According to the current research status of component retrieval, the component description model based on facet classification is improved by adding semantic features. Furthermore, the component retrieval process mode...According to the current research status of component retrieval, the component description model based on facet classification is improved by adding semantic features. Furthermore, the component retrieval process model is put forward by combining the domain ontology with the relative concept match algorithm. A detailed illustration of a component reasoning engine and a component classification engine is given and the component classification algorithm is provided by using the Naive Bayes algorithm based on domain ontology. The experimental results show that the recall ratio and the precision ratio are obviously improved by using the method based on semantics, and demonstrate the feasibility and effectiveness of the proposed method.展开更多
The JEOL JBX-5000LS is a vector type machine.The system hardware features an ion-pumped column,a LaB 6 electron emitter,25kV and 50kV accelerating voltage,and a turbo-pumped sample chamber.The resolution,stability,st...The JEOL JBX-5000LS is a vector type machine.The system hardware features an ion-pumped column,a LaB 6 electron emitter,25kV and 50kV accelerating voltage,and a turbo-pumped sample chamber.The resolution,stability,stitching and overlay of this system are evaluated.The system can write complex patterns at dimensions down to 30nm.The demonstrated overlay accuracy of this system is better than 40nm.展开更多
A novel technique to fabricate ultra deep high aspect ratio electrical isolation trenches with DRIE and dielectric refill is presented.The relationship between trench profile and DRIE parameters is discussed.By optimi...A novel technique to fabricate ultra deep high aspect ratio electrical isolation trenches with DRIE and dielectric refill is presented.The relationship between trench profile and DRIE parameters is discussed.By optimizing DRIE parameters and RIE etching the trenches’ opening,the ideal trench profile is obtained to ensure that the trenches are fully refilled without voids.The electrical isolation trenches are 5μm wide and 92μm deep with 0.5μm thick oxide layers on the sidewall as isolation material.The measured I-V result shows that the trench structure has good electrical isolation performance:the average resistance in the range of 0～100V is more than 10 11Ω and no breakdown appears under 100V.This isolation trench structure has been used in fabrication of the bulk integrated micromachined gyroscope,which shows high performance.展开更多
Additive manufacturing(AM),also known as 3D-printing(3DP)technology,is an advanced manufacturing technology that has developed rapidly in the past 40 years.However,the ceramic material printing is still challenging be...Additive manufacturing(AM),also known as 3D-printing(3DP)technology,is an advanced manufacturing technology that has developed rapidly in the past 40 years.However,the ceramic material printing is still challenging because of the issue of cracking.Indirect 3D printing has been designed and drawn attention because of its high manufacturing speed and low cost.Indirect 3D printing separates the one-step forming process of direct 3D printing into binding and material sintering,avoiding the internal stress caused by rapid cooling,making it possible to realize the highquality ceramic component with complex shape.This paper presents the research progress of leading indirect 3D printing technologies,including binder jetting(BJ),stereolithography(SLA),and fused deposition modeling(FDM).At present,the additive manufacturing of ceramic materials is mainly achieved through indirect 3D printing technology,and these materials include silicon nitride,hydroxyapatite functional ceramics,silicon carbide structural ceramics.展开更多
To describe a semiconductor wafer fabrication flow availably, a new modeling method of extended hybrid Petri nets （EHPNs） was proposed. To model the discrete part and continuous part of a complex photolithography pr...To describe a semiconductor wafer fabrication flow availably, a new modeling method of extended hybrid Petri nets （EHPNs） was proposed. To model the discrete part and continuous part of a complex photolithography process, hybrid Petri nets （HPNs） were introduced. To cope with the complexity of a photolithography process, object-oriented methods such as encapsulation and classifications were integrated with HPN models. EHPN definitions were presented on the basis of HPN models and object-oriented methods. Object-oriented hybrid Petri subnet models were developed for each typical physical object and an EHPN modeling procedure steps were structured. To demonstrate the feasibility and validity of the proposed modeling method, a real wafer photolithography case was used to illustrate the modeling procedure. dynamic modeling of a complex photolithography process effectively The modeling results indicate that the EHPNs can deal with the dynamic modeling of a complex photolithography process effectively.展开更多
We present an all-e-beam lithography （EBL） process for the patterning of photonic crystal waveguides. The whole device structures are exposed in two steps. Holes constituting the photonic crystal lattice and defects...We present an all-e-beam lithography （EBL） process for the patterning of photonic crystal waveguides. The whole device structures are exposed in two steps. Holes constituting the photonic crystal lattice and defects are first exposed with a small exposure step size （less than 10nm）. With the introduction of the additional proximity effect to compensate the original proximity effect, the shape, size, and position of the holes can be well controlled. The second step is the exposure of the access waveguides at a larger step size （about 30nm） to improve the scan speed of the EBL. The influence of write-field stitching error can be alleviated by replacing the original waveguides with tapered waveguides at the joint of adjacent write-fields. It is found experimentally that a higher exposure efficiency is achieved with a larger step size;however,a larger step size requires a higher dose.展开更多
