A novel precision vibration-assisted micro-engraving system was developed by the integration of fast tool servo and ultrasonic elliptical vibration system, in which the flexure hinge was designed to avoid backlash and...A novel precision vibration-assisted micro-engraving system was developed by the integration of fast tool servo and ultrasonic elliptical vibration system, in which the flexure hinge was designed to avoid backlash and PID control algorithm was established to guarantee specific precision. Apart from experimental validation of the performance of the system, various micro-V-grooves cutting experiments on aluminum alloy, ferrous material and hard cutting material were performed, in which Kistler force sensor was used to measure cutting force. Through experiments, it was clear that the vibration-assisted micro-engraving system can ensure good quality of micro-V-grooves and reduce cutting force by about 60% compared with traditional removal process without ultrasonic vibration.展开更多
The concept of an integrated "lab on a chip" has long been a goal for the micro-electro-mechanical-systems(MEMS) community.This would entail the integration of not only the sampling and analysis of various f...The concept of an integrated "lab on a chip" has long been a goal for the micro-electro-mechanical-systems(MEMS) community.This would entail the integration of not only the sampling and analysis of various functions,but also the ability to transmit this information off the chip to a central repository.This paper describes the initial steps in the fabrication of a "lab on a chip" which would continually analyze blood sampled via microneedles using techniques such as nano plasmonics,specifically,concentrations of glucose.The analysis could then be transmitted off the chip using digital signal processing.This paper describes the analysis and optimization of the microneedle shape and size and the fabrication of the resulting needles in silicon using deep reactive ion etching(DRIE).The paper also describes the opportunities for fabrication of such needles in alternative materials and describes the issues that still have to be overcome before such an integrated device is realized.展开更多
基金Supported by National High Technology Research and Development Program of China ("863" Program, No. 2009AA043802)Japan Society for the Promotion of Science
文摘A novel precision vibration-assisted micro-engraving system was developed by the integration of fast tool servo and ultrasonic elliptical vibration system, in which the flexure hinge was designed to avoid backlash and PID control algorithm was established to guarantee specific precision. Apart from experimental validation of the performance of the system, various micro-V-grooves cutting experiments on aluminum alloy, ferrous material and hard cutting material were performed, in which Kistler force sensor was used to measure cutting force. Through experiments, it was clear that the vibration-assisted micro-engraving system can ensure good quality of micro-V-grooves and reduce cutting force by about 60% compared with traditional removal process without ultrasonic vibration.
文摘The concept of an integrated "lab on a chip" has long been a goal for the micro-electro-mechanical-systems(MEMS) community.This would entail the integration of not only the sampling and analysis of various functions,but also the ability to transmit this information off the chip to a central repository.This paper describes the initial steps in the fabrication of a "lab on a chip" which would continually analyze blood sampled via microneedles using techniques such as nano plasmonics,specifically,concentrations of glucose.The analysis could then be transmitted off the chip using digital signal processing.This paper describes the analysis and optimization of the microneedle shape and size and the fabrication of the resulting needles in silicon using deep reactive ion etching(DRIE).The paper also describes the opportunities for fabrication of such needles in alternative materials and describes the issues that still have to be overcome before such an integrated device is realized.
