期刊文献+
共找到2篇文章
< 1 >
每页显示 20 50 100
晶圆精密电镀中的垂直剪切镀设备的研制 被引量:3
1
作者 段晋胜 魏红军 胡子卿 《电子工艺技术》 2013年第3期178-180,共3页
凸点的制作方法有很多种,但是电镀法可以制作各类凸点,它对芯片的I/O数、焊区尺寸大小及凸点节距均没有限制,且适于大批量生产。介绍了垂直剪切镀技术的基本原理,根据微电子圆片级封装在硅圆片上制作凸点的需要,设计研制了一套设备。经... 凸点的制作方法有很多种,但是电镀法可以制作各类凸点,它对芯片的I/O数、焊区尺寸大小及凸点节距均没有限制,且适于大批量生产。介绍了垂直剪切镀技术的基本原理,根据微电子圆片级封装在硅圆片上制作凸点的需要,设计研制了一套设备。经过优化设计,解决了剪切镀关键技术问题并满足了工艺要求,取得了良好效果。 展开更多
关键词 晶圆凸点 垂直剪切 剪切屏 蔽件 电力线
下载PDF
Stability of Tokamak Equilibrium with Internal Transport Barrier against High n MHD Ballooning Mode
2
作者 SHI Bingren QU Wenxiao DONG Jiaqi 《Southwestern Institute of Physics Annual Report》 2005年第1期121-124,共4页
Internal transport barriers (ITBs) are phenomena associated with improved confinement mode of tokamak plasmas. Within the region where the ITB locates, the plasma pressure has a large gradient while the magnetic she... Internal transport barriers (ITBs) are phenomena associated with improved confinement mode of tokamak plasmas. Within the region where the ITB locates, the plasma pressure has a large gradient while the magnetic shear s has a minimum so that within and near the ITB, the absolute value of the shear is very low. Physics involved is plentiful, from the macroscopic ( MHD ) stability, to the suppression of microscopic instabilities thought to be responsible for anomalous transport. The treatment of very low shear also poses some theoretical difficulties. 展开更多
关键词 Internal transport barrier Ballooning stability Low shear stabilizing channel
下载PDF
上一页 1 下一页 到第
使用帮助 返回顶部