During the last three decades, the introduction of new construction materials (e.g. RCC (Roller Compacted Concrete), strengthened gabions) has increased the interest for stepped channels and spillways. However stepped...During the last three decades, the introduction of new construction materials (e.g. RCC (Roller Compacted Concrete), strengthened gabions) has increased the interest for stepped channels and spillways. However stepped chute hydraulics is not simple, because of different flow regimes and importantly because of very-strong interactions between entrained air and turbu- lence. In this study, new air-water flow measurements were conducted in two large-size stepped chute facilities with two step heights in each facility to study experimental distortion caused by scale effects and the soundness of result extrapolation to pro- totypes. Experimental data included distributions of air concentration, air-water flow velocity, bubble frequency, bubble chord length and air-water flow turbulence intensity. For a Froude similitude, the results implied that scale effects were observed in both facilities, although the geometric scaling ratio was only Lr=2 in each case. The selection of the criterion for scale effects is a critical issue. For example, major differences (i.e. scale effects) were observed in terms of bubble chord sizes and turbulence levels al- though little scale effects were seen in terms of void fraction and velocity distributions. Overall the findings emphasize that physical modelling of stepped chutes based upon a Froude similitude is more sensitive to scale effects than classical smooth-invert chute studies, and this is consistent with basic dimensional analysis developed herein.展开更多
We investigate the effects of etching gases on the synthesis of nano crystalline diamonds grown on silicon substrate at the substrate temperature of 550℃ and the reaction pressure of 4 kPa by hot filament chemical va...We investigate the effects of etching gases on the synthesis of nano crystalline diamonds grown on silicon substrate at the substrate temperature of 550℃ and the reaction pressure of 4 kPa by hot filament chemical vapor deposition method, in which CH4 and H2 act as a source and diluting gases, respectively. N2, H2, and NH3 were used as the etching gases, respectively. Results show that the optimum conditions can be obtained only for the case of H2 gas. The crystal morphology and crystallinity of the samples have been examined by scanning electron microscopy and X-ray diffraction, respectively.展开更多
Reactive ion etching characteristics of GaAs,GaSb,InP and InAs using Cl2/Ar plasma have been investigated,it is that,etching rates and etching profiles as functions of etching time,gas flow ratio and RF power.Etch rat...Reactive ion etching characteristics of GaAs,GaSb,InP and InAs using Cl2/Ar plasma have been investigated,it is that,etching rates and etching profiles as functions of etching time,gas flow ratio and RF power.Etch rates of above 0.45 μm/min and 1.2 μm/min have been obtained in etching of GaAs and GaSb respectively, while very slow etch rates （<40 nm/min） were observed in etching of In-containing materials,which were linearly increased with the applied RF power.Etched surfaces have remained smooth over a wide range of plasma conditions in the etching of GaAs,InP and InAs,however,were partly blackened in etching of GaSb due to a rough appearance.展开更多
基金The National Natural Science Foundation of China(No60072006)
文摘According to the current research status of component retrieval, the component description model based on facet classification is improved by adding semantic features. Furthermore, the component retrieval process model is put forward by combining the domain ontology with the relative concept match algorithm. A detailed illustration of a component reasoning engine and a component classification engine is given and the component classification algorithm is provided by using the Naive Bayes algorithm based on domain ontology. The experimental results show that the recall ratio and the precision ratio are obviously improved by using the method based on semantics, and demonstrate the feasibility and effectiveness of the proposed method.
文摘The JEOL JBX-5000LS is a vector type machine.The system hardware features an ion-pumped column,a LaB 6 electron emitter,25kV and 50kV accelerating voltage,and a turbo-pumped sample chamber.The resolution,stability,stitching and overlay of this system are evaluated.The system can write complex patterns at dimensions down to 30nm.The demonstrated overlay accuracy of this system is better than 40nm.
文摘A novel technique to fabricate ultra deep high aspect ratio electrical isolation trenches with DRIE and dielectric refill is presented.The relationship between trench profile and DRIE parameters is discussed.By optimizing DRIE parameters and RIE etching the trenches’ opening,the ideal trench profile is obtained to ensure that the trenches are fully refilled without voids.The electrical isolation trenches are 5μm wide and 92μm deep with 0.5μm thick oxide layers on the sidewall as isolation material.The measured I-V result shows that the trench structure has good electrical isolation performance:the average resistance in the range of 0～100V is more than 10 11Ω and no breakdown appears under 100V.This isolation trench structure has been used in fabrication of the bulk integrated micromachined gyroscope,which shows high performance.
