Photolithography Process Simulation for Integrated Circuits and Microelectromechanical System Fabrication

Simulations of photoresist etching,aerial image,exposure,and post-bake processes are integrated to obtain a photolithography process simulation for microelectromechanical system（MEMS） and integrated circuit（IC） fabrication based on three-dimensional （3D） cellular automata（CA）. The simulation results agree well with available experimental results. This indicates that the 3D dynamic CA model for the photoresist etching simulation and the 3D CA model for the post-bake simulation could be useful for the monolithic simulation of various lithography processes. This is determined to be useful for the device-sized fabrication process simulation of IC and MEMS.

岩石裂隙可视化渗流装置可行性及试验研究

自主研发一套能从可视化角度反映岩石单裂隙渗流特征的装置,并以模拟岩石的变形模量为主要技术指标,获得了K39透明类岩石材料的添加剂含量为:促进剂0.8%、硬化剂0.6%、消泡剂0.6%;通过二次翻模精确复刻技术得到原岩裂隙面粗糙度,为研究细微观裂隙渗流提供技术支撑。通过可视化装置与原岩装置模拟试验,得到两者之间的差异性系数,进而推出原岩渗流流量的修正公式,获得了渗流量、渗流面积等能反映原岩性能的相关参数。阐明了K39透明类岩石材料对渗流量的影响效应β总及其影响的内在机制;与以ELE仪器为研究平台的渗流试验进行异同性分析,得到两者渗流量之间存在差异的相对变化系数,证明可视化渗流装置研究岩石裂隙渗流是合理可行的。利用该装置开展空间多角度试验,在耦合粗糙度、渗透压、围压、空间多角度、水自重效应等多因素下,通过渗流面积数字化自识别技术为精确获取岩石渗流特征的相关参数提供基础。

没有成为大师的大师

梅兰芳之后最重要的京剧演员是谁?这个问题提得尖锐。因为这一个“最”字会把许多人难倒,又会让许多人感到踌躇。的确,如果没有“最”字,人们一张嘴就会说出一大片,答案会让人皆大欢喜。但这样的“皆大欢喜”没有力量,它不足以说明目前不景气的原因。所以思来想去,我决定还是冒一冒风险,回答一下这个“最”字。 “最”者,当是比梅兰芳晚一辈的文武老生李少春。梅、李早年曾经合演过《四郎探母》中的“坐宫”,梅那年30来岁,李也就是五六岁。

海图符号库的设计与实现

一、概述海图符号是用于标识海洋地理要素和航行标志的一种地图语言,也是海洋地理信息系统进行模式识别的一种重要工具,一个好的符号系统将对地理信息系统产生积极的影响.为了提高海图生产现势性,缩短生产周期,减轻作业员的劳动强度,满足社会对海图需求的迅速增长,我们致力于海图生产新技术的研究.利用引进的美国ESRI公司ARC/INFO地理信息系统软件和一系列的硬件设备,开发、建立海图综合数据库,为实现海图自动制图和数字海图生产开展基础性工作,而海图符号库系统的建立是开发、维护海洋测绘数据库的前提和先导.

Physical modelling and scale effects of air-water flows on stepped spillways

During the last three decades, the introduction of new construction materials (e.g. RCC (Roller Compacted Concrete), strengthened gabions) has increased the interest for stepped channels and spillways. However stepped chute hydraulics is not simple, because of different flow regimes and importantly because of very-strong interactions between entrained air and turbu- lence. In this study, new air-water flow measurements were conducted in two large-size stepped chute facilities with two step heights in each facility to study experimental distortion caused by scale effects and the soundness of result extrapolation to pro- totypes. Experimental data included distributions of air concentration, air-water flow velocity, bubble frequency, bubble chord length and air-water flow turbulence intensity. For a Froude similitude, the results implied that scale effects were observed in both facilities, although the geometric scaling ratio was only Lr=2 in each case. The selection of the criterion for scale effects is a critical issue. For example, major differences (i.e. scale effects) were observed in terms of bubble chord sizes and turbulence levels al- though little scale effects were seen in terms of void fraction and velocity distributions. Overall the findings emphasize that physical modelling of stepped chutes based upon a Froude similitude is more sensitive to scale effects than classical smooth-invert chute studies, and this is consistent with basic dimensional analysis developed herein.

Mechanism of gas-water flow at pore-level in aquifer gas storage

By means of the pore-level simulation, the characteristics of gas-water flow and gas-water distribution during the alternative displacement of gas and water were observed directly from etched-glass micromodel. The results show that gas-water distribution styles are divided into continuous phase type and separate phase type. The water lock exists in pore and throat during the process of gas-water displacement, and it reduces the gas flow-rate and has some effects on the recovery efficiency during the operation of gas storage. According to the experimental results of aquifer gas storage in X area, the differences in available extent among reservoirs are significant, and the availability of pore space is 33% 45%.

