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极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析 被引量:7
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作者 李文昊 姜岩秀 +2 位作者 吴娜 张桐 王鹍 《发光学报》 EI CAS CSCD 北大核心 2015年第9期1094-1099,共6页
针对应用于50~150 nm波段的变栅距光栅,采用球面波曝光系统进行优化设计,分析了不同宽度光栅的刻槽密度变化和光谱分辨能力。理论分析结果表明,光栅宽度为4 mm时,理论分辨能力高于14 000;光栅宽度为10 mm时,理论分辨能力约为9 000;光栅... 针对应用于50~150 nm波段的变栅距光栅,采用球面波曝光系统进行优化设计,分析了不同宽度光栅的刻槽密度变化和光谱分辨能力。理论分析结果表明,光栅宽度为4 mm时,理论分辨能力高于14 000;光栅宽度为10 mm时,理论分辨能力约为9 000;光栅宽度为30 mm时,理论分辨能力急剧下降,约为3 000。光栅的宽度越大,其刻槽弯曲程度就越大,光栅的光谱分辨能力就越低,因此球面波曝光系统只适合制作宽度较小的变栅距光栅。 展开更多
关键词 变栅距光栅 球面波 刻槽密度 光谱分辨能力
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Self-organized metal-semiconductor epitaxial graphene layer on off-axis 4H-SiC(0001)
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作者 Debora Pierucci Haikel Sediri +8 位作者 Mahdi Hajlaoui Emilio Velez-Fort Yannick J. Dappe Mathieu G. Silly Rachid Belkhou Abhay Shukla Fausto Sirotti Noelle Gogneau Abdelkarim Ouerghi 《Nano Research》 SCIE EI CAS CSCD 2015年第3期1026-1037,共12页
The remarkable properties of graphene have shown promise for new perspectives in future electronics, notably for nanometer scale devices. Here we grow graphene epitaxially on an off-axis 4H-SiC(0001) substrate and d... The remarkable properties of graphene have shown promise for new perspectives in future electronics, notably for nanometer scale devices. Here we grow graphene epitaxially on an off-axis 4H-SiC(0001) substrate and demonstrate the formation of periodic arrangement of monolayer graphene on planar (0001) terraces and Bernal bilayer graphene on (1120) nanofacets of SiC. We investigate these lateral superlattices using Raman spectroscopy, atomic force microscopy/ electrostatic force microscopy (AFM/EFM) and X-ray and angle resolved photoemission spectroscopy (XPS/ARPES). The correlation of EFM and ARPES reveals the appearance of permanent electronic band gaps in AB-stacked bilayer graphene on (1120) SiC nanofacets of 150 meV. This feature is confirmed by density functional theory (DFT) calculations. The charge transfer between the substrate and graphene bilayer results in an asymmetric charge distribution between the top and the bottom graphene layers opening an energy gap. This surface organization can be thus defined as self-organized metal-semiconductor graphene. 展开更多
关键词 epitaxial graphene layer monolayer BILAYER band gap opening Bernal stacking off-axis silicon carbide electronic properties
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