In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error m...In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error model for the laser annealing table was established. It supports the identification of 7 geometric errors affecting the annealing accuracy. An original identification method was presented to recognize these geometric errors. Positioning errors of 5 lines in the workspace were measured by a laser interferometer, and the 7 geometric errors were identified by the proposed algorithm. Finally, a software-based error compensation method was adopted, and a compensation mechanism was developed in a postprocessor based on LabVIEW. The identified geometric errors can be compensated by converting ideal NC codes to actual NC codes. A validation experiment has been conducted on the laser annealing table, and the results indicate that positioning errors of two validation lines decreased from ±37 μm and ±33 μm to ±5 μm and ±4.5 μm, respectively. The geometric error modeling, identification and compensation method presented in this work can be straightforwardly extended to any configurations of 2-dimensional worktable.展开更多
An objective identification technique is used to detect regional extreme low temperature events （RELTE） in China during 1960-2009. Their spatial-temporal characteristics are analyzed. The results indicate that the l...An objective identification technique is used to detect regional extreme low temperature events （RELTE） in China during 1960-2009. Their spatial-temporal characteristics are analyzed. The results indicate that the lowest temperatures of RELTE, together with the frequency distribution of the geometric latitude center, exhibit a double-peak feature. The RELTE frequently happen near the geometric area of 30°N and 42°N before the mid-1980s, but shifted afterwards to 30°N. During 1960-2009, the frequency~ intensity, and the maximum impacted area of RELTE show overall decreasing trends. Due to the contribution of RELTE, with long duratioh and large spatial range, which account for 10% of the total RELTE, there is a significant turning point in the late 1980s. A change to a much more steady state after the late 1990s is identified. In addition, the integrated indices of RELTE are classified and analyzed.展开更多
In order to improve the identification capability of ultra wide-band radar,this paper in-troduces a step-variant multiresolution approach for the time-shift parameter estimation. Subsequently,combining with the approa...In order to improve the identification capability of ultra wide-band radar,this paper in-troduces a step-variant multiresolution approach for the time-shift parameter estimation. Subsequently,combining with the approach,a Geometrical Theory of Diffraction(GTD) model-based time-shift Invariant method to target identification using Matching Pursuits and Likelihood Ratio Test(IMPLRT) is developed. Simulation results using measured scattering signatures of two targets in an ultra wide-band chamber are presented contrasting the performance of the IMPLRT to the Wang's MPLRT technique.展开更多
基金Projects(2012ZX04010-011,2009ZX02037-02) supported by the Key National Science and Technology Project of China
文摘In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error model for the laser annealing table was established. It supports the identification of 7 geometric errors affecting the annealing accuracy. An original identification method was presented to recognize these geometric errors. Positioning errors of 5 lines in the workspace were measured by a laser interferometer, and the 7 geometric errors were identified by the proposed algorithm. Finally, a software-based error compensation method was adopted, and a compensation mechanism was developed in a postprocessor based on LabVIEW. The identified geometric errors can be compensated by converting ideal NC codes to actual NC codes. A validation experiment has been conducted on the laser annealing table, and the results indicate that positioning errors of two validation lines decreased from ±37 μm and ±33 μm to ±5 μm and ±4.5 μm, respectively. The geometric error modeling, identification and compensation method presented in this work can be straightforwardly extended to any configurations of 2-dimensional worktable.
基金supported by the Special Scientific Research Projects for Public Interest(No.GYHY201006021 and GYHY201106016)the National Natural Science Foundation of China(No.41205040 and 40930952)
文摘An objective identification technique is used to detect regional extreme low temperature events （RELTE） in China during 1960-2009. Their spatial-temporal characteristics are analyzed. The results indicate that the lowest temperatures of RELTE, together with the frequency distribution of the geometric latitude center, exhibit a double-peak feature. The RELTE frequently happen near the geometric area of 30°N and 42°N before the mid-1980s, but shifted afterwards to 30°N. During 1960-2009, the frequency~ intensity, and the maximum impacted area of RELTE show overall decreasing trends. Due to the contribution of RELTE, with long duratioh and large spatial range, which account for 10% of the total RELTE, there is a significant turning point in the late 1980s. A change to a much more steady state after the late 1990s is identified. In addition, the integrated indices of RELTE are classified and analyzed.
文摘In order to improve the identification capability of ultra wide-band radar,this paper in-troduces a step-variant multiresolution approach for the time-shift parameter estimation. Subsequently,combining with the approach,a Geometrical Theory of Diffraction(GTD) model-based time-shift Invariant method to target identification using Matching Pursuits and Likelihood Ratio Test(IMPLRT) is developed. Simulation results using measured scattering signatures of two targets in an ultra wide-band chamber are presented contrasting the performance of the IMPLRT to the Wang's MPLRT technique.