Indirect 3D printed ceramic:A literature review

Additive manufacturing(AM),also known as 3D-printing(3DP)technology,is an advanced manufacturing technology that has developed rapidly in the past 40 years.However,the ceramic material printing is still challenging because of the issue of cracking.Indirect 3D printing has been designed and drawn attention because of its high manufacturing speed and low cost.Indirect 3D printing separates the one-step forming process of direct 3D printing into binding and material sintering,avoiding the internal stress caused by rapid cooling,making it possible to realize the highquality ceramic component with complex shape.This paper presents the research progress of leading indirect 3D printing technologies,including binder jetting(BJ),stereolithography(SLA),and fused deposition modeling(FDM).At present,the additive manufacturing of ceramic materials is mainly achieved through indirect 3D printing technology,and these materials include silicon nitride,hydroxyapatite functional ceramics,silicon carbide structural ceramics.

High-Speed Railway Train Timetable Conflict Prediction Based on Fuzzy Temporal Knowledge Reasoning

Trains are prone to delays and deviations from train operation plans during their operation because of internal or external disturbances. Delays may develop into operational conflicts between adjacent trains as a result of delay propagation, which may disturb the arrangement of the train operation plan and threaten the operational safety of trains. Therefore, reliable conflict prediction results can be valuable references for dispatchers in making more efficient train operation adjustments when conflicts occur. In contrast to the traditional approach to conflict prediction that involves introducing random disturbances, this study addresses the issue of the fuzzification of time intervals in a train timetable based on historical statistics and the modeling of a high-speed railway train timetable based on the concept of a timed Petri net. To measure conflict prediction results more comprehensively, we divided conflicts into potential conflicts and certain conflicts and defined the judgment conditions for both. Two evaluation indexes, one for the deviation of a single train and one for the possibility of conflicts between adjacent train operations, were developed using a formalized computation method. Based on the temporal fuzzy reasoning method, with some adjustment, a new conflict prediction method is proposed, and the results of a simulation example for two scenarios are presented. The results prove that conflict prediction after fuzzy processing of the time intervals of a train timetable is more reliable and practical and can provide helpful information for use in train operation adjustment, train timetable improvement, and other purposes.

A Systematic Study of the Forbidden Pitch in the CD Through-Pitch Curve for Beyond 130nm

The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.

Internal Pressure Sculpting and Speleogenesis in Autogenic Karst

Understanding the ongoing speleogenic processes that produce sinkholes and control the vital drinking water supplies of Florida and much else of the world is necessary research. This article （and the associated poster presentation） discusses theoretical processes that may act in addition to mass dissolution kinetics in producing voids, conduits and caves in autogenic karst landforms. Possible theoretical factors that affect these speleogenic processes are： microscopic mixing corrosion （low constant flow, low constant flow against current, temperature-induced mixing corrosion, and pressure-induced mixing corrosion in karst matrix）, random dissolution models, simulation of gravity-induced microscopic breakdown, and storm surge effects. Finally, a theoretical model is discussed that unifies these various microscopic processes into a macro-scale process, called internal pressure sculpting. Computer models were designed to illustrate these theoretical processes： Non-calibrated computer models simulating each process discussed in this paper are presented for illustration, as well as the preliminary results of calibrated models depicting random dissolution, mechanical breakdown, and storm surge effects. The theoretical processes discussed and simulated may have major effects on cave morphology. Computer simulations appear to accurately portray the shape and form of some cave features with dissolutional morphologies. Theoretical discussion concludes with a general discussion of possible improvements to the presented models as well as the ability to generalize theoretical processes to hypogenic, halogenic, and autogenic speleogenesis.

Heuristic tabu search scheduling algorithm for wet-etching systems in semiconductor wafer fabrications

To improve overall equipment efficiency(OEE) of a semiconductor wafer wet-etching system,a heuristic tabu search scheduling algorithm is proposed for the wet-etching process in the paper,with material handling robot capacity and wafer processing time constraints of the process modules considered.Firstly,scheduling problem domains of the wet-etching system(WES) are assumed and defined,and a non-linear programming model is built to maximize the throughput with no defective wafers.On the basis of the model,a scheduling algorithm based on tabu search is presented in this paper.An improved Nawaz,Enscore,and Ham(NEH) heuristic algorithm is used as the initial feasible solution of the proposed heuristic algorithm.Finally,performances of the proposed algorithm are analyzed and evaluated by simulation experiments.The results indicate that the proposed algorithm is valid and practical to generate satisfied scheduling solutions.

