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基于光栅制造的光刻投影物镜设计
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作者 任东旭 班楠楠 +1 位作者 孔明旭 李彬 《工具技术》 北大核心 2023年第5期141-144,共4页
光栅尺作为位移传感器被广泛应用在精密测量体系中,随着测量趋于纳米级精度和大量程,对光栅尺的制造精度提出了更高的要求。刻线误差是影响光栅尺制造精度的重要因素,减小刻线误差能够有效提高光栅制造精度。设计了一种大孔径、低畸变... 光栅尺作为位移传感器被广泛应用在精密测量体系中,随着测量趋于纳米级精度和大量程,对光栅尺的制造精度提出了更高的要求。刻线误差是影响光栅尺制造精度的重要因素,减小刻线误差能够有效提高光栅制造精度。设计了一种大孔径、低畸变的投影光刻物镜,并在Zemax光学设计软件中对物镜进行了设计及优化。结果显示,其全视场波像差小于λ/10,MTF>0.6,最大畸变<0.0037%,最大分辨率R=2μm,数值孔径NA=0.15,缩小倍率5×,最大焦深±9.73μm。对其进行公差分析,结果表明,该物镜完全满足提高光栅尺制造精度的需求。 展开更多
关键词 刻线误差 投影光刻物镜 光学设计 光栅制造
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计量光栅制造综述 被引量:7
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作者 汤天瑾 曹向群 林斌 《光学仪器》 2004年第4期62-67,共6页
计量光栅作为一种重要的传感器件,广泛应用于工业生产的诸多领域。系统介绍了计量光栅的种类,重点介绍了国内外光栅制造的主要方法、光栅复制工艺以及衡量光栅质量的基本指标和检测方法。
关键词 计量光栅 光栅制造 光栅检测
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计量光栅的制造和检测方法
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作者 王志昆 杨栩生 《科技信息》 2009年第23期I0048-I0049,I0073,共3页
计量光栅作为一种精密位移的测量及传感元件广泛应用于计量、数字显示、数字控制等领域,有很高的分辨力。本文介绍了计量光栅的种类,重点介绍了计量光栅制造的主要方法以及衡量计量光栅质量的基本指标和基本检测方法。
关键词 计量光栅种类 光栅制造 光栅检测
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金属钢带光栅光纤角位移与线位移传感器技术研究
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作者 史淑华 许兴智 徐重廉 《大连理工大学学报》 EI CAS CSCD 北大核心 1997年第S2期78-78,共1页
金属钢带光栅光纤角位移与线位移传感器技术研究史淑华许兴智徐重廉等(北京超精细工程研究所100083)该项目是信息科学自动化领域中的一个重要课题。内容:钢带光栅制造技术;光栅光纤融合技术及用于角位移和线位移测量的基础研... 金属钢带光栅光纤角位移与线位移传感器技术研究史淑华许兴智徐重廉等(北京超精细工程研究所100083)该项目是信息科学自动化领域中的一个重要课题。内容:钢带光栅制造技术;光栅光纤融合技术及用于角位移和线位移测量的基础研究。用于智能加工设备、机器人、石化... 展开更多
关键词 光栅光纤 传感器技术 角位移 线位移测量 线位移传感器 工程研究 光栅制造 智能加工 基础研究 信息科学
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瞄准国际先进水平,发展高精度长光栅品种
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作者 马寿益 董威玲 《精密机床》 1989年第1期44-52,共9页
关键词 光栅 质量管理 光栅制造
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二维计量型平面光栅的设计
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作者 袁伟 朱煜 +1 位作者 张鸣 王磊杰 《光学学报》 EI CAS CSCD 北大核心 2023年第19期24-32,共9页
针对二维计量型平面光栅的设计和加工中工艺参数复杂的难点,本文基于电磁波时域有限差分方法,对硅基二维平面光栅的设计仿真进行了探索和研究,并进行了工艺实验验证。围绕平面光栅对衍射效率、衍射效率均衡性等指标的高要求,对不同结构... 针对二维计量型平面光栅的设计和加工中工艺参数复杂的难点,本文基于电磁波时域有限差分方法,对硅基二维平面光栅的设计仿真进行了探索和研究,并进行了工艺实验验证。围绕平面光栅对衍射效率、衍射效率均衡性等指标的高要求,对不同结构、槽深和占空比下二维光栅偏振衍射效率受到的影响和变化规律进行了探索。仿真和实验结果表明,在占空比45.0%~46.7%附近,随着槽深增大,S偏振衍射效率逐渐减小,P偏振衍射效率逐渐增大;光栅槽深在260 nm附近时,不同偏振衍射效率可以达到平衡,带圆角的梯台结构光栅模型与实际工艺结果相近,衍射效率和偏振衍射均衡性等符合设计要求。仿真结果与实际工艺结果基本一致,表明其精度满足要求,大幅度提高了平面光栅设计和加工的效率。 展开更多
关键词 光栅设计 光栅仿真 光栅制造 衍射光栅 衍射效率
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Roll-to-roll imprint for high precision grating manufacturing 被引量:3
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作者 Liu Hongzhong Shi Yongsheng +2 位作者 Yin Lei Jiang Weitao Lu Bingheng 《Engineering Sciences》 EI 2013年第1期39-43,共5页
In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of... In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of imprint roller and backup roller,and also the imprint pressure,are investigated. Various gratings with different periods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint,a calibration system is built with a dual-frequency laser interferometer. By the calibration,the self-made gratings can achieve ±4μm accuracy in 45mm measuring distance. 展开更多
关键词 high-precision gratings roll-to-roll imprint MISALIGNMENT roller mold
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Fluorinated polymer with high thermal stability for fabrication of 32-channel arrayed waveguide grating multiplexer on silicon
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作者 王菲 李艾泽 +4 位作者 孙伟 衣茂斌 姜振华 刘式墉 张大明 《Journal of Central South University of Technology》 EI 2005年第4期366-369,共4页
A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared ab... A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared absorption spectrum show that the materials have high thermal stability and high optical transparency in the infrared communication region. The refractive index of FPEEK can be controlled easily by changing the fluorine content of the materials. The 32-channel AWG multiplexer is fabricated using the FPEEK and oxygen reactive ion etching technology. The AWG multiplexer exhibits that the insertion loss is from 12.8 to 17.8 dB and the channel crosstalk is less than-20 dB. The wavelength channel spacing and the center wavelength are 0.8nm and 1548nm, respectively. 展开更多
