新型光触针式表面粗糙度测量系统

介绍一种基于光驱聚焦检测技术的光触针式表面粗糙度测量系统。测量光束聚焦在被测表面上，当表面高度变化时，音圈电机驱动聚焦物镜移动，使光点始终聚焦在被测表面上，音圈电机的移动量就反映了表面高度的变化。该系统的垂直分辨力可达０．０１μｍ，不仅适用于表面粗糙度测量，还可用于１ｍｍ范围内的相对长度测量。

基于光聚焦探测法的表面粗糙度非接触测量系统

本文介绍了基于光聚焦探测法的表面粗糙度非接触测量系统。该系统特别适合于接触测量易引起表面损害的软材料，如橡胶、纸张、磁带；硬材料，如硬金属、陶瓷；以及软材料覆盖表面，如磁盘等。

具有高空间分辨力的整形环形光式差动共焦测量法

提出一种新的具有高空间分辨力的整形环形光式差动共焦测量方法。该方法通过整形环形光式共焦测量法和锐化爱里斑主瓣,改善系统横向分辨力;通过差动共焦测量法改善系统的轴向分辨力,最终达到提高系统空间分辨能力的目的。理论分析和实验表明:整形环形光内孔归一化半径ε越大,横向分辨力改善越明显,量程扩展范围越宽;当入射光波长=λ632.8 nm,物镜数值孔径取NA=0.85,=ε0.5时,该系统的横向分辨力优于0.2μm,轴向分辨力优于2 nm。该方法为光触针测量系统空间分辨力的提高提供了1种新的方法,可广泛应用于超精密三维微细结构工件的超精密测量。

一种非接触式表面形貌测量系统的研究

介绍了一种非接触式的表面三维形貌测量系统，该系统采用了光学离焦原理中的象散法．从激光束光学中简洁的ＡＢＣＤ定律出发，分析并获得了系统的特性曲线，这比采用几何光学方法得到的结果更接近实际情况．在±５μｍ的线性范围内，系统的噪声在±６ｎｍ范围内．通过对几种标准样板的实测，得到了与实际相符的结果．最后给出了表面三维形貌的测量结果．

Measurement of the applanated diameter of ocular cornea using a novel optical probe

A precise measurement of the applanated diameter of the ocular cornea with the optical probe is very important in applanation tonometry.A novel optical probe with a common path configuration is presented.The optical probe mainly consists of a cone-shaped prism and a photodetector.The former serves as a measuring body touching the ocular cornea to shape the area to be measured,and the latter converts the quantity of the luminous flux returning from the cone-shaped prism into one electronic current signal.Laboratory experiments are carried out on a simulated eyeball,followed by an enucleated porcine eyeball specimen.Experimental results show that there is a significant rise of the normalized variational current with increasing the applanation diameter of the ocular cornea,and the sensitivity is 0.2111/mm with an error of 0.00263/mm.Measurements of the normalized variational current on the porcine eyeball have good agreement with those on the simulated eyeball.