The mositure content inside the hermetic package of semiconductor device has been quantitatively measured by using in-site sensor technique and computer-aided-test system.The principle and apparatus for measurement ar...The mositure content inside the hermetic package of semiconductor device has been quantitatively measured by using in-site sensor technique and computer-aided-test system.The principle and apparatus for measurement are introduced.The results show good repeatability and consistency.This technology can be used as a standard test for controlling the moisture content within semiconductor device package.展开更多
文摘The mositure content inside the hermetic package of semiconductor device has been quantitatively measured by using in-site sensor technique and computer-aided-test system.The principle and apparatus for measurement are introduced.The results show good repeatability and consistency.This technology can be used as a standard test for controlling the moisture content within semiconductor device package.