The defect detection of wafers is an important part of semiconductor manufacturing.The wafer defect map formed from the defects can be used to trace back the problems in the production process and make improvements in...The defect detection of wafers is an important part of semiconductor manufacturing.The wafer defect map formed from the defects can be used to trace back the problems in the production process and make improvements in the yield of wafer manufacturing.Therefore,for the pattern recognition of wafer defects,this paper uses an improved ResNet convolutional neural network for automatic pattern recognition of seven common wafer defects.On the basis of the original ResNet,the squeeze-and-excitation(SE)attention mechanism is embedded into the network,through which the feature extraction ability of the network can be improved,key features can be found,and useless features can be suppressed.In addition,the residual structure is improved,and the depth separable convolution is added to replace the traditional convolution to reduce the computational and parametric quantities of the network.In addition,the network structure is improved and the activation function is changed.Comprehensive experiments show that the precision of the improved ResNet in this paper reaches 98.5%,while the number of parameters is greatly reduced compared with the original model,and has well results compared with the common convolutional neural network.Comprehensively,the method in this paper can be very good for pattern recognition of common wafer defect types,and has certain application value.展开更多
Reef-bank reservoirs are an important target for petroleum exploration in marine carbonates and also an essential supplemental area for oil and gas production in China. Due to the diversity of reservoirs and the extre...Reef-bank reservoirs are an important target for petroleum exploration in marine carbonates and also an essential supplemental area for oil and gas production in China. Due to the diversity of reservoirs and the extreme heterogeneity of reef-banks, it is very difficult to discriminate the sedimentary facies and lithologies in reef-bank reservoirs using conventional well logs. The borehole image log provides clear identification of sedimentary structures and textures and is an ideal tool for discriminating sedimentary facies and lithologies. After examining a large number of borehole images and cores, we propose nine typical patterns for borehole image interpretation and a method that uses these patterns to discriminate sedimentary facies and lithologies in reeI^bank reservoirs automatically. We also develop software with user-friendly interface. The results of applications in reef-bank reservoirs in the middle Tarim Basin and northeast Sichuan have proved that the proposed method and the corresponding software are quite effective.展开更多
A damage location method using multi-layer perceptron (MLP) is developed to diagnose the cable damage of a real long span cable-stayed bridge. Firstly, the damage patterns are defined based on dynamical calculation....A damage location method using multi-layer perceptron (MLP) is developed to diagnose the cable damage of a real long span cable-stayed bridge. Firstly, the damage patterns are defined based on dynamical calculation. The analysis of damage pattern reveals that the damage patterns caused by different damage locations have inherent distinctness, while the damage extent only linearly amplifies the damage pattern curves. And 4th, 6th and 7th order frequencies are canceled from the patterns because of their insensitiveness to cable damage. Then a MLP network is designed by trail-error method to describe the 7-D mapping space of damage pattern. Identification results prove that the properly organized MLP can grasp the damage pattern and identify the damage location.展开更多
To monitor the tool wear states in turning, a new way based on the wavelet transformation to get the signal characters, which can reflect the tool wear states, was proposed. Using discrete dyadic wavelet transform, th...To monitor the tool wear states in turning, a new way based on the wavelet transformation to get the signal characters, which can reflect the tool wear states, was proposed. Using discrete dyadic wavelet transform, the acoustic emission(AE) signal of cutting process was decomposed; the root mean square(RMS) values of the decomposed signals at different scales were taken as the feature vector; the technique of fuzzy pattern identification was used to real time monitor the tool wear states. Based on choosing the suitable standard samples, this method can correctly identify the tool wear states. Experiments showed that the technique based on wavelet analysis is suitable for real time implementation in manufacturing application.展开更多
The concept of the degree of similarity between interval-valued intuitionistic fuzzy sets (IVIFSs) is introduced, and some distance measures between IVIFSs are defined based on the Hamming distance, the normalized H...The concept of the degree of similarity between interval-valued intuitionistic fuzzy sets (IVIFSs) is introduced, and some distance measures between IVIFSs are defined based on the Hamming distance, the normalized Hamming distance, the weighted Hamming distance, the Euclidean distance, the normalized Euclidean distance, and the weighted Euclidean distance, etc. Then, by combining the Hausdorff metric with the Hamming distance, the Euclidean distance and their weighted versions, two other similarity measures between IVIFSs, i. e., the weighted Hamming distance based on the Hausdorff metric and the weighted Euclidean distance based on the Hausdorff metric, are defined, and then some of their properties are studied. Finally, based on these distance measures, some similarity measures between IVIFSs are defined, and the similarity measures are applied to pattern recognitions with interval-valued intuitionistic fuzzy information.展开更多
