A new partitioning methodology is presented to accelerate 130nm and beyond large scale alternating phase shift mask(Alt PSM) design flow.This method deals with granularity self adaptively.Phas...A new partitioning methodology is presented to accelerate 130nm and beyond large scale alternating phase shift mask(Alt PSM) design flow.This method deals with granularity self adaptively.Phase conflicts resolution approaches are described and strategies guaranteeing phase compatible during layout compaction are also discussed.An efficient CAD prototype for dark field Alt PSM based on these algorithms is implemented.The experimental results on several industry layouts show that the tool can successfully cope with the rapid growth of phase conflicts with good quality and satisfy lower resource consumption with different requirements of precision and speedup.展开更多
This paper analyzes conflict features in architecture pipe routing,and builds a pipe routing design conflict model by taking into account of discrete nominal internal diameter selection of pipes,material costs,and con...This paper analyzes conflict features in architecture pipe routing,and builds a pipe routing design conflict model by taking into account of discrete nominal internal diameter selection of pipes,material costs,and conflict solution sequence.Considering pipe routing as an assembling process,a conflict detection approach for pipe routing in collaborative architectural design is proposed based on an aforementioned model.Constraint network is used to describe the relationship among pipe routing design parameters and constraints;design conflicts are detected by matching designers' input and constraint network;and detected design conflicts are reordered according to the number of pipe parameters in conflicts.In order to support the collaborative requirement of pipe routing design,a prototype system using browser/server architecture is developed.An illustrative example of water pipe routing in a room is used to show the effectiveness and efficiency of the approach.展开更多
文摘A new partitioning methodology is presented to accelerate 130nm and beyond large scale alternating phase shift mask(Alt PSM) design flow.This method deals with granularity self adaptively.Phase conflicts resolution approaches are described and strategies guaranteeing phase compatible during layout compaction are also discussed.An efficient CAD prototype for dark field Alt PSM based on these algorithms is implemented.The experimental results on several industry layouts show that the tool can successfully cope with the rapid growth of phase conflicts with good quality and satisfy lower resource consumption with different requirements of precision and speedup.
基金Supported by the National High Technology Research and Development Programme of China(No.2006AA04Z112)the National Natural Science Foundation of China(No.51175287)the National S&T Major Program(No.2009ZX02001-003)
文摘This paper analyzes conflict features in architecture pipe routing,and builds a pipe routing design conflict model by taking into account of discrete nominal internal diameter selection of pipes,material costs,and conflict solution sequence.Considering pipe routing as an assembling process,a conflict detection approach for pipe routing in collaborative architectural design is proposed based on an aforementioned model.Constraint network is used to describe the relationship among pipe routing design parameters and constraints;design conflicts are detected by matching designers' input and constraint network;and detected design conflicts are reordered according to the number of pipe parameters in conflicts.In order to support the collaborative requirement of pipe routing design,a prototype system using browser/server architecture is developed.An illustrative example of water pipe routing in a room is used to show the effectiveness and efficiency of the approach.
