Advanced testing methods for the dynamics of mechanical microdevices are necessary to develop reliable, marketable microelectromechanical systems. A system for measuring the nanometer motions of microscopic structures...Advanced testing methods for the dynamics of mechanical microdevices are necessary to develop reliable, marketable microelectromechanical systems. A system for measuring the nanometer motions of microscopic structures has been demonstrated. Stop-action images of a target have been obtained with computer microvision, microscopic interferometry, and stroboscopic illuminator. It can be developed for measuring the in-plane-rigid-body motions, surface shapes, out-of-plane motions and deformations of microstructures. A new algorithm of sub-pixel step length correlation template matching is proposed to extract the in-plane displacement from vision images. Hariharan five-step phase-shift interferometry algorithm and unwrapping algorithms are adopted to measure the out-of-plane motions. It is demonstrated that the system can measure the motions of solder wetting in surface mount technology(SMT).展开更多
Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measuremen...Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measurement, and wavelet transforms is adopted as theory fundament to extract the optical F-P interferometric characteristic signal and remove the noise, so its resolution can reach 0. 01 μm in the dynamic range of 0～ 1 mm.展开更多
In order to improve the detection accuracy of Doppler asymmetric spatial heterodyne(DASH)interferometer in harsh temperatures,an opto-mechanical-thermal integration analysis is carried out.Firstly,the correlation betw...In order to improve the detection accuracy of Doppler asymmetric spatial heterodyne(DASH)interferometer in harsh temperatures,an opto-mechanical-thermal integration analysis is carried out.Firstly,the correlation between the interference phase and temperature is established according to the working principle and the phase algorithm of the interferometer.Secondly,the optical mechanical thermal analysis model and thermal deformation data acquisition model are designed.The deformation data of the interference module and the imaging optical system at different temperatures are given by temperature load simulation analysis,and the phase error caused by thermal deformation is obtained by fitting.Finally,based on the wind speed error caused by thermal deformation of each component,a reasonable temperature control scheme is proposed.The results show that the interference module occupies the main cause,the temperature must be controlled within(20±0.05)℃,and the temperature control should be carried out for the temperature sensitive parts,and the wind speed error caused by the part is 3.8 m/s.The thermal drift between the magnification of the imaging optical system and the thermal drift of the relative position between the imaging optical system and the detector should occupy the secondary cause,which should be controlled within(20±2)℃,and the wind speed error caused by the part is 3.05 m/s.In summary,the wind measurement error caused by interference module,imaging optical system,and the relative position between the imaging optical system and the detector can be controlled within 6.85 m/s.The analysis and temperature control schemes presented in this paper can provide theoretical basis for DASH interferometer engineering applications.展开更多
文摘Advanced testing methods for the dynamics of mechanical microdevices are necessary to develop reliable, marketable microelectromechanical systems. A system for measuring the nanometer motions of microscopic structures has been demonstrated. Stop-action images of a target have been obtained with computer microvision, microscopic interferometry, and stroboscopic illuminator. It can be developed for measuring the in-plane-rigid-body motions, surface shapes, out-of-plane motions and deformations of microstructures. A new algorithm of sub-pixel step length correlation template matching is proposed to extract the in-plane displacement from vision images. Hariharan five-step phase-shift interferometry algorithm and unwrapping algorithms are adopted to measure the out-of-plane motions. It is demonstrated that the system can measure the motions of solder wetting in surface mount technology(SMT).
文摘Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measurement, and wavelet transforms is adopted as theory fundament to extract the optical F-P interferometric characteristic signal and remove the noise, so its resolution can reach 0. 01 μm in the dynamic range of 0～ 1 mm.
文摘In order to improve the detection accuracy of Doppler asymmetric spatial heterodyne(DASH)interferometer in harsh temperatures,an opto-mechanical-thermal integration analysis is carried out.Firstly,the correlation between the interference phase and temperature is established according to the working principle and the phase algorithm of the interferometer.Secondly,the optical mechanical thermal analysis model and thermal deformation data acquisition model are designed.The deformation data of the interference module and the imaging optical system at different temperatures are given by temperature load simulation analysis,and the phase error caused by thermal deformation is obtained by fitting.Finally,based on the wind speed error caused by thermal deformation of each component,a reasonable temperature control scheme is proposed.The results show that the interference module occupies the main cause,the temperature must be controlled within(20±0.05)℃,and the temperature control should be carried out for the temperature sensitive parts,and the wind speed error caused by the part is 3.8 m/s.The thermal drift between the magnification of the imaging optical system and the thermal drift of the relative position between the imaging optical system and the detector should occupy the secondary cause,which should be controlled within(20±2)℃,and the wind speed error caused by the part is 3.05 m/s.In summary,the wind measurement error caused by interference module,imaging optical system,and the relative position between the imaging optical system and the detector can be controlled within 6.85 m/s.The analysis and temperature control schemes presented in this paper can provide theoretical basis for DASH interferometer engineering applications.
