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一种提高并行共焦显微测量重复性精度的方法 被引量:1
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作者 高晓斌 王永红 《合肥工业大学学报(自然科学版)》 CAS CSCD 2004年第10期1365-1368,共4页
并行共焦测量是利用微透镜和小孔列阵产生一个二维点光源阵列,实现对物面上一个二维阵列物点的同步共焦测量。传统的共焦显微测量系统对三维形貌进行重构,是通过搜索各个轴向扫描图像中光斑光强极值点的位置来获取三维轮廓,轴向扫描间... 并行共焦测量是利用微透镜和小孔列阵产生一个二维点光源阵列,实现对物面上一个二维阵列物点的同步共焦测量。传统的共焦显微测量系统对三维形貌进行重构,是通过搜索各个轴向扫描图像中光斑光强极值点的位置来获取三维轮廓,轴向扫描间距的选取对测量精度和重复性的影响很大。文章介绍了一种新的数据处理方法,其先对各物点的轴向光强采样值进行线性拟合,再由拟合得到的直线确定最大光强所对应的轴截面位置,这样可以在较大的轴向采样间距下获得较高精度的三维轮廓信息。实验结果表明,采用这种数据处理方法,测量精度和重复性精度均有所提高。 展开更多
关键词 共焦显微测量 线性拟合 三维形貌
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A shaped annular beam tri-heterodyne confocal microscope with good anti-environmental interference capability 被引量:2
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作者 赵维谦 冯政德 邱丽荣 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第6期1624-1631,共8页
annular beam tri-heterodyne confocal microscope has been proposed to improve the anti-environmental interference capability and the resolution of a eonfoeal microscope. It simultaneously detects far-, on-, and near-fo... annular beam tri-heterodyne confocal microscope has been proposed to improve the anti-environmental interference capability and the resolution of a eonfoeal microscope. It simultaneously detects far-, on-, and near-focus signals with given phase differences by dividing the measured light path of the eonfoeal microscope into three sub-paths (signals). Pair-wise real-time heterodyne subtraction of the three signals is used to improve the anti-environmental interference capability, axial resolution, and linearity; and a shaped annular beam super-resolution technique is used to improve lateral resolution. Theoretical analyses and preliminary experiments indicate that an axial resolution of about 1 nm can be achieved with a shaped annular beam tri-heterodyne confoeal microscope and its lateral resolution can be better than 0.2 um for A = 632.8 nm, the numerical aperture of the lens of the microscope is NA = 0.85, and the normalized radius e = 0.5. 展开更多
关键词 confocal microscopy SUPER-RESOLUTION surface measurements
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