The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1...The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.展开更多
Phase diverse speckle is a novel kind of imaging technique and can be used to overcome image degradation from unknown phase aberrations, such as atmospheric turbulence. The wave-front phase expanded on the Zernike pol...Phase diverse speckle is a novel kind of imaging technique and can be used to overcome image degradation from unknown phase aberrations, such as atmospheric turbulence. The wave-front phase expanded on the Zernike polynomials is esti- mated from a pair of images (in the focal and out of focus planes). In this paper the principle of PDS is analyzed, and genetic algorithm is used as the iterative algorithm to simulate some characteristics, such as the influence of Zernike polynomials’ mode, amplitude of turbulence on the phase estimation. Thus, a new method for recovery of images is explored.展开更多
The improved three novel schemes of the super forward error correction （super-FEC） concatenated codes are proposed after the development trend of long-haul optical transmission systems and the defects of the existin...The improved three novel schemes of the super forward error correction （super-FEC） concatenated codes are proposed after the development trend of long-haul optical transmission systems and the defects of the existing FEC codes have been analyzed. The performance simulation of the Reed-Solomon（RS）＋ Bose-Chaudhuri-Hocguenghem（BCH） inner-outer serial concatenated code is implemented and the conceptions of encoding/decoding the parallel-concatenated code are presented. Furthermore, the simulation results for the RS（255,239） ＋RS（255,239） code and the RS（255,239） ＋RS（255,223） code show that the two consecutive concatenated codes are a superior coding scheme with such advantages as the better error correction, moderate redundancy and easy realization compared to the classic RS（255,239） code and other codes, and their signal to noise ratio gains are respectively 2-3 dB more than that of the RS（255,239）code at the bit error rate of 1 × 10^-13. Finally, the frame structure of the novel consecutive concatenated code is arranged to lay a firm foundation in designing its hardware.展开更多
A new family of two-dimensional optical orthogonal code(2-DOOC), namely, modified quadratic congruence code(MQCC )/optical orthogonal code(OOC) is proposed who employs MQCC and OOC as wavelength hopping and time-sprea...A new family of two-dimensional optical orthogonal code(2-DOOC), namely, modified quadratic congruence code(MQCC )/optical orthogonal code(OOC) is proposed who employs MQCC and OOC as wavelength hopping and time-spreading patterns, respectively. Through analyzing the performance of MQCC/OOC, we can see that the correlation properties of the MQCC/OOC are still ideal. Simultaneously, our analysis shows that the proposed new code families can get more cardinalities than other codes and can improve the bit error rate(BER) of optical code division multiple access(OCDMA) effectively.展开更多
The proposed algorithm for reflectance measured with optical glass has been verified with materials of various forms. The reflectances measured with optical glass ( raw), without glass (true) and corrected by the algo...The proposed algorithm for reflectance measured with optical glass has been verified with materials of various forms. The reflectances measured with optical glass ( raw), without glass (true) and corrected by the algorithm are compared. The results show that the corrected reflectance agrees very well with true one and their color differences fall below the acceptable limit, which indicates the validity of the correction algorithm. The algorithm could be used not only for fiber-forming materials, but also for powder-forming, granulate-forming, etc.展开更多
By employing the perturbative QCD （pQCD） factorization approach, we calculate some important next- to-leading-order （NLO） contributions to the two-body charmless hadronic decays B^＋ →ρ^＋η（＇） and B^0 → ρ^...By employing the perturbative QCD （pQCD） factorization approach, we calculate some important next- to-leading-order （NLO） contributions to the two-body charmless hadronic decays B^＋ →ρ^＋η（＇） and B^0 → ρ^0（ω, φ）η（＇）, induced by the vertex QCD corrections, the quark-loops as well as the chromo-magnetic penguins. From the numerical results and phenomenological analysis we find that （a） for B^± → ρ^±η（＇） （B^0 → ρ^0（ω, φ）η（＇）decays, the partial NLO contributions to branching ratios are small （large） in magnitude; and （b） the pQCD predictions for ACP^dir（B^± → ρ^±η（＇）） are consistent with the data, while the predicted .ACP（B^0 → ρ^0（ω）η（＇）） are generally large in magnitude and could be tested by the forthcoming LHCb experiments.展开更多
加权修正的差分光学吸收光谱法(weighting function modified differential optical absorption spectroscopy,WFM-DOAS)是用于甲烷平均干空气摩尔分数(XCH4)遥感反演的经典算法,其关键技术之一是分离“宽带吸收”与“窄带吸收”光谱结...加权修正的差分光学吸收光谱法(weighting function modified differential optical absorption spectroscopy,WFM-DOAS)是用于甲烷平均干空气摩尔分数(XCH4)遥感反演的经典算法,其关键技术之一是分离“宽带吸收”与“窄带吸收”光谱结构;同时,数字高程模型(digital elevation model,DEM)对XCH4的反演有重要影响。目前已有的甲烷反演产品主要使用多项式进行宽带结构拟合,多项式阶数的选择标准不明确、对宽带结构的拟合不够精确,使用的DEM精度无法满足局部地区高精度反演要求。本文选取瓦里关大气本底基准观象台所在的青藏高原区域为研究区,使用更高精度的数字高程模型(global 30 m digital elevation model,GLO-30)并用全连接神经网络代替低阶多项式进行“宽带结构”拟合,进一步地,在传统的全连接神经网络的基础上加入了“跳连”结构,并使用dropout策略对网络进行优化。将实验结果与使用The Global Multi-resolution Terrain Elevation Data 2010(GMTED2010)和低阶多项式拟合方法下反演的XCH4进行数据对比。结果显示,改进后的全连接神经网络可以更好地拟合宽带光谱结构,同时联合更高精度的DEM可以提高XCH4的反演精度,相关系数最高提高到0.92。所使用的联合优化方法可以用于油气田产区的XCH4的遥感反演,从而更好地服务于油气田产区甲烷异常排放排查等。展开更多
文摘The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.