The combination of pyrolysis high resolution gas chromatography and pat- tern recognition techniques is a powerful tool for the classification of traditional Chinese drug.A study has been completed on 55 Beimu samples...The combination of pyrolysis high resolution gas chromatography and pat- tern recognition techniques is a powerful tool for the classification of traditional Chinese drug.A study has been completed on 55 Beimu samples of five different geographic origins: Eastern China.Central China.South-western China,North-western China and North-eastern China.Principal component analysis and SIMCA are applied to effectively classifying the samples according to the origin of the plants.The chemical information contained in the high resolution gas chromatographic data is sufficient to characterize the geographic origin of sam- pies.展开更多
基金supported by the 2021 Annual Scientific Research Funding Project of Liaoning Pro-vincial Department of Education(Nos.LJKZ0535,LJKZ0526)the Natural Science Foundation of Liaoning Province(No.2021-MS-300)。
文摘The defect detection of wafers is an important part of semiconductor manufacturing.The wafer defect map formed from the defects can be used to trace back the problems in the production process and make improvements in the yield of wafer manufacturing.Therefore,for the pattern recognition of wafer defects,this paper uses an improved ResNet convolutional neural network for automatic pattern recognition of seven common wafer defects.On the basis of the original ResNet,the squeeze-and-excitation(SE)attention mechanism is embedded into the network,through which the feature extraction ability of the network can be improved,key features can be found,and useless features can be suppressed.In addition,the residual structure is improved,and the depth separable convolution is added to replace the traditional convolution to reduce the computational and parametric quantities of the network.In addition,the network structure is improved and the activation function is changed.Comprehensive experiments show that the precision of the improved ResNet in this paper reaches 98.5%,while the number of parameters is greatly reduced compared with the original model,and has well results compared with the common convolutional neural network.Comprehensively,the method in this paper can be very good for pattern recognition of common wafer defect types,and has certain application value.
基金sponsored by the National S&T Major Special Project(No.2008ZX05020-01)
文摘Reef-bank reservoirs are an important target for petroleum exploration in marine carbonates and also an essential supplemental area for oil and gas production in China. Due to the diversity of reservoirs and the extreme heterogeneity of reef-banks, it is very difficult to discriminate the sedimentary facies and lithologies in reef-bank reservoirs using conventional well logs. The borehole image log provides clear identification of sedimentary structures and textures and is an ideal tool for discriminating sedimentary facies and lithologies. After examining a large number of borehole images and cores, we propose nine typical patterns for borehole image interpretation and a method that uses these patterns to discriminate sedimentary facies and lithologies in reeI^bank reservoirs automatically. We also develop software with user-friendly interface. The results of applications in reef-bank reservoirs in the middle Tarim Basin and northeast Sichuan have proved that the proposed method and the corresponding software are quite effective.
文摘A damage location method using multi-layer perceptron (MLP) is developed to diagnose the cable damage of a real long span cable-stayed bridge. Firstly, the damage patterns are defined based on dynamical calculation. The analysis of damage pattern reveals that the damage patterns caused by different damage locations have inherent distinctness, while the damage extent only linearly amplifies the damage pattern curves. And 4th, 6th and 7th order frequencies are canceled from the patterns because of their insensitiveness to cable damage. Then a MLP network is designed by trail-error method to describe the 7-D mapping space of damage pattern. Identification results prove that the properly organized MLP can grasp the damage pattern and identify the damage location.
文摘To monitor the tool wear states in turning, a new way based on the wavelet transformation to get the signal characters, which can reflect the tool wear states, was proposed. Using discrete dyadic wavelet transform, the acoustic emission(AE) signal of cutting process was decomposed; the root mean square(RMS) values of the decomposed signals at different scales were taken as the feature vector; the technique of fuzzy pattern identification was used to real time monitor the tool wear states. Based on choosing the suitable standard samples, this method can correctly identify the tool wear states. Experiments showed that the technique based on wavelet analysis is suitable for real time implementation in manufacturing application.
基金The National Natural Science Foundation of China (No70571087)the National Science Fund for Distinguished Young Scholarsof China (No70625005)
文摘The concept of the degree of similarity between interval-valued intuitionistic fuzzy sets (IVIFSs) is introduced, and some distance measures between IVIFSs are defined based on the Hamming distance, the normalized Hamming distance, the weighted Hamming distance, the Euclidean distance, the normalized Euclidean distance, and the weighted Euclidean distance, etc. Then, by combining the Hausdorff metric with the Hamming distance, the Euclidean distance and their weighted versions, two other similarity measures between IVIFSs, i. e., the weighted Hamming distance based on the Hausdorff metric and the weighted Euclidean distance based on the Hausdorff metric, are defined, and then some of their properties are studied. Finally, based on these distance measures, some similarity measures between IVIFSs are defined, and the similarity measures are applied to pattern recognitions with interval-valued intuitionistic fuzzy information.
文摘The combination of pyrolysis high resolution gas chromatography and pat- tern recognition techniques is a powerful tool for the classification of traditional Chinese drug.A study has been completed on 55 Beimu samples of five different geographic origins: Eastern China.Central China.South-western China,North-western China and North-eastern China.Principal component analysis and SIMCA are applied to effectively classifying the samples according to the origin of the plants.The chemical information contained in the high resolution gas chromatographic data is sufficient to characterize the geographic origin of sam- pies.