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全差分三轴MEMS电容加速度计的设计 被引量:1
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作者 张程浩 狄杰建 +2 位作者 刘昊 陈若愚 谭培培 《仪表技术与传感器》 CSCD 北大核心 2017年第3期25-29,共5页
采用刻蚀氧化硅牺牲层、沉淀多晶硅、再次刻蚀多晶硅的工艺,设计了基于单一敏感质量块的全差分三轴电容式加速度计。根据外界加速度激励对器件的不同位移作用,详细分析了三轴方向上加速度激励的交叉耦合影响。最后结合仿真结果得出:该... 采用刻蚀氧化硅牺牲层、沉淀多晶硅、再次刻蚀多晶硅的工艺,设计了基于单一敏感质量块的全差分三轴电容式加速度计。根据外界加速度激励对器件的不同位移作用,详细分析了三轴方向上加速度激励的交叉耦合影响。最后结合仿真结果得出:该器件具备结构简单紧凑、抗干扰能力强、灵敏度高、工艺简单等优点,在电子消费领域有很好的应用前景。 展开更多
关键词 全差分测量 三轴微加速度计 加速度耦合影响
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基于ADUC848的数字微欧计设计 被引量:1
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作者 邓本辉 《机电技术》 2009年第2期4-5,8,共3页
针对传统微欧计存在的体积大、元器件多、功耗大、测量范围窄的弊端,利用ADUC848,通过系统硬件和软件的设计,开发一种轻型微欧计,该微欧计准确度为0.2%,分辨率1μΩ,测量范围0Ω~32kΩ。
关键词 自动调节恒流信号源可编程增益放大器(PGA) 恒流四线测量差分输入
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Holocene slip rate and paleoearthquake records of the Salt Lake segment of the Northern Zhongtiaoshan Fault, Shanxi Province 被引量:3
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作者 SI SuPei LI YouLi +1 位作者 Lü ShengHua WANG YiRan 《Science China Earth Sciences》 SCIE EI CAS 2014年第9期2079-2088,共10页
The Northern Zhongtiaoshan Fault is a major deep fault at the southern margin of the Yuncheng Basin. There have been few studies on the fault, and the historical earthquakes are few and weak. However, the intensity of... The Northern Zhongtiaoshan Fault is a major deep fault at the southern margin of the Yuncheng Basin. There have been few studies on the fault, and the historical earthquakes are few and weak. However, the intensity of activity on the fault should never be underestimated. Through interpretations of aerial images, topography measurements and excavation of trenches, this paper studied the fault distribution, the surface deformation and the activity of the normal fault south of Salt Lake near the city of Yuncheng. By tracing faults in the three trenches, it was found that there had been at least three large paleoseismic events, at 1–3.5, 3.6–4.4 and 7.4–8.8 ka BP. Employing 14 C dating, we determined the same gravel layers in the uplifted side and downthrown side. Making differential Global Positioning System measurements of the vertical difference and topographic profile, we obtained the mean slip rate of the Northern Zhongtiaoshan Fault since 24.7 ka BP(0.75±0.05 mm/a). Using the results of relevant studies, we calculated the possible vertical fault displacement of one earthquake(2.35 m) and obtained the recurrence interval of characteristic earthquakes as 2940–3360 a after dividing the displacement by the mean slip rate. 展开更多
关键词 Northern Zhongtiaoshan Fault Holocene paleoearthquakes slip rate earthquake recurrence interval Shanxi Province
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