文摘Phase diverse speckle is a novel kind of imaging technique and can be used to overcome image degradation from unknown phase aberrations, such as atmospheric turbulence. The wave-front phase expanded on the Zernike polynomials is esti- mated from a pair of images (in the focal and out of focus planes). In this paper the principle of PDS is analyzed, and genetic algorithm is used as the iterative algorithm to simulate some characteristics, such as the influence of Zernike polynomials’ mode, amplitude of turbulence on the phase estimation. Thus, a new method for recovery of images is explored.
文摘The improved three novel schemes of the super forward error correction （super-FEC） concatenated codes are proposed after the development trend of long-haul optical transmission systems and the defects of the existing FEC codes have been analyzed. The performance simulation of the Reed-Solomon（RS）＋ Bose-Chaudhuri-Hocguenghem（BCH） inner-outer serial concatenated code is implemented and the conceptions of encoding/decoding the parallel-concatenated code are presented. Furthermore, the simulation results for the RS（255,239） ＋RS（255,239） code and the RS（255,239） ＋RS（255,223） code show that the two consecutive concatenated codes are a superior coding scheme with such advantages as the better error correction, moderate redundancy and easy realization compared to the classic RS（255,239） code and other codes, and their signal to noise ratio gains are respectively 2-3 dB more than that of the RS（255,239）code at the bit error rate of 1 × 10^-13. Finally, the frame structure of the novel consecutive concatenated code is arranged to lay a firm foundation in designing its hardware.
文摘A new family of two-dimensional optical orthogonal code(2-DOOC), namely, modified quadratic congruence code(MQCC )/optical orthogonal code(OOC) is proposed who employs MQCC and OOC as wavelength hopping and time-spreading patterns, respectively. Through analyzing the performance of MQCC/OOC, we can see that the correlation properties of the MQCC/OOC are still ideal. Simultaneously, our analysis shows that the proposed new code families can get more cardinalities than other codes and can improve the bit error rate(BER) of optical code division multiple access(OCDMA) effectively.
文摘The proposed algorithm for reflectance measured with optical glass has been verified with materials of various forms. The reflectances measured with optical glass ( raw), without glass (true) and corrected by the algorithm are compared. The results show that the corrected reflectance agrees very well with true one and their color differences fall below the acceptable limit, which indicates the validity of the correction algorithm. The algorithm could be used not only for fiber-forming materials, but also for powder-forming, granulate-forming, etc.
基金Supported by the National Natural Science Foundation of China under Grant No.10575052,10605012,and 10735080
文摘By employing the perturbative QCD （pQCD） factorization approach, we calculate some important next- to-leading-order （NLO） contributions to the two-body charmless hadronic decays B^＋ →ρ^＋η（＇） and B^0 → ρ^0（ω, φ）η（＇）, induced by the vertex QCD corrections, the quark-loops as well as the chromo-magnetic penguins. From the numerical results and phenomenological analysis we find that （a） for B^± → ρ^±η（＇） （B^0 → ρ^0（ω, φ）η（＇）decays, the partial NLO contributions to branching ratios are small （large） in magnitude; and （b） the pQCD predictions for ACP^dir（B^± → ρ^±η（＇）） are consistent with the data, while the predicted .ACP（B^0 → ρ^0（ω）η（＇）） are generally large in magnitude and could be tested by the forthcoming LHCb experiments.
文摘加权修正的差分光学吸收光谱法(weighting function modified differential optical absorption spectroscopy,WFM-DOAS)是用于甲烷平均干空气摩尔分数(XCH4)遥感反演的经典算法,其关键技术之一是分离“宽带吸收”与“窄带吸收”光谱结构;同时,数字高程模型(digital elevation model,DEM)对XCH4的反演有重要影响。目前已有的甲烷反演产品主要使用多项式进行宽带结构拟合,多项式阶数的选择标准不明确、对宽带结构的拟合不够精确,使用的DEM精度无法满足局部地区高精度反演要求。本文选取瓦里关大气本底基准观象台所在的青藏高原区域为研究区,使用更高精度的数字高程模型(global 30 m digital elevation model,GLO-30)并用全连接神经网络代替低阶多项式进行“宽带结构”拟合,进一步地,在传统的全连接神经网络的基础上加入了“跳连”结构,并使用dropout策略对网络进行优化。将实验结果与使用The Global Multi-resolution Terrain Elevation Data 2010(GMTED2010)和低阶多项式拟合方法下反演的XCH4进行数据对比。结果显示,改进后的全连接神经网络可以更好地拟合宽带光谱结构,同时联合更高精度的DEM可以提高XCH4的反演精度,相关系数最高提高到0.92。所使用的联合优化方法可以用于油气田产区的XCH4的遥感反演,从而更好地服务于油气田产区甲烷异常排放排查等。
