The back-sputtering effect of an electric thruster used in a vacuum chamber has an adverse effect on the thruster, vacuum chamber and experimental equipment. An anti-sputtering target （AST） can extend the operating ...The back-sputtering effect of an electric thruster used in a vacuum chamber has an adverse effect on the thruster, vacuum chamber and experimental equipment. An anti-sputtering target （AST） can extend the operating life of the vacuum chamber by reducing the back-sputtering deposition effect. Vacuum chambers used in international facilities have successfully incorpo- rated ASTs. To improve an AST＇s performance, a double layer structure AST based on the plume effects experimental system （PES） was designed. The structure of primary-end of the AST was designed as a flat while the secondary end was designed as a shutter to resolve factors such as service life, back flow rate of the sputtered material, economy and system security. To veri- fy the effects of the double layer AST, the sputtering effects of the AST with and without the secondary-end were evaluated by a DSMC-PIC algorithm. Additionally, the experimental verifications of the bare chamber and the target were performed. The results indicate that the secondary end graphite sheets can reduce the back flow yield approximately 50%. The design of the double layer AST can be introduced as a reference for the design of an anti-sputtering target.展开更多
We experimentally demonstrate an efficient enhancement of luminescence from two-dimensional(2D) hexagonal photonic crystal(PC) airbridge double-heterostructure microcavity with Er-doped silicon(Si) as light emitters o...We experimentally demonstrate an efficient enhancement of luminescence from two-dimensional(2D) hexagonal photonic crystal(PC) airbridge double-heterostructure microcavity with Er-doped silicon(Si) as light emitters on siliconon-insulator(SOI) wafer at room temperature.A single sharp resonant peak at 1 529.6 nm dominates the photoluminescence(PL) spectrum with the pumping power of 12.5 m W.The obvious red shift and the degraded quality factor(Q-factor) of resonant peak appear with the pumping power increasing,and the maximum measured Q-factor of 4 905 is achieved at the pumping power of 1.5 m W.The resonant peak is observed to shift depending on the structural parameters of PC,which indicates a possible method to control the wavelength of enhanced luminescence for Si-based light emitters based on PC microcavity.展开更多
文摘The back-sputtering effect of an electric thruster used in a vacuum chamber has an adverse effect on the thruster, vacuum chamber and experimental equipment. An anti-sputtering target （AST） can extend the operating life of the vacuum chamber by reducing the back-sputtering deposition effect. Vacuum chambers used in international facilities have successfully incorpo- rated ASTs. To improve an AST＇s performance, a double layer structure AST based on the plume effects experimental system （PES） was designed. The structure of primary-end of the AST was designed as a flat while the secondary end was designed as a shutter to resolve factors such as service life, back flow rate of the sputtered material, economy and system security. To veri- fy the effects of the double layer AST, the sputtering effects of the AST with and without the secondary-end were evaluated by a DSMC-PIC algorithm. Additionally, the experimental verifications of the bare chamber and the target were performed. The results indicate that the secondary end graphite sheets can reduce the back flow yield approximately 50%. The design of the double layer AST can be introduced as a reference for the design of an anti-sputtering target.
基金supported by the National Natural Science Foundation of China(No.61205044)
文摘We experimentally demonstrate an efficient enhancement of luminescence from two-dimensional(2D) hexagonal photonic crystal(PC) airbridge double-heterostructure microcavity with Er-doped silicon(Si) as light emitters on siliconon-insulator(SOI) wafer at room temperature.A single sharp resonant peak at 1 529.6 nm dominates the photoluminescence(PL) spectrum with the pumping power of 12.5 m W.The obvious red shift and the degraded quality factor(Q-factor) of resonant peak appear with the pumping power increasing,and the maximum measured Q-factor of 4 905 is achieved at the pumping power of 1.5 m W.The resonant peak is observed to shift depending on the structural parameters of PC,which indicates a possible method to control the wavelength of enhanced luminescence for Si-based light emitters based on PC microcavity.
