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光栅刻划机刻划系统光机电集成优化方法研究 被引量:1
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作者 申远 王俊杰 +1 位作者 竺长安 齐向东 《湖南大学学报(自然科学版)》 EI CAS CSCD 北大核心 2014年第3期43-48,共6页
针对大面积衍射光栅刻划机在宏观尺度下进行微纳加工的工作特点以及纳米级刻线检测困难的问题,提出了一种光机电集成优化方法.此方法采用计算傅里叶光学和弦振动理论进行光栅刻线误差分析,结合振动实验及光学测量进行验证,最后采用智能... 针对大面积衍射光栅刻划机在宏观尺度下进行微纳加工的工作特点以及纳米级刻线检测困难的问题,提出了一种光机电集成优化方法.此方法采用计算傅里叶光学和弦振动理论进行光栅刻线误差分析,结合振动实验及光学测量进行验证,最后采用智能优化方法对刻划系统进行结构参数优化.虚拟样机仿真结果表明,刻划系统的振动幅度降低了30%,验证了该集成优化方法的有效性. 展开更多
关键词 光栅刻划机 光机电集成优化 计算傅里叶光学 智能优化
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基于微波无线传能与全向扫描天线的SSPS——OMEGA-2.0光机电集成设计 被引量:2
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作者 段宝岩 《中国科学:技术科学》 EI CSCD 北大核心 2023年第1期139-144,共6页
针对欧米伽(OMEGA)空间太阳能电站设计方案存在的困难与问题,本文提出了一种新的称为OMEGA-2.0的光机电集成方案.首先,利用球冠接收平行太阳光能(SE),并将其汇聚于陀螺状的线馈源阵上,经光电转换部件生成直流电(DC)后,进而通过结构功能... 针对欧米伽(OMEGA)空间太阳能电站设计方案存在的困难与问题,本文提出了一种新的称为OMEGA-2.0的光机电集成方案.首先,利用球冠接收平行太阳光能(SE),并将其汇聚于陀螺状的线馈源阵上,经光电转换部件生成直流电(DC)后,进而通过结构功能件将DC送到置于球冠聚光镜外部顶端的微波发射天线,这不仅可大大简化设计,且可破解对球面薄膜材料的关于太阳光半透射半反射和对微波全透明的难题,还可消除因发射天线在聚光镜内部引起的光线遮挡问题.然后,通过球冠聚光镜的结构功能件来输送高压巨功率直流电,可突破需经过电刷进行高压巨功率直流电传输的可靠性低的关键技术.其次,将空间电推进技术用于聚光镜在轨姿态微调,可攻克对线馈源运动进行在轨实时精密控制的难点.再者,在聚光镜背面、线馈源根部设计仿生的高效轻质辐射散热器,并进行拓扑与形状、尺寸优化设计,可进一步大幅度缓解散热压力.最后,引入全向扫描微波天线,可保证系统沿空间轨道运行时微波波束实时指向接收天线,从而避免需对发射天线进行实时大惯量指向控制的问题. 展开更多
关键词 OMEGA-2.0光机电集成设计 电推进位姿调控 仿生辐射散热 全向扫描微波阵列天线
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基于自由空间光学的光机电混合集成技术
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作者 张流强 《半导体光电》 CAS CSCD 北大核心 2010年第3期390-396,401,共8页
随着微加工技术和微分析技术的发展,人们已经可以把大型的机电系统或者光学系统微型化并进行某种程度的集成。但是,由于光学元件和光学系统对微结构的材料性能、几何尺寸和表面质量等都有极为苛刻的要求,光学系统特别是自由空间光学系... 随着微加工技术和微分析技术的发展,人们已经可以把大型的机电系统或者光学系统微型化并进行某种程度的集成。但是,由于光学元件和光学系统对微结构的材料性能、几何尺寸和表面质量等都有极为苛刻的要求,光学系统特别是自由空间光学系统的微型化仍然面临巨大的技术挑战。提出一种基于表面压印和三维铸模技术的自由空间光学系统集成技术,该技术解决了光学元件的微型化及层内和层间的光学互联;在此基础上,结合MEMS技术、印刷电路(PCB)和表面贴装(SMD)技术实现了片上的光机电混合集成。 展开更多
关键词 光机电集成 混合集成 微光学 表面压印 三维铸模
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瞻望前沿光功能集成系统的发展
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作者 光兵 《世界产品与技术》 2002年第9期37-39,共3页
关键词 光功能集成系统 集成光机电一体化技术 半导体微加工技术
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Design and Implementation of an Optoelectronic Integrated Receiver in Standard CMOS Process 被引量:1
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作者 余长亮 毛陆虹 +3 位作者 宋瑞良 朱浩波 王蕊 王倩 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第8期1198-1203,共6页
A wideband monolithic optoelectronic integrated receiver with a high-speed photo-detector,completely compatible with standard CMOS processes,is designed and implemented in 0.6μm standard CMOS technology.The experimen... A wideband monolithic optoelectronic integrated receiver with a high-speed photo-detector,completely compatible with standard CMOS processes,is designed and implemented in 0.6μm standard CMOS technology.The experimental results demonstrate that its performance approaches applicable requirements,where the photo-detector achieves a -3dB frequency of 1.11GHz,and the receiver achieves a 3dB bandwidth of 733MHz and a sensitivity of -9dBm for λ=850nm at BER=10-12. 展开更多
关键词 PHOTO-DETECTOR optoelectronic integrated receiver CMOS active inductor
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Sensitivity Design for a CMOS Optoelectronic Integrated Circuit Receiver
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作者 朱浩波 毛陆虹 +1 位作者 余长亮 马利远 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第5期676-680,共5页
