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激光加工硅片的膜片式法—珀干涉型光纤压力传感器 被引量:2
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作者 刘宇 王萌 +2 位作者 王博 姜丽娟 王少华 《传感器与微系统》 CSCD 北大核心 2013年第1期112-114,117,共4页
分析了多个反射面对单法—珀腔传感器光谱法解调的影响。为降低不参与形成法—珀腔的反射面的反射率以消除这一影响,利用Nd∶YAG激光加工系统在两面抛光硅片中的一面进行了表面纹理化处理。将经激光切割下的已表面纹理化的圆形硅片粘贴... 分析了多个反射面对单法—珀腔传感器光谱法解调的影响。为降低不参与形成法—珀腔的反射面的反射率以消除这一影响,利用Nd∶YAG激光加工系统在两面抛光硅片中的一面进行了表面纹理化处理。将经激光切割下的已表面纹理化的圆形硅片粘贴在中空玻璃毛细管一端,最后插入单模光纤并封装成非本征(EFPI)光纤法—珀干涉型压力传感器。进行了静态气压测试实验,结果表明:在40~240kPa气压范围内,传感器压力灵敏度为11.9 nm/kPa,线性度为1.51%。 展开更多
关键词 传感器 非本征法-珀干涉型 膜片式法-珀干涉型光纤压力传感器 Nd YAG激光加工
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应用光纤压力传感器的点火闭环控制系统 被引量:1
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作者 钱永康 林宝军 +1 位作者 郭作扬 刘鲲鹏 《汽车技术》 北大核心 1991年第10期4-7,共4页
介绍了一种应用光导纤维动态燃烧压力传感器的点火闭环控制系统。该控制系统利用最高燃烧压力点的曲轴转角作为反馈信号,实现其对发动机点火正时的控制。
关键词 汽车工程 发动机 点火控制系统 光纤-压力传感器 点火正时控制
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马赫-泽德光纤干涉仪的类别、特性及应用 被引量:3
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作者 肖冰 《长春大学学报》 2005年第6期16-18,共3页
马赫-泽德光纤干涉仪具有许多光电传感器无法比拟的优点,在国防军事,工业民用及高科技领域中都有着广泛的应用。本文介绍这类传感器的类别、特性及应用。
关键词 马赫-泽德光纤干涉仪 马赫-泽德光纤温度传感器 马赫-泽德光纤压力传感器
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Stabilization of Intensity- based Optical Fiber Pressure Sensor
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作者 WANG Li-tian, WANG Yu-tian, ZHENG Long-jiang, HOU Pei-guo (Yanshan University,Qinhuangdao 066004,CHN) 《Semiconductor Photonics and Technology》 CAS 1999年第4期221-225,共5页
A practical optical fiber differential pressure sensor is presented at first. Then the techniques of light source feedback, set up of reference channel, proportional measurement and other methods to improve the stabil... A practical optical fiber differential pressure sensor is presented at first. Then the techniques of light source feedback, set up of reference channel, proportional measurement and other methods to improve the stability of the system as well as to reduce the interference with same nature are emphatically discussed. Finally, the experiment results of the developed instrument are given. 展开更多
关键词 Light Intensity Optical Fiber Pressure Sensor Light Feedback Reference Channel
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Optically-powered Optical Fiber Pressure Sensor of Diffused Silicon
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作者 LIU Zhiyan(Yanshan University,Qinhuangdao 066004,CHN) 《Semiconductor Photonics and Technology》 CAS 1996年第2期137-141,共5页
In this paper an optically-powered optical fiber sensor for pressure measurement is introduced.Differential strain gauges of diffused silicon are employed as sensing elements and a micro-power-consumption circuit is u... In this paper an optically-powered optical fiber sensor for pressure measurement is introduced.Differential strain gauges of diffused silicon are employed as sensing elements and a micro-power-consumption circuit is used in the probe.Pulse width modulation and pulse position modulation are adopted for signal processing. 展开更多
关键词 Pressure Sensor Optical Fiber Sensors PWM PPM
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A bellow pressure fiber optic sensor for static ice pressure measurements 被引量:2
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作者 崔丽琴 龙欣 秦建敏 《Applied Geophysics》 SCIE CSCD 2015年第2期255-262,276,共9页
Static ice pressure affects safe operation of hydraulic structures. However, current detection methods are hindered by the following limitations: poor real-time performance and errors owing to the partial pressure of... Static ice pressure affects safe operation of hydraulic structures. However, current detection methods are hindered by the following limitations: poor real-time performance and errors owing to the partial pressure of the surrounding wall on traditional electrical resistance strain bellow pressure sensors. We developed a fiber optic sensor with a special pressure bellow to monitor the static ice pressure on hydraulic structures and used the sensor to measure static pressure in laboratory ice growth and melting tests from -30℃ to 5℃. The sensor resolution is 0.02 kPa and its sensitivity is 2.74 × 10-4/kPa. The experiments suggest that the static ice pressure peaks twice during ice growth and melting. The first peak appears when the ice temperature drops to -15℃ owing to the liquid water to solid ice transition. The second peak appears at 0℃ owing to the thermal expansion of the ice during ice melting. The novel fiber optic sensor exhibits stable performance, high resolution, and high sensitivity and it can be used to monitor the static ice pressure during ice growth and melting. 展开更多
