Diamond thin films are deposited on mirror-polished Si substrates using microwave plasma chemical vapour deposition (MPCVD), wherein, the substrates were first treated fornucleation by DC bias-enhanced MPCVD, and diam...Diamond thin films are deposited on mirror-polished Si substrates using microwave plasma chemical vapour deposition (MPCVD), wherein, the substrates were first treated fornucleation by DC bias-enhanced MPCVD, and diamond nucleation density as high as 1010 cm-2 has been achieved. Under the same density of nucleation, the relationships between optical transmittance and deposition parameters such as methane concentration (n), substrate temperature (T) and gas pressure (P) are established. The results show that the transmittance strongly depends on the methane concentration and substrate temperature, but hardly depends on the gas pressure. With the parameters of n = 0.7 %, T = 840℃and P =20 Torr, a highest transmittance at visible light (λ= 600 nm) reaches to 64.5 %, which is very close to the theoretical transmission limit of diamond film.展开更多
TQ171.112 2004032273 Ag离子注入石英玻璃光学透射率研究=Study of opticaltransmission rate for Ag implanted silica glass[刊,中]/陈海波(武汉大学物理科学与技术学院.湖北,武汉(430072)),蒋昌忠∥功能材料与器件学报.—2003,9(1).
文摘Diamond thin films are deposited on mirror-polished Si substrates using microwave plasma chemical vapour deposition (MPCVD), wherein, the substrates were first treated fornucleation by DC bias-enhanced MPCVD, and diamond nucleation density as high as 1010 cm-2 has been achieved. Under the same density of nucleation, the relationships between optical transmittance and deposition parameters such as methane concentration (n), substrate temperature (T) and gas pressure (P) are established. The results show that the transmittance strongly depends on the methane concentration and substrate temperature, but hardly depends on the gas pressure. With the parameters of n = 0.7 %, T = 840℃and P =20 Torr, a highest transmittance at visible light (λ= 600 nm) reaches to 64.5 %, which is very close to the theoretical transmission limit of diamond film.
文摘TQ171.112 2004032273 Ag离子注入石英玻璃光学透射率研究=Study of opticaltransmission rate for Ag implanted silica glass[刊,中]/陈海波(武汉大学物理科学与技术学院.湖北,武汉(430072)),蒋昌忠∥功能材料与器件学报.—2003,9(1).