A sensitivity design method for a CMOS optoelectronic integrated circuit (OEIC) receiver is reported. The receiver consists of a regulated cascade (RGC) transimpedance amplifier (TIA) and a double photodiode (... A sensitivity design method for a CMOS optoelectronic integrated circuit (OEIC) receiver is reported. The receiver consists of a regulated cascade (RGC) transimpedance amplifier (TIA) and a double photodiode (DPD) detector. The noise and sensitivity of the receiver are analyzed in detail. The noise mainly comes from the thermal noise of resistors and the flicker noise of MOSFETs. The relationship between noise and receiver sensitivity is presented. The sensitivity design method for the receiver is given by a set of equations. The OEIC receiver was implemented in a CSMC 0.6μm standard CMOS process. The measured eye diagram shows that the CMOS OEIC receiver is able to work at bit rates of up to 1.25GB/s and the sensitivity is - 12dBm. 展开更多
关键词 CMOS OEIC RECEIVER sensitivity noise
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Bandwidth Design for CMOS Monolithic Photoreceiver
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作者 粘华 毛陆虹 +2 位作者 李炜 陈弘达 贾久春 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第4期677-682,共6页
A monolithic photoreceiver which consists of a double photodiode (DPD) detector and a regulated cascade (RGC) transimpedance amplifier (TIA) is designed.The small signal circuit model of DPD is given and the bandwidth... A monolithic photoreceiver which consists of a double photodiode (DPD) detector and a regulated cascade (RGC) transimpedance amplifier (TIA) is designed.The small signal circuit model of DPD is given and the bandwidth design method of a monolithic photoreceiver is presented.An important factor which limits the bandwidth of DPD detector and the photoreceiver is presented and analyzed in detail.A monolithic photoreceiver with 1.71GHz bandwidth and 49dB transimpedance gain is designed and simulated by applying a low-cost 0.6μm CMOS process and the test result is given. 展开更多
关键词 double photodiode optoelectronics integrated circuit PHOTORECEIVER
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A High Speed,12-Channel Parallel,Monolithic Integrated CMOS OEIC Receiver
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作者 朱浩波 毛陆虹 +2 位作者 余长亮 陈弘达 唐君 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第9期1341-1345,共5页
The design and fabrication of a high speed, 12-channel monolithic integrated CMOS optoelectronic integrated circuit (OEIC) receiver are reported. Each channel of the receiver consists of a photodetector, a transimpe... The design and fabrication of a high speed, 12-channel monolithic integrated CMOS optoelectronic integrated circuit (OEIC) receiver are reported. Each channel of the receiver consists of a photodetector, a transimpedance amplifier,and a post-amplifier. The double photodiode structure speeds up the receiver but hinders responsivity. The adoption of active inductors in the TIA circuit extends the - 3dB bandwidth to a higher level. The receiver has been realized in a CSMC 0.6μm standard CMOS process. The measured results show that a single channel of the receiver is able to work at bit rates of 0.8- 1.4Gb/s. Altogether, the 12-channel OEIC receiver chip can be operated at 15Gb/s. 展开更多
关键词 CMOS OPTOELECTRONICS parallel receiver high speed
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