精密频率测量边沿效应的特性分析

在精密频率测量中,通过相位处理的方法能够得到很高的测量分辨率,而边沿效应的发现及应用对精密频率测量精度的提高起着至关重要的作用,文中详细分析了边沿效应的产生机理,并通过对边沿效应特性在精密频率测量方面的应用进行了详细分析及验证.在与频差倍增器结合的测量实验中,经二级倍增后采用边沿处理的频率稳定度可达4.8×10^(-13)/s,进一步揭示了依靠检测装置分辨率模糊区边沿,不仅保证了高的分辨率,而且更保证了在噪声环境中测量结果的正确性.

Nano-Level Electron Beam Lithography

The JEOL JBX-5000LS is a vector type machine.The system hardware features an ion-pumped column,a LaB 6 electron emitter,25kV and 50kV accelerating voltage,and a turbo-pumped sample chamber.The resolution,stability,stitching and overlay of this system are evaluated.The system can write complex patterns at dimensions down to 30nm.The demonstrated overlay accuracy of this system is better than 40nm.