基金Project(51901020)supported by the National Natural Science Foundation of ChinaProject(2019JZZY010327)supported by Shandong Key Research and Development Plan,China+1 种基金Project(201942074001)supported by Aeronautical Science Foundation of ChinaProject(FRF-IP-20-05)supported by the Fundamental Research Funds for the Central Universities,China。
文摘Additive manufacturing(AM),also known as 3D-printing(3DP)technology,is an advanced manufacturing technology that has developed rapidly in the past 40 years.However,the ceramic material printing is still challenging because of the issue of cracking.Indirect 3D printing has been designed and drawn attention because of its high manufacturing speed and low cost.Indirect 3D printing separates the one-step forming process of direct 3D printing into binding and material sintering,avoiding the internal stress caused by rapid cooling,making it possible to realize the highquality ceramic component with complex shape.This paper presents the research progress of leading indirect 3D printing technologies,including binder jetting(BJ),stereolithography(SLA),and fused deposition modeling(FDM).At present,the additive manufacturing of ceramic materials is mainly achieved through indirect 3D printing technology,and these materials include silicon nitride,hydroxyapatite functional ceramics,silicon carbide structural ceramics.
基金Project(60574054) supported by the National Natural Science Foundation of China
文摘To describe a semiconductor wafer fabrication flow availably, a new modeling method of extended hybrid Petri nets （EHPNs） was proposed. To model the discrete part and continuous part of a complex photolithography process, hybrid Petri nets （HPNs） were introduced. To cope with the complexity of a photolithography process, object-oriented methods such as encapsulation and classifications were integrated with HPN models. EHPN definitions were presented on the basis of HPN models and object-oriented methods. Object-oriented hybrid Petri subnet models were developed for each typical physical object and an EHPN modeling procedure steps were structured. To demonstrate the feasibility and validity of the proposed modeling method, a real wafer photolithography case was used to illustrate the modeling procedure. dynamic modeling of a complex photolithography process effectively The modeling results indicate that the EHPNs can deal with the dynamic modeling of a complex photolithography process effectively.
文摘We present an all-e-beam lithography （EBL） process for the patterning of photonic crystal waveguides. The whole device structures are exposed in two steps. Holes constituting the photonic crystal lattice and defects are first exposed with a small exposure step size （less than 10nm）. With the introduction of the additional proximity effect to compensate the original proximity effect, the shape, size, and position of the holes can be well controlled. The second step is the exposure of the access waveguides at a larger step size （about 30nm） to improve the scan speed of the EBL. The influence of write-field stitching error can be alleviated by replacing the original waveguides with tapered waveguides at the joint of adjacent write-fields. It is found experimentally that a higher exposure efficiency is achieved with a larger step size;however,a larger step size requires a higher dose.
基金Project supported by the National Council for Science and Tech-nology of Mexico (CONACYT)
文摘During the last three decades, the introduction of new construction materials (e.g. RCC (Roller Compacted Concrete), strengthened gabions) has increased the interest for stepped channels and spillways. However stepped chute hydraulics is not simple, because of different flow regimes and importantly because of very-strong interactions between entrained air and turbu- lence. In this study, new air-water flow measurements were conducted in two large-size stepped chute facilities with two step heights in each facility to study experimental distortion caused by scale effects and the soundness of result extrapolation to pro- totypes. Experimental data included distributions of air concentration, air-water flow velocity, bubble frequency, bubble chord length and air-water flow turbulence intensity. For a Froude similitude, the results implied that scale effects were observed in both facilities, although the geometric scaling ratio was only Lr=2 in each case. The selection of the criterion for scale effects is a critical issue. For example, major differences (i.e. scale effects) were observed in terms of bubble chord sizes and turbulence levels al- though little scale effects were seen in terms of void fraction and velocity distributions. Overall the findings emphasize that physical modelling of stepped chutes based upon a Froude similitude is more sensitive to scale effects than classical smooth-invert chute studies, and this is consistent with basic dimensional analysis developed herein.
文摘We investigate the effects of etching gases on the synthesis of nano crystalline diamonds grown on silicon substrate at the substrate temperature of 550℃ and the reaction pressure of 4 kPa by hot filament chemical vapor deposition method, in which CH4 and H2 act as a source and diluting gases, respectively. N2, H2, and NH3 were used as the etching gases, respectively. Results show that the optimum conditions can be obtained only for the case of H2 gas. The crystal morphology and crystallinity of the samples have been examined by scanning electron microscopy and X-ray diffraction, respectively.
文摘Reactive ion etching characteristics of GaAs,GaSb,InP and InAs using Cl2/Ar plasma have been investigated,it is that,etching rates and etching profiles as functions of etching time,gas flow ratio and RF power.Etch rates of above 0.45 μm/min and 1.2 μm/min have been obtained in etching of GaAs and GaSb respectively, while very slow etch rates （<40 nm/min） were observed in etching of In-containing materials,which were linearly increased with the applied RF power.Etched surfaces have remained smooth over a wide range of plasma conditions in the etching of GaAs,InP and InAs,however,were partly blackened in etching of GaSb due to a rough appearance.
