划痕测量装置在轨道交通装备中的应用

本文通过对划痕测量装置在轨道交通装备中应用的介绍,阐述了划痕测量装置能够较好地解决各种铁路客车的轮对退卸后的车轴表面划痕深度的测量。同时也实现了对车轴表面凹坑的深度,体积,面积以及凹坑陡度等参数的快速准确测量。

飞机表面划痕非接触测量仪的研究

介绍了一种飞机表面划痕非接触测量仪。它以激光三角传感器为主要组成部件，并附以机械扫描装置，可完成被测飞机表面划痕的非接触测量。在分析了被测表面散、反射特性的基础上，给出了激光三角传感器正确放置方式，并提出改善测量精度的传感器姿态调整法。针对浅划痕测量时噪声较大的特点，提出利用子波分析的方法突出被测划痕形貌的信号处理方法，实验表明了此方法的可行性。本测量仪具有非接触测量、测量范围大、精度高、结构简单、成本较低的特点。

飞机座舱玻璃划痕深度的测量

应用光切法和相衬法，对飞机座舱玻璃划痕深度的测量问题，进行了详细的论述．

Scratching by pad asperities in copper electrochemical-mechanical polishing

Low dielectric constant materials/Cu interconnects integration technology provides the direction as well as the challenges in the fabrication of integrated circuits(IC) wafers during copper electrochemical-mechanical polishing(ECMP). These challenges arise primarily from the mechanical fragility of such dielectrics, in which the undesirable scratches are prone to produce. To mitigate this problem, a new model is proposed to predict the initiation of scratching based on the mechanical properties of passive layer and copper substrate. In order to deduce the ratio of the passive layer yield strength to the substrate yield strength and the layer thickness, the limit analysis solution of surface scratch under Berkovich indenter is used to analyze the nano-scratch experimental measurements. The modulus of the passive layer can be calculated by the nano-indentation test combined with the FEM simulation. It is found that the film modulus is about 30% of the substrate modulus. Various regimes of scratching are delineated by FEM modeling and the results are verified by experimental data.

衍射光强取样分析法测定划痕宽度:实验部分

根据衍射光强取样分析法理论部分的测量原理设计了一套实验方案，比较了该方法与轮廓仪、显微镜对划痕实际宽度的测试结果，给出了其相对测量误差，并分析了误差的主要来源。该方法速度快，精度高，有推广和应用的价值。