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微纳光机械传感器研究进展
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作者 孙浩哲 洪孝荣 +1 位作者 纪昌银 李家方 《中国科学:物理学、力学、天文学》 CSCD 北大核心 2023年第11期55-75,共21页
利用机械运动与光学响应间的相互耦合和共振增强实现的微纳光机械传感器具有小型化、灵敏度高、检测阈值低等优势,其检测范围可从毫米尺度的物理机械运动到纳米尺度下的分子振动,为精确传感的实际应用提供了新颖的策略.微纳光机械传感... 利用机械运动与光学响应间的相互耦合和共振增强实现的微纳光机械传感器具有小型化、灵敏度高、检测阈值低等优势,其检测范围可从毫米尺度的物理机械运动到纳米尺度下的分子振动,为精确传感的实际应用提供了新颖的策略.微纳光机械传感器可实现多个物理参量的精确传感,如力、位移、质量、声、化学以及热传感参量等.本文介绍了近年来光机械传感器领域的部分重要研究进展,总结了微纳光机械传感器的三个主要发展方向,即无源光机械传感器、电子-光子机械传感平台和中红外分子振动传感,介绍了微纳光机械传感器的配置、应用和集成.最后,对微纳光机械传感器的研究进行了总结和展望. 展开更多
关键词 光机械传感器 精密传感 微纳机械系统 学耦合共振
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High Sensitivity FBG Pressure Sensor Based on Mechanical Amplifier and Interrogation Using Tunable FBG Filter
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作者 LIUYun-qi LIUZhi-guo 《Semiconductor Photonics and Technology》 CAS 1999年第3期171-174,178,共5页
A high sensitivity fiber Bragg grating pressure sensor by using mechanical amplifier is demonstrated. The measured pressure sensitivity is -1.80×10 -4 /MPa, which is about two orders of magnitude better than a si... A high sensitivity fiber Bragg grating pressure sensor by using mechanical amplifier is demonstrated. The measured pressure sensitivity is -1.80×10 -4 /MPa, which is about two orders of magnitude better than a simple monomode fiber with an in-fiber grating. The resolution of pressure measurement is 0.015 MPa based on interrogation using tunable fiber grating filter. 展开更多
关键词 Fiber Bragg Grating Mechanical Amplifier Pressure Sensor Tunable Filter CLC number:TN253 TP212 Document code:A
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Optical fiber based slide tactile sensor for underwater robots
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作者 谭定忠 王启明 +2 位作者 宋瑞晗 姚昕 顾义华 《Journal of Marine Science and Application》 2008年第2期122-126,共5页
In the underwater environment, many visual sensors don’t work, and many sensors which work well for robots working in space or on land can not be used underwater. Therefore, an optical fiber slide tactile sensor was ... In the underwater environment, many visual sensors don’t work, and many sensors which work well for robots working in space or on land can not be used underwater. Therefore, an optical fiber slide tactile sensor was designed based on the inner modulation mechanism of optical fibers. The principles and structure of the sensor are explained in detail. Its static and dynamic characteristics were analyzed theoretically and then simulated. A dynamic characteristic model was built and the simulation made using the GA based neural network. In order to improve sensor response, the recognition model of the sensor was designed based on the ‘inverse solution’ principle of neural networks, increasing the control precision and the sensitivity of the manipulator. 展开更多
关键词 underwater robot MANIPULATOR tactile sensor optical fiber
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Sensitivity and Performance of Cavity Optomechanical Field Sensors 被引量:2
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作者 Stefan FORSTNER Joachim KNITTEL Eoin SHERIDAN Jon D. SWAIM Halina RUBINSZTEIN-DUNLOP Warwick P. BOWEN 《Photonic Sensors》 SCIE EI CAS 2012年第3期259-270,共12页
This article describes in detail a technique for model!ng cavity optomechanical field sensors. A magnetic or electric field induces a spatially varying stress across the sensor, which then induces a force on mechanica... This article describes in detail a technique for model!ng cavity optomechanical field sensors. A magnetic or electric field induces a spatially varying stress across the sensor, which then induces a force on mechanical eigenmodes of the system. The force on each oscillator can then be determined from an overlap integral between magnetostrictive stress and the corresponding eigenmode, with the optomechanical coupling strength determining the ultimate resolution with which this force can be detected. Furthermore, an optomechanical magnetic field sensor is compared to other magnetic field sensors in terms of sensitivity and potential for miniaturization. It is shown that an optomechanical sensor can potentially outperform state-of-the-art magnetometers of similar size, in particular other sensors based on a magnetostrictive mechanism. 展开更多
关键词 Cavity optomechanics magnetic field sensors MAGNETOSTRICTION integrated microcavity
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