全氟化物气体(PFCs)中典型的温室气体SF_(6)和CF_(4)在环境中的排放从长远来看对大气温室效应的影响非常大。大气压微波等离子体炬的稳定放电状态提供了适合于气相化学反应的等离子体环境。为此利用大气压微波等离子体炬对SF_(6)和CF_(4...全氟化物气体(PFCs)中典型的温室气体SF_(6)和CF_(4)在环境中的排放从长远来看对大气温室效应的影响非常大。大气压微波等离子体炬的稳定放电状态提供了适合于气相化学反应的等离子体环境。为此利用大气压微波等离子体炬对SF_(6)和CF_(4)的分解和转化进行了研究,考察了通过傅立叶红外吸收光谱(FTIR)定量测量的去除率(destruction and remove efficiency,DRE)随着微波功率、气体体积流量、混合体积分数、反应室的结构等外部控制参数的变化规律。实验表明:通过增加优化化学反应缓冲室的结构参数和设置合适的工作条件可以使两者的去除率接近100%。因此,利用大气压微波等离子体炬针对一些实际工况下SF_(6)和CF_(4)的排放是能够有效控制的,例如,基于大气压微波等离子体技术的车载移动式处理设备,对降解和处理电力工业排放的SF_(6)给出了一种解决方案;采用管线末端处理方式,大气压微波等离子体炬应用于降解半导体工业排放的CF_(4)等尾气是一种具有应用前景的技术。展开更多
研究表明含氟气体的性质决定了原子氟(F)的转化效率,通常在CxFy气体中x的值越大,氟(F)的转化效率也就会越高。所以C3F8(八氟丙烷)比C2F6(乙氟烷)具有更高的利用效率,更少的PFC(全氟化物)的排放。文章主要研究在以四乙氧基硅烷(TOES)为...研究表明含氟气体的性质决定了原子氟(F)的转化效率,通常在CxFy气体中x的值越大,氟(F)的转化效率也就会越高。所以C3F8(八氟丙烷)比C2F6(乙氟烷)具有更高的利用效率,更少的PFC(全氟化物)的排放。文章主要研究在以四乙氧基硅烷(TOES)为基础的离子增强化学气相沉积(Plasma Enhanced Chemical Vapor Deposition,PECVD)的清洗制程中,利用分解效率高的C3F8气体取代C2F6气体。通过实验设计(Design Of Experiment,DOE),调整腔体压力、射频(RF)功率、气体流量等参数,最终得到最优化的新清洗配方。应用到实际的量产中,有效地降低了成本,减少了PFC的排放。展开更多
Anodic electrochemical behavior was studied on graphite anode at 1000 ℃ in cryolite-alumina molten salt by means of cyclic voltammetry. The high current peak in a typical cyclic voltammogram was discussed. It is cons...Anodic electrochemical behavior was studied on graphite anode at 1000 ℃ in cryolite-alumina molten salt by means of cyclic voltammetry. The high current peak in a typical cyclic voltammogram was discussed. It is considered that a type of oxyfluoroaliminate complex anions reacts with carbon to form a high-resistance CF film on the anode surface at a high potential. The passivation potential is 3.28 V in 0.5% alumina-containing electrolyte, and the passivation potential increases with alumina content increasing which indicates that the alumina content determines the anodic process in the cryolite-alumina molten salt system.展开更多
In view of the unclear cause of perfluorocarbons(PFCs)emission in the anode effect stage of aluminum electrolysis,the microscopic formation mechanism of PFCs was studied by density functional theory calculation and X-...In view of the unclear cause of perfluorocarbons(PFCs)emission in the anode effect stage of aluminum electrolysis,the microscopic formation mechanism of PFCs was studied by density functional theory calculation and X-ray photoelectron spectroscopy(XPS).It is found that the discharge of fluorine containing anions([F]−)on carbon anode first causes the substitution of C—H by C—F and further results in the saturation of aromatic C—C bonds,leading to the appearance of—CF_(3)or—C_(2)F_(5)group through six-carbon-ring opening.Elimination of—CF_(3)and—C_(2)F_(5) with F atom could be a likely mechanism of CF_(4) and C_(2)F_(6) formation.XPS results confirm that different types of—CF_(x) group can be formed on anode surface during electrolysis,and the possibility that[F]−discharges continuously at the C edge and finally forms different C—F bonds in quantum mechanical calculation was verified.展开更多
