To meet stringent requirements in vacuum and cleanness for semiconductor manufacturing, a new power drive module for Selective Compliant Assembly Robot Arm （SCARA） type robot has been developed for wafer-transfer. I...To meet stringent requirements in vacuum and cleanness for semiconductor manufacturing, a new power drive module for Selective Compliant Assembly Robot Arm （SCARA） type robot has been developed for wafer-transfer. In order to obtain complete hermetic volume for higher vacuum and prevent leakage of hazardous gases, feedthrough motions involving transfer between the vacuum and motors are achieved by the use of metal bellows and magnetic coupling. An analysis of the coaxial-type magnetic coupling by employing the technique of current sheet model is presented. This approach is proved to be a precise and easy method. The construction of power drive module shows its advantage in maintaining ultrahigh vacuum and also enhances the efficiency for transporting the wafer, as compared with conventional design.展开更多
This paper aims at exploring the tectonic characteristics of the South China Continent （SCC） and extracting the universal tec- tonic rules from these characteristics,to help enrich the plate tectonic theory and bett...This paper aims at exploring the tectonic characteristics of the South China Continent （SCC） and extracting the universal tec- tonic rules from these characteristics,to help enrich the plate tectonic theory and better understand the continental dynamic system. For this purpose, here we conduct a multi-disciplinary investigation and combine it with the previous studies to reas- sess the tectonics and evolution of SCC and propose that the tectonic framework of the continent comprises two blocks, three types of tectonic units, four deformation systems, and four evolutionary stages with distinctive mechanism and tectonic characteris- tics since the Neoproterozoic. The four evolutionary stages are： （1） The amalgamation and break-up of the Neoproterozoic plates, typically the intracontinental rifting. （2） The early Paleozoic and Mesozoic intracontinental orogeny confined by plate tectonics, forming two composite tectonic domains. （3） The parallel operation of the Yangtze cratonization and intracontinental orogeny, and multi-phase reactivation of the Yangtze craton. （4） The association and differentiation evolution of plate tectonics and intraconti- nental tectonics, and the dynamic characteristics under the Meso-Cenozoic modem global plate tectonic regime.展开更多
文摘To meet stringent requirements in vacuum and cleanness for semiconductor manufacturing, a new power drive module for Selective Compliant Assembly Robot Arm （SCARA） type robot has been developed for wafer-transfer. In order to obtain complete hermetic volume for higher vacuum and prevent leakage of hazardous gases, feedthrough motions involving transfer between the vacuum and motors are achieved by the use of metal bellows and magnetic coupling. An analysis of the coaxial-type magnetic coupling by employing the technique of current sheet model is presented. This approach is proved to be a precise and easy method. The construction of power drive module shows its advantage in maintaining ultrahigh vacuum and also enhances the efficiency for transporting the wafer, as compared with conventional design.
基金supported by the special grant of Ministry of Science and Technology of the People’s Republic of China for State Key Laboratory of Continental Dynamics,Northwest University,the key research project of Sinopec Group(Grant No.YPH08012)the National Natural Science Foundation of China(Grant Nos.41190072,41190073,41190074,41190070)
文摘This paper aims at exploring the tectonic characteristics of the South China Continent （SCC） and extracting the universal tec- tonic rules from these characteristics,to help enrich the plate tectonic theory and better understand the continental dynamic system. For this purpose, here we conduct a multi-disciplinary investigation and combine it with the previous studies to reas- sess the tectonics and evolution of SCC and propose that the tectonic framework of the continent comprises two blocks, three types of tectonic units, four deformation systems, and four evolutionary stages with distinctive mechanism and tectonic characteris- tics since the Neoproterozoic. The four evolutionary stages are： （1） The amalgamation and break-up of the Neoproterozoic plates, typically the intracontinental rifting. （2） The early Paleozoic and Mesozoic intracontinental orogeny confined by plate tectonics, forming two composite tectonic domains. （3） The parallel operation of the Yangtze cratonization and intracontinental orogeny, and multi-phase reactivation of the Yangtze craton. （4） The association and differentiation evolution of plate tectonics and intraconti- nental tectonics, and the dynamic characteristics under the Meso-Cenozoic modem global plate tectonic regime.
