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场发射压力传感器力敏感膜的形变特性分析 被引量:1
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作者 刘金华 杨军 +1 位作者 张敬平 林鸿溢 《微电子学》 CAS CSCD 北大核心 2000年第4期238-240,共3页
利用有限元法计算分析了以阴极尖锥阵列体作为力敏感膜的形变特性,给出了用表达式计算尖锥阵列体形变的修正值,为后继工作提供了可以选择的技术途径。
关键词 场发射 传感器 力敏感膜 形变 有限元法
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Fiber Bragg Grating Pressure Sensor Based on Corrugated Diaphragm
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作者 FUHai-wei FUJun-mei QIAOXue-guang 《Semiconductor Photonics and Technology》 CAS 2004年第4期278-281,共4页
A kind of fiber Bragg grating pressure sensor based on corrugated diaphragm is proposed. The relationship between the central wavelength of reflective wave of FBG and pressure is given, and the expression of the press... A kind of fiber Bragg grating pressure sensor based on corrugated diaphragm is proposed. The relationship between the central wavelength of reflective wave of FBG and pressure is given, and the expression of the pressure sensitivity coefficient is also given. Within the range from 0 MPa to 0.3 MPa, the experimental pressure sensitivity is 7.83 nm/MPa, which is 2 610 times than that of the bare fiber grating. The experimental results agree with the theoretical analysis. It is indicated that the expected pressure sensitivity of the sensor can be obtained by optimizing the size and mechanical parameters of the corrugated diaphragm. 展开更多
关键词 Guided wave and fiber optics FBG FBG sensing FBG pressure sensing Pressure sensitivity
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