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硅低速刻蚀和钨膜刻蚀研究
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作者 杜树成 刘超 +1 位作者 姬成周 李国辉 《北京师范大学学报(自然科学版)》 CAS CSCD 北大核心 2001年第2期191-194,共4页
针对半导体器件研制过程中等离子体刻蚀工艺的具体需要 ,研究了硅的低速率刻蚀和钨薄膜的刻蚀 .得到了加磁场条件下刻蚀速率与刻蚀气体流量、射频功率的关系曲线 .得到了不加磁场时不同刻蚀气体流量下钨的刻蚀速率 ,以及在刻蚀气体中掺... 针对半导体器件研制过程中等离子体刻蚀工艺的具体需要 ,研究了硅的低速率刻蚀和钨薄膜的刻蚀 .得到了加磁场条件下刻蚀速率与刻蚀气体流量、射频功率的关系曲线 .得到了不加磁场时不同刻蚀气体流量下钨的刻蚀速率 ,以及在刻蚀气体中掺杂不同比例氧气时硅的刻蚀速率 .对上述结果加以简单的讨论并给出了符合工艺要求的刻蚀条件 . 展开更多
关键词 钨膜 离子反应刻蚀 半导体器件 光电术探测器
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Combination of solution-phase process and halide exchange for all-inorganic, highly stable CsPbBr_3 perovskite nanowire photodetector 被引量:10
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作者 lunpeng Zeng Hai Zhou +1 位作者 Ronghuan Liu Hao Wang 《Science China Materials》 SCIE EI CSCD 2019年第1期65-73,共9页
The synthesis of high quality all-inorganic perovskite nanowires needs the harsh conditions,complex process and precision instruments,which are not beneficial to their extensive application.Here,all-inorganic perovski... The synthesis of high quality all-inorganic perovskite nanowires needs the harsh conditions,complex process and precision instruments,which are not beneficial to their extensive application.Here,all-inorganic perovskite ce- sium lead bromine (CsPbBr3)nanowires (NWs)are demonstrated with the combination of solution-phase process and halide exchange technology.A metal-semiconductor-metal structure CsPbBr3 nanowire photodetector was prepared, which showed a detectivity as high as 1.7×10^11 cm Hz^1/2W^-1 (Jones)with rapid response time (The rise and decay time are 10ms and 22 ms,respectively).Moreover,our photodetectors have high stability under ultraviolet (UV)light,high temperature and humidity. 展开更多
关键词 solution-phase process halide exchange perovskite nanowires PHOTODETECTOR
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Hybrid 1D/2D heterostructure with electronic structure engineering toward high-sensitivity and polarization-dependent photodetector 被引量:1
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作者 Yuchen Zhou Lixiang Han +6 位作者 Qiqi Song Wei Gao Mengmeng Yang Zhaoqiang Zheng Le Huang Jiandong Yao Jingbo Li 《Science China Materials》 SCIE EI CAS CSCD 2022年第3期732-740,共9页
The widespread application of photodetectors has triggered an urgent need for high-sensitivity and polarization-dependent photodetection.In this field,the two-dimensional(2D)tungsten disulfide(WS_(2))exhibits intrigui... The widespread application of photodetectors has triggered an urgent need for high-sensitivity and polarization-dependent photodetection.In this field,the two-dimensional(2D)tungsten disulfide(WS_(2))exhibits intriguing optical and electronic properties,making it an attractive photosensitive material for optoelectronic applications.However,the lack of an effective built-in electric field and photoconductive gain mechanism in 2D WS_(2)impedes its application in high-performance photodetectors.Herein,we propose a hybrid heterostructure photodetector that contains 1D Te and 2D WS_(2).In this device,1D Te induces in-plane strain in 2D WS_(2),which regulates the electronic structures of local WS_(2)and gives rise to type-Ⅱ band alignment in the horizontal direction.Moreover,the vertical heterojunction built of 2D WS_(2)and 1D Te introduces a high photoconductive gain.Benefiting from these two effects,the transfer of photogenerated carriers is optimized,and the proposed photodetector exhibits high sensitivity(photoresponsivity of ~27.7 A W^(-1),detectivity of 9.5×10^(12)Jones,and short rise/decay time of 19.3/17.6 ms).In addition,anisotropic photodetection characteristics with a dichroic ratio up to 2.1 are achieved.This hybrid 1D/2D heterostructure overcomes the inherent limitations of each material and realizes novel properties,opening up a new avenue towards constructing multifunctional optoelectronic devices. 展开更多
关键词 hybrid heterostructure electronic structure engineering PHOTODETECTOR anisotropic photodetection
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Van der Waals epitaxial growth of two-dimensional PbSe and its high-performance heterostructure devices
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作者 Jian Jiang Ruiqing Cheng +6 位作者 Lei Yin Yao Wen Hao Wang Baoxing Zhai Chuansheng Liu Chongxin Shan Jun He 《Science Bulletin》 SCIE EI CAS CSCD 2022年第16期1659-1668,M0004,共11页
Inspired by the great success of ultrathin two-dimensional(2D)layered crystals,more and more attention is being paid to preparing 2D nanostructures from non-layered materials.They can significantly enrich the 2D mater... Inspired by the great success of ultrathin two-dimensional(2D)layered crystals,more and more attention is being paid to preparing 2D nanostructures from non-layered materials.They can significantly enrich the 2D materials and 2D heterostructures family,extend their application prospects,and bring us distinct properties from their bulk counterparts due to the strong 2D confinement effect.However,the realization of 2D non-layered semiconductors with strong light-harvesting capability and the ability to construct high-performance 2D heterostructures is still a critical challenge.Herein,we successfully synthesized 2D PbSe semiconductors with a large lateral dimension and ultrathin thickness via van der Waals epitaxy.The fabricated 2D PbSe device exhibits good electrical conductivity and superior multi-wavelength photoresponse performance with high responsivity(∼10^(3) A/W)and impressive detectivity(∼2×10^(11) Jones).Furthermore,we demonstrate that 2D PbSe nanosheets can serve as component units for constructing high-performance heterostructure devices.With our strategy,ultrahigh current on/off ratio(∼10^(8))and rectification ratio(∼10^()6),as well as high responsivity(∼3×10^(3) A/W)and detectivity(∼7×10^(12) Jones),can be achieved in PbSe/MoS_(2) back-gated transistors.These results indicate that 2D PbSe nanosheets and their heterostructures have tremendous applications potential in electrical and optoelectronic devices. 展开更多
关键词 2D PbSe PHOTODETECTORS Van der Waals epitaxy Current rectification Van der Waals heterostructures
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