作的闪耀光栅 设计了一种利用偏晶向 (111)硅片制作闪耀光栅的方法 ,使用这种方法可以批量制作闪耀角度较小的光栅 利用扫描电子显微镜 (SEM)进行了光栅表面形貌测试 ,试验结果表明 ,制作的硅光栅样片具有良好光学特性的反射表面和光栅槽形 硅闪耀光栅可以被用来制作微型光谱仪。 展开更多
关键词 (111) 闪耀光栅 体硅技术 湿法腐蚀
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Determination of Structure and Polarity of Si C Single Crystal by X-Ray Diffraction Technique 被引量:1
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作者 郑新和 渠波 +2 位作者 王玉田 杨辉 梁骏吾 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第1期35-39,共5页
Structure and polarity of the Si C single crystal have been analyzed with the four- circle X- ray diffraction method by a double- crystal diffractom eter.The hexagonal{ 10 15 } pole figure shows that this Si C sam pl... Structure and polarity of the Si C single crystal have been analyzed with the four- circle X- ray diffraction method by a double- crystal diffractom eter.The hexagonal{ 10 15 } pole figure shows that this Si C sam ple has a6 H modification.The difference between the integrated intensities m easured byω scan in the triple- axis diffraction set- up finds some convincing evidence that the surface is either a Si- terminated face or C- terminated face.The experi- mental ratios of| F( 0 0 0 L) | 2 / | F( 0 0 0 L) | 2 are in good agreem entwith the calculated ones after the dispersion cor- rections to the atomic scattering factors( L=6 ,12 and18,respectively) .Thus,this m easurem ent technique is con- venient for the application of the materials with remarkable surface polarity. 展开更多
关键词 Si C single crystal polarity hexagonal6 H scattering factor
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Solid-phase Crystallization of Hydrogenated Amorphous Silicon on Glass Substrates 被引量:2
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作者 JIN Rui-min LU Jing-xiao FENG Tuan-hui YANG Shi-e ZHANG Li-wei 《Semiconductor Photonics and Technology》 CAS 2006年第1期15-17,29,共4页
Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by conventional furnace annealing and rapid thermal annealing(RTA), respectively. From the Raman spectra, X-ray diffraction and scann... Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by conventional furnace annealing and rapid thermal annealing(RTA), respectively. From the Raman spectra, X-ray diffraction and scanning electron microscope, it is found that the grain size is crystallized at 850℃ in both techniques. The thin film made by RTA is smooth and of perfect structure, the thin film annealed by FA has a highly structural disorder. An average grain size of about 30nm is obtained by both techniques. 展开更多
关键词 PECVD A-Si: H film Furnace annealing Rapid thermal annealing Grain size
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Overview on Environmental Comprehensive Management System Established in Imitation of Biome 被引量:1
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作者 李如燕 孙可伟 《Journal of Shanghai Jiaotong university(Science)》 EI 2004年第3期88-94,共7页
Environmental comprehensive management system, called “the bionic community”, can be established in imitation of biome, which can transform the wastes generated in a certain field into the raw materials of other fie... Environmental comprehensive management system, called “the bionic community”, can be established in imitation of biome, which can transform the wastes generated in a certain field into the raw materials of other field. The establishment of the bionic community includes two aspects, i.e., the matching technique and the management system. The main matching technique is the preparation of composite materials made of various wastes. This new kind of material can be divided into four types: polymer matrix, silicate matrix, metal matrix and carbon matrix(or ceramic matrix). The environmental comprehensive management system is formed by organizing a trans-trades joint-management business entity with the products of composite material made of wastes at the core. 展开更多
关键词 ENVIRONMENTAL COMPREHENSIVE management IMITATION BIOME
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Preparation of Nano-sized Silica-alumina Support by Supersolubilizing Self-assembly Technique
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作者 Liu Yan Zhao Shanlin +3 位作者 Li Ping Jin Yingjie Zhang Xin Zhai Yuchun 《China Petroleum Processing & Petrochemical Technology》 SCIE CAS 2011年第1期32-37,共6页
Nano-sized silica-alumina particles were in-situ synthesized in supersolubilizing reverse micellae.Both the most probable pore diameters and the particle sizes were distributed in nano-scale SiO2-Al2O3 particulates.Th... Nano-sized silica-alumina particles were in-situ synthesized in supersolubilizing reverse micellae.Both the most probable pore diameters and the particle sizes were distributed in nano-scale SiO2-Al2O3 particulates.The influence of SiO2/Al2O3 mass ratio and the surfactant content on the particle size and morphology,pore structure,and acidity was characterized by the low temperature nitrogen adsorption/desorption (BET),SEM,TEM and NH3-TPD methods.The test results indicated that the most probable pore diameter of SiO2-Al2O3 nanoparticles was around 10 nm,the specific surface area was about 223-286 m2 /g,the pore volumes were about 0.48-0.63 cm 3 /g,and the particle sizes of porous SiO2-Al2O3 calcined at 550 ℃ were distributed always in the range between 10 nm to 50 nm.The calcined SiO2-Al2O3 nano-powders showed their acidity being stronger than the porous γ-Al2O3 support. 展开更多
关键词 supersolubility NANOPARTICLE SELF-ASSEMBLY porous silica-alumina
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