The effect of nickel contamination under rapid thermal processing （RTP） on the magic denuded zone （MDZ） in Czochralski silicon is investigated. It is found that the bulk defects can effectively getter nickel atoms...The effect of nickel contamination under rapid thermal processing （RTP） on the magic denuded zone （MDZ） in Czochralski silicon is investigated. It is found that the bulk defects can effectively getter nickel atoms once the MDZ forms. However,if the silicon sample is initially contaminated with nickel, the MDZ cannot form during the subsequent RTP,and a high density of precipitates occurs near the surface. In conventional IG processes,the DZ can form regardless of the nickel contamination sequence. Based on the facts,we propose that the formation of nickel silicide （Ni3Si） at the surface keeps the concentration of vacancies in the near-surface zone still higher than the critical concentration for oxygen precipitation under the subsequent RTP, which prevents MDZ formation.展开更多
An experiment facility has been set up for the study of metal cluster compounds in our laboratory, which consists of a nano-electrospray ionization source, an ion transmission and focus system, and a reflectron time-o...An experiment facility has been set up for the study of metal cluster compounds in our laboratory, which consists of a nano-electrospray ionization source, an ion transmission and focus system, and a reflectron time-of-fight mass spectrometer. Taking advantage of the nano-electrospray ionization source, polyvalent ions are usually produced in the ＂ionization＂ process and the obtained mass resolution of the equipment is over 8000. The molecular ion peaks of metal cluster compounds [Au20（PPhpy2）10Cl2]（SbF6）4, where PPhpy2=bis（2- pyridyl）phenylphosphine, and [AuaAg2（C）L6]（BF4）4, where L=2-（diphenylphosphino）-5- methylpyridine, are distinguished in the respective mass spectrum, accompanied by some fragment ion peaks. In addition, the mass-to-charge ratios of the parent ions are determi- nated. Preliminary results suggest that the device is a powerful tool for the study of metal cluster compounds. It turns out that the information obtained by the instrumentation serves as an essential supplement to single crystal X-ray diffraction for structure characterization of metal cluster compounds.展开更多
文摘The effect of nickel contamination under rapid thermal processing （RTP） on the magic denuded zone （MDZ） in Czochralski silicon is investigated. It is found that the bulk defects can effectively getter nickel atoms once the MDZ forms. However,if the silicon sample is initially contaminated with nickel, the MDZ cannot form during the subsequent RTP,and a high density of precipitates occurs near the surface. In conventional IG processes,the DZ can form regardless of the nickel contamination sequence. Based on the facts,we propose that the formation of nickel silicide （Ni3Si） at the surface keeps the concentration of vacancies in the near-surface zone still higher than the critical concentration for oxygen precipitation under the subsequent RTP, which prevents MDZ formation.
文摘An experiment facility has been set up for the study of metal cluster compounds in our laboratory, which consists of a nano-electrospray ionization source, an ion transmission and focus system, and a reflectron time-of-fight mass spectrometer. Taking advantage of the nano-electrospray ionization source, polyvalent ions are usually produced in the ＂ionization＂ process and the obtained mass resolution of the equipment is over 8000. The molecular ion peaks of metal cluster compounds [Au20（PPhpy2）10Cl2]（SbF6）4, where PPhpy2=bis（2- pyridyl）phenylphosphine, and [AuaAg2（C）L6]（BF4）4, where L=2-（diphenylphosphino）-5- methylpyridine, are distinguished in the respective mass spectrum, accompanied by some fragment ion peaks. In addition, the mass-to-charge ratios of the parent ions are determi- nated. Preliminary results suggest that the device is a powerful tool for the study of metal cluster compounds. It turns out that the information obtained by the instrumentation serves as an essential supplement to single crystal X-ray diffraction for structure characterization of metal cluster compounds.