关键词 wavelength division multiplexing arrayed waveguide grating fluorinated polymer poly (ether ether ketone)
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Review of Femtosecond Laser Fabricated Fiber Bragg Gratings for High Temperature Sensing 被引量:9
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作者 C. R. LIAO D. N. WANG 《Photonic Sensors》 SCIE EI CAS 2013年第2期97-101,共5页
This paper reviews high temperature sensing applications based on fiber Bragg gratings fabricated by use of femtosecond laser. Type II fiber Bragg gratings fabricated in the silica fiber can sustain up to 1200 ℃ whil... This paper reviews high temperature sensing applications based on fiber Bragg gratings fabricated by use of femtosecond laser. Type II fiber Bragg gratings fabricated in the silica fiber can sustain up to 1200 ℃ while that fabricated in the sapphire fiber have the good thermal stability up to 1745 ℃. 展开更多
关键词 Fiber Bragg grating femtosecond laser high temperature sensing silica fiber sapphire fiber microstructured fiber
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Design of a sinc-sampled fiber Bragg grating fabricated in high birefringence fiber 被引量:1
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作者 柏青 冯德军 季伟 《Optoelectronics Letters》 EI 2011年第5期367-370,共4页
In this paper we design a new kind of sinc-sampled fiber Bragg grating which is fabricated in high birefringence fiber (HBF). The sampled grating has two sets of reflection spectra along two perpendicular polarization... In this paper we design a new kind of sinc-sampled fiber Bragg grating which is fabricated in high birefringence fiber (HBF). The sampled grating has two sets of reflection spectra along two perpendicular polarization directions. The grating's channel number can be doubled approximately by designing the refractive index difference between the fast and slow axes of the fiber, which enhances the utilization ratio and reduces the claim for photosensitivity of the fiber. The group delay characteristics are theoretically studied and side-lobes are depressed by apodization as well to get the optimized spectra. The results show that the comb-like spectra of the grating have promising applications in both multi-wavelength polarized fiber lasers and fiber sensing networks. 展开更多
关键词 BIREFRINGENCE Fiber Bragg gratings Fiber lasers Group delay Optical sensors Refractive index
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Quasi-Dammann grating with proportional intensity of array spots for surface hardening of metal 被引量:2
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作者 LI ShaoXia TAN QiaoFeng +2 位作者 YU Gang WANG HengHai JIN GuoFan 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2011年第1期79-83,共5页
For surface hardening of metal,a quasi-Dammann grating (QDG) is proposed and fabricated to generate array spots with proportional-intensity distribution.To get uniformly hardened band distribution and improve the wear... For surface hardening of metal,a quasi-Dammann grating (QDG) is proposed and fabricated to generate array spots with proportional-intensity distribution.To get uniformly hardened band distribution and improve the wear resistance of the sample surface,a three-order QDG is designed to produce array spots with enhanced intensity in the edge.The design and fabrication of the QDG are described in detail.The surface profile of the fabricated grating was measured,which shows that the fabrication error is less than 2%.The laser beam intensity distribution shaped by the QDG was tested by a laser beam analyzer to verify the validity of the QDG.The application of the QDG in the laser surface hardening of metal was experimentally investigated,and the results show that the hardness distribution of the modified layer and the wear resistance of the sample surface are improved significantly by using the QDG. 展开更多
关键词 quasi Dammann grating beam shaping laser surface hardening DIFFRACTION
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