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基于匀光管的极紫外消相干和光强均匀化仿真研究
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作者 李慧 谭芳蕊 +2 位作者 尹皓玉 马钺洋 吴晓斌 《物理学报》 SCIE EI CAS CSCD 北大核心 2024年第11期133-144,共12页
自由电子激光光源(free electron laser,FEL)可发出波长为13.5 nm的极紫外(extreme ultra-violet,EUV)辐射,在EUV光刻领域能够发挥重要作用.但FEL自身的高相干特性以及类高斯光强轮廓分布特征,会对成像带来不利影响,无法满足EUV光刻领... 自由电子激光光源(free electron laser,FEL)可发出波长为13.5 nm的极紫外(extreme ultra-violet,EUV)辐射,在EUV光刻领域能够发挥重要作用.但FEL自身的高相干特性以及类高斯光强轮廓分布特征,会对成像带来不利影响,无法满足EUV光刻领域成像应用需求.本文通过计算模拟的方法,设计了一种匹配FEL应用的、用于EUV波段去相干和光强均匀化的新型匀光管结构.模拟结果显示,针对波长为13.5 nm、直径200μm、发散度20 mrad的FEL-EUV高斯光束,采用新型匀光管结构,与常规匀光管结构相比,在同等长度和内径时,具有更显著的去相干能力和光场均匀化作用.当新型匀光管内径为1 mm、总长度不低于0.6 m、倾斜角度为10 mrad时,高相干光场完全被扰乱,实现低相干光输出.并可获得均匀照明光场,光强分布不均匀性数值从常规圆柱型匀光管的28.38降低至0.97.同时,相应能量传输效率为37.6%,最大传输效率达到44.58%.结果表明,新型匀光管结构能够满足EUV辐射去相干应用需求,同时可提高照明视场光强分布均匀性,在EUV光刻领域及其他成像应用具有很大应用前景. 展开更多
关键词 极紫外光源 自由电子激光 匀光管 相位 光强均
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Design of 25-inch Direct Illumination-type LED Backlight
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作者 LIANG Bao-wen LI Rong-yu GUO Ying-ying WANG Shuai CHEN Xiu-jin 《Semiconductor Photonics and Technology》 CAS 2008年第3期143-146,195,共5页
We utilized "direct illumination-type" LED backlight project, made white-light LED array in rectangle, designed a sheet of reflective film, a sheet of diffuser and two sheets of brightness enhancement film, ... We utilized "direct illumination-type" LED backlight project, made white-light LED array in rectangle, designed a sheet of reflective film, a sheet of diffuser and two sheets of brightness enhancement film, then analyzed illuminance chart which was the result of simulation in several distance between reflective film and optical film. It showed the best matching between illuminance and uniformity while in 25mm distance. Finally, we discussed some problems with thermal dispersion. 展开更多
关键词 BACKLIGHT LED DIRECT UNIFORMITY
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Optimization and integration of LED array for uniform illumination distribution 被引量:4
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作者 吴定会 王加文 苏宙平 《Optoelectronics Letters》 EI 2014年第5期335-339,共5页
A design method for light-emitting diode (LED) array is proposed to achieve a good uniform illumination distribution on target plane. By using random walk algorithm, the basic LED array modules are optimized ftrstly... A design method for light-emitting diode (LED) array is proposed to achieve a good uniform illumination distribution on target plane. By using random walk algorithm, the basic LED array modules are optimized ftrstly. The optimized basic arrays can generate uniform illumination distribution on their target plane. The optimized basic LED array mod- ules can be integrated into a large LED array module with more than tens of LEDs. In the large array, we can select a sub-array with K LEDs (K〉7), which can produce the good uniform illumination distribution. By this way, we design two LED arrays which consist of 21 and 25 LEDs, respectively. The 21-LED array and 25-LED array can generate uniform illumination distributions with the uniformities of 95% and 90%, respectively. 展开更多
关键词 Inertial confinement fusion
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