关键词 Static ice pressure pressure bellow fiber optic sensor improved Y-type fiber bundle
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Optical Fiber Pressure Sensor with Reference Channel 被引量:2
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作者 YUZhijing TIANWei 《Semiconductor Photonics and Technology》 CAS 1997年第4期311-317,共7页
The principle of optical fiber pressure sensing probe with common diaphragm and the method for stabilizing the laser diodes are described in this paper at first.Then we discussed the improvement in characteristics of ... The principle of optical fiber pressure sensing probe with common diaphragm and the method for stabilizing the laser diodes are described in this paper at first.Then we discussed the improvement in characteristics of the system by means of taking the techniques of reference light channel and ratio measurement. 展开更多
关键词 Accuracy Laser Diodes Ratio Measurement Reference Channel
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Fiber Bragg Grating Pressure Sensor Based on Corrugated Diaphragm
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作者 FUHai-wei FUJun-mei QIAOXue-guang 《Semiconductor Photonics and Technology》 CAS 2004年第4期278-281,共4页
A kind of fiber Bragg grating pressure sensor based on corrugated diaphragm is proposed. The relationship between the central wavelength of reflective wave of FBG and pressure is given, and the expression of the press... A kind of fiber Bragg grating pressure sensor based on corrugated diaphragm is proposed. The relationship between the central wavelength of reflective wave of FBG and pressure is given, and the expression of the pressure sensitivity coefficient is also given. Within the range from 0 MPa to 0.3 MPa, the experimental pressure sensitivity is 7.83 nm/MPa, which is 2 610 times than that of the bare fiber grating. The experimental results agree with the theoretical analysis. It is indicated that the expected pressure sensitivity of the sensor can be obtained by optimizing the size and mechanical parameters of the corrugated diaphragm. 展开更多
关键词 Guided wave and fiber optics FBG FBG sensing FBG pressure sensing Pressure sensitivity
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New Optical Fiber Pressure Sensor with Reflection Capsule
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作者 LIU Zhiyan(Yanshan University, Qinhuangdao 066004, CHN) 《Semiconductor Photonics and Technology》 CAS 1996年第3期227-231,235,共6页
The ratio measurement by means of the sensing optical fiber and the reference fiber with different beginning positions, and the technique to improve the stability of the sensor are first described. Then the ability to... The ratio measurement by means of the sensing optical fiber and the reference fiber with different beginning positions, and the technique to improve the stability of the sensor are first described. Then the ability to restrain and compensate the interference of the same nature through the double channel ratio measurement is illustrated. Finally, the performance of sensor and its engineering design are discussed. 展开更多
关键词 Optical Fiber Optical Probe Pressure Sensors Ratio Measurement
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High Sensitivity FBG Pressure Sensor Based on Mechanical Amplifier and Interrogation Using Tunable FBG Filter
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作者 LIUYun-qi LIUZhi-guo 《Semiconductor Photonics and Technology》 CAS 1999年第3期171-174,178,共5页
A high sensitivity fiber Bragg grating pressure sensor by using mechanical amplifier is demonstrated. The measured pressure sensitivity is -1.80×10 -4 /MPa, which is about two orders of magnitude better than a si... A high sensitivity fiber Bragg grating pressure sensor by using mechanical amplifier is demonstrated. The measured pressure sensitivity is -1.80×10 -4 /MPa, which is about two orders of magnitude better than a simple monomode fiber with an in-fiber grating. The resolution of pressure measurement is 0.015 MPa based on interrogation using tunable fiber grating filter. 展开更多
关键词 Fiber Bragg Grating Mechanical Amplifier Pressure Sensor Tunable Filter CLC number:TN253 TP212 Document code:A
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