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MEMS微电容式传感器的传感特性研究 被引量:14
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作者 王庆敏 杨要恩 +1 位作者 苏木标 刘玉红 《传感技术学报》 CAS CSCD 北大核心 2009年第10期1396-1400,共5页
针对传统的传感器无法进行长期健康监测的不足,研发出一套新型的基于MEMS的硅微电容式传感器。对所研制的MEMS传感器的静态传感特性和动态特性进行了理论分析和对比实验研究。结果表明:MEMS硅微电容式传感器在反复加卸载实验中,线性拟... 针对传统的传感器无法进行长期健康监测的不足,研发出一套新型的基于MEMS的硅微电容式传感器。对所研制的MEMS传感器的静态传感特性和动态特性进行了理论分析和对比实验研究。结果表明:MEMS硅微电容式传感器在反复加卸载实验中,线性拟和度均在0.999%F.S以上,灵敏度系数为6.9840με/kN,其重复性误差为1.43%F.S;其动态传感特性与传统的加速度计吻合的很好。 展开更多
关键词 MEMS 静态特性 动态传感特性 线性度 灵敏度
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Integrated outburst detector sensor-model tests
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作者 DZIURZYNSKI Waclaw WASILEWSKI Stanislaw 《Journal of Coal Science & Engineering(China)》 2011年第3期232-236,共5页
Outbursts of methane and rocks are, similarly to rock bursts, the biggest hazards in deep mines and are equally difficult to predict. The violent process of the outburst itself, along with the scale and range of hazar... Outbursts of methane and rocks are, similarly to rock bursts, the biggest hazards in deep mines and are equally difficult to predict. The violent process of the outburst itself, along with the scale and range of hazards following the rapid discharge of gas and rocks, requires solutions which would enable quick and unambiguous detection of the hazard, immediate power supply cut-off and evacuation of personnel from potentially hazardous areas. For this purpose, an integrated outburst detector was developed. Assumed functions of the sensor which was equipped with three measuring and detection elements: a chamber for constant measurement of methane concentration, pressure sensor and microphone. Tests of the sensor model were carried out to estimate the parameters which characterize the dynamic properties of the sensor. Given the impossibility of carrying out the full scale experimental outburst, the sensor was tested during the methane and coal dust explosions in the testing gallery at KD Barbara. The obtained results proved that the applied solutions have been appropriate. 展开更多
关键词 integrated outburst detector SENSOR model test methane detection
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基于连续碳纤维/树脂智能材料的梁结构应变模态表征 被引量:4
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作者 朱四荣 周志勇 +2 位作者 吕泳 郑华升 李卓球 《复合材料学报》 EI CAS CSCD 北大核心 2013年第3期240-246,共7页
研制了一种具有动态传感功能的碳纤维/树脂智能层,可用于结构的应变模态诊断。通过不同加载频率下的单向拉伸实验揭示了这种智能材料对低频动态载荷的响应能力,并理论分析了动态响应误差的影响因素。在此基础上将碳纤维/环氧树脂智能层... 研制了一种具有动态传感功能的碳纤维/树脂智能层,可用于结构的应变模态诊断。通过不同加载频率下的单向拉伸实验揭示了这种智能材料对低频动态载荷的响应能力,并理论分析了动态响应误差的影响因素。在此基础上将碳纤维/环氧树脂智能层连续敷设于悬臂梁结构表面代替传统的点式应变片,进行应变模态测试。测试结果表明,碳纤维/环氧树脂智能层可以较精确地反映结构的前三阶固有频率,并较好地表征结构的前三阶应变模态振型。对悬臂梁局部附加质量后重新进行了模态试验,结果表明:附加质量后,智能层反映的结构固有频率显著下降;同时,在附加质量所在的节点位置,智能层反映的应变模态振型有突变产生,说明智能层所表征的应变模态对结构物性参数变化具有识别能力,采用智能层与采用应变片的实验结果一致。此外,基于碳纤维/树脂智能层的可覆盖性,采用有限的测点全面捕捉了结构的应变模态信息,并在测试中通过在可疑区域内逐步增加测点,实现了结构物性参数变化的定位。 展开更多
关键词 碳纤维 树脂智能层 动态传感特性 结构健康监测 应变模态 物性参数变化识别
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Two-Dimensional Photonic Crystal Based Sensor for Pressure Sensing 被引量:3
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作者 Krishnan VIJAYA SHANTHI Savarimuthu ROBINSON 《Photonic Sensors》 SCIE EI CAS 2014年第3期248-253,共6页
In this paper, a two-dimensional photonic crystal (2DPC) based pressure sensor is proposed and designed, and the sensing characteristics such as the sensitivity and dynamic range are analyzed over the range of press... In this paper, a two-dimensional photonic crystal (2DPC) based pressure sensor is proposed and designed, and the sensing characteristics such as the sensitivity and dynamic range are analyzed over the range of pressure from 0 GPa to 7 GPa. The sensor is based on 2DPC with the square array of silicon rods surrounded by air. The sensor consists of two photonic crystal quasi waveguides and L3 defect. The L3 defect is placed in between two waveguides and is formed by modifying the radius of three Si rods. It is noticed that through simulation, the resonant wavelength of the sensor is shifted linearly towards the higher wavelength region while increasing the applied pressure level. The achieved sensitivity and dynamic range of the sensor is 2 nm/GPa and 7 Gpa, respectively. 展开更多
关键词 Photonic crystal WAVEGUIDE photonic band gap optical sensor FDTD method pressure sensor
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