硅基微腔光子学测温技术研究进展

硅基微腔光子学测温包括基于热折变效应的协议温度测量以及基于光机谐振原理的热力学温度测量,国际温度咨询委员会(CCT)在2018-2027战略规划中,将硅基微腔光子学测温确定为接触测温新兴技术的主要发展方向。本文简要介绍上述两种测温理论机理,综述近年来美国国家标准与技术研究院(NIST)、欧洲计量合作组织(EURAMET)等发达国家计量院与计量组织在上述领域的研究进展,以及来自于学术界的探索性研究内容;最后介绍中国计量科学研究院在毫开尔文(mK)级微腔光子温度计制备与测试、基于法诺共振的亚mK级分辨力提升方法、基于氮化硅微腔的亚mK级自热温升抑制等研究进展。

Development of Electron Temperature Measuring System by Silicon Drift Detector

The soft X-ray spectroscopy, laser Thomson scattering and electron cyclotron emission （ ECE ） are usually adopted for electron temperature measurement in fusion research of magnetic confinement. The particular soft X-ray spectroscopy has the very good spatial-temporal resolution and smaller measuring error than laser Thomson scattering, a close spatial-temporal resolution to ECE, absolute measurement ability, and smaller influence by suprathermal and runaway electrons than ECE.