我的女儿

白墙、白床、白被褥、白罩单……病房的这一切都是早已看惯了的。一年前我丈夫突然被查出患了何杰金氏病——一种淋巴系统的恶性肿瘤!薄薄的诊断书拿在手中,白纸黑字立刻模糊了我的双眼。只记得当时。

Recursive calibration for a lithium iron phosphate battery for electric vehicles using extended Kalman filtering

In this paper,an efficient model structure composed of a second-order resistance-capacitance network and a simply analytical open circuit voltage versus state of charge(SOC) map is applied to characterize the voltage behavior of a lithium iron phosphate battery for electric vehicles(EVs).As a result,the overpotentials of the battery can be depicted using a second-order circuit network and the model parameterization can be realized under any battery loading profile,without a special characterization experiment.In order to ensure good robustness,extended Kalman filtering is adopted to recursively implement the calibration process.The linearization involved in the calibration algorithm is realized through recurrent derivatives in a recursive form.Validation results show that the recursively calibrated battery model can accurately delineate the battery voltage behavior under two different transient power operating conditions.A comparison with a first-order model indicates that the recursively calibrated second-order model has a comparable accuracy in a major part of the battery SOC range and a better performance when the SOC is relatively low.

Spectral characterization of fiber Bragg grating with etched fiber cladding

A new method is presented to tune Bragg wavelength slightly by using hydrofluoric acid to etch fiber cladding.The spectral characteristics before and after etching and the change properties of Bragg wavelength are studied.Cladding modes are reduced during the etching process.High-order cladding modes are converted into radiation modes,and energy of cladding modes is coupled to the outside.As the cladding radius decreases,the Bragg wavelength shifts to longer direction.Experimental results show that this method can tune Bragg wavelength slightly,and the tunable range is 0.002-0.120 nm.

Geometric Calibration Algorithm of Polarization Camera Using Planar Patterns

Polarization pattern provides additional information besides spectral signatures. It can be used in many applications, such as navigation, defect detection and object identification. A novel polarization camera composed of four synchronized cameras is proposed, and it can realize real-time polarization measurement. This study particularly concentrates on the geometric calibration of the system. The projection model is analyzed and the multi-camera calibration algorithm is proposed. Firstly, each camera is calibrated separately using planar patterns, and then the geometric calibration algorithms are performed. Due to the geometrical constraint, a global optimization method results in smaller estimation uncertainties. A mean rotation error of 0.025?and a mean translation error of 0.26 mm are achieved after geometric calibration. The images are rectified to establish a correspondence among cameras and are combined to acquire the polarization measurement. The polarization pattern of the skylight is measured by the system and the results are consistent with the previous studies.

Principally Quasi-Baer Modules

In this paper,we give the equivalent characterizations of principally quasi-Baer modules,and show that any direct summand of a principally quasi-Baer module inherits the property and any finite direct sum of mutually subisomorphic principally quasi-Baer modules is also principally quasi-Baer.Moreover,we prove that left principally quasi-Baer rings have Morita invariant property.Connections between Richart modules and principally quasi-Baer modules are investigated.

Etched Optical Fiber Vibration Sensor to Monitor Health Condition of Beam Like Structures

Using a center etched single mode optical fiber, a simple vibration senor is designed to monitor the vibrations of a simply supported beam. The sensor has high linear response to the axial displacement of about 0.8mm with a sensitivity of 32mV/10p, m strain. The sensor is tested for periodic and suddenly released forces, and the results are found to coincide with the theoretical values. This simple design, small in size and low cost sensor may find applications in industry and civil engineering to monitor the vibrations of the beam structures and bridges.

Lithographically directed assembly of one-dimensional DNA nanostructures via bivalent binding interactions

In order to exploit the outstanding physical properties of one-dimensional （1D） nanostructures such as carbon nanotubes and semiconducting nanowires and nanorods in future technological applications, it will be necessary to organize them on surfaces with precise control over both position and orientation. Here, we use a 1D rigid DNA motif as a model for studying directed assembly at the molecular scale to lithographically patterned nanodot anchors. By matching the inter-nanodot spacing to the length of the DNA nanostructure, we are able to achieve nearly 100% placement yield. By varying the length of single-stranded DNA linkers bound covalently to the nanodots, we are able to study the binding selectivity as a function of the strength of the binding interactions. We analyze the binding in terms of a thermodynamic model which provides insight into the bivalent nature of the binding, a scheme that has general applicability for the controlled assembly of a broad range of functional nanostructures.