文摘全氟化物气体(PFCs)中典型的温室气体SF_(6)和CF_(4)在环境中的排放从长远来看对大气温室效应的影响非常大。大气压微波等离子体炬的稳定放电状态提供了适合于气相化学反应的等离子体环境。为此利用大气压微波等离子体炬对SF_(6)和CF_(4)的分解和转化进行了研究,考察了通过傅立叶红外吸收光谱(FTIR)定量测量的去除率(destruction and remove efficiency,DRE)随着微波功率、气体体积流量、混合体积分数、反应室的结构等外部控制参数的变化规律。实验表明:通过增加优化化学反应缓冲室的结构参数和设置合适的工作条件可以使两者的去除率接近100%。因此,利用大气压微波等离子体炬针对一些实际工况下SF_(6)和CF_(4)的排放是能够有效控制的,例如,基于大气压微波等离子体技术的车载移动式处理设备,对降解和处理电力工业排放的SF_(6)给出了一种解决方案;采用管线末端处理方式,大气压微波等离子体炬应用于降解半导体工业排放的CF_(4)等尾气是一种具有应用前景的技术。
文摘研究表明含氟气体的性质决定了原子氟(F)的转化效率,通常在CxFy气体中x的值越大,氟(F)的转化效率也就会越高。所以C3F8(八氟丙烷)比C2F6(乙氟烷)具有更高的利用效率,更少的PFC(全氟化物)的排放。文章主要研究在以四乙氧基硅烷(TOES)为基础的离子增强化学气相沉积(Plasma Enhanced Chemical Vapor Deposition,PECVD)的清洗制程中,利用分解效率高的C3F8气体取代C2F6气体。通过实验设计(Design Of Experiment,DOE),调整腔体压力、射频(RF)功率、气体流量等参数,最终得到最优化的新清洗配方。应用到实际的量产中,有效地降低了成本,减少了PFC的排放。
基金Projects (50804010, 51074046) supported by the National Natural Science Foundation of China
文摘Anodic electrochemical behavior was studied on graphite anode at 1000 ℃ in cryolite-alumina molten salt by means of cyclic voltammetry. The high current peak in a typical cyclic voltammogram was discussed. It is considered that a type of oxyfluoroaliminate complex anions reacts with carbon to form a high-resistance CF film on the anode surface at a high potential. The passivation potential is 3.28 V in 0.5% alumina-containing electrolyte, and the passivation potential increases with alumina content increasing which indicates that the alumina content determines the anodic process in the cryolite-alumina molten salt system.
基金the financial supports from the National Natural Science Foundation of China(Nos.51974373,51874365,62133016)the Major Scientific and Technological Innovation Projects of Shandong Province,China(No.2019JZZY020123)the Fundamental Research Funds for the Central Universities of Central South University,China(No.2019zzts242)。
文摘In view of the unclear cause of perfluorocarbons(PFCs)emission in the anode effect stage of aluminum electrolysis,the microscopic formation mechanism of PFCs was studied by density functional theory calculation and X-ray photoelectron spectroscopy(XPS).It is found that the discharge of fluorine containing anions([F]−)on carbon anode first causes the substitution of C—H by C—F and further results in the saturation of aromatic C—C bonds,leading to the appearance of—CF_(3)or—C_(2)F_(5)group through six-carbon-ring opening.Elimination of—CF_(3)and—C_(2)F_(5) with F atom could be a likely mechanism of CF_(4) and C_(2)F_(6) formation.XPS results confirm that different types of—CF_(x) group can be formed on anode surface during electrolysis,and the possibility that[F]−discharges continuously at the C edge and finally forms different C—F bonds in quantum mechanical calculation was verified.
