Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to en...Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.展开更多
The system principle and configuration of the double differential pressure method for measuring oil tank level are presented. The fundamental method and circuit of fiber optic transmission are analyzed .The accuracy a...The system principle and configuration of the double differential pressure method for measuring oil tank level are presented. The fundamental method and circuit of fiber optic transmission are analyzed .The accuracy and security of level measurement in the oil tanks have been greatly improved.展开更多
文摘Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.
文摘The system principle and configuration of the double differential pressure method for measuring oil tank level are presented. The fundamental method and circuit of fiber optic transmission are analyzed .The accuracy and security of level measurement in the oil tanks have been greatly improved.