理论推导了绝缘体上硅(SOI)双槽隔离结构的耐压模型.该模型表明,在SOI双槽隔离结构中,因隔离氧化层压降的不均衡,高压侧隔离氧化层提前发生介质击穿,从而导致SOI双槽隔离结构的临界击穿电压小于理论值.增大沟槽纵横比和减小槽间距可以...理论推导了绝缘体上硅(SOI)双槽隔离结构的耐压模型.该模型表明,在SOI双槽隔离结构中,因隔离氧化层压降的不均衡,高压侧隔离氧化层提前发生介质击穿,从而导致SOI双槽隔离结构的临界击穿电压小于理论值.增大沟槽纵横比和减小槽间距可以减弱隔离氧化层上压降的不均衡性,提高SOI双槽隔离结构的临界击穿电压.Sentaurus器件仿真软件的模拟结果和华润上华半导体有限公司0.5μm 200 V SOI工艺平台下的流片测试结果均证明,减小槽间距和增大沟槽纵横比是提高双槽隔离结构临界击穿电压的有效方法,同时也证明了该耐压模型的正确性.展开更多
A W-band traveling-wave tube (TWT) with double-groove loaded folded waveguide structure (FWSWS) has been designed and numerically modelled. The nonlinear performance of such a TWT is investigated by a particle-in-cell...A W-band traveling-wave tube (TWT) with double-groove loaded folded waveguide structure (FWSWS) has been designed and numerically modelled. The nonlinear performance of such a TWT is investigated by a particle-in-cell code MAGIC3D. Simulation results indicate this TWT produces a saturated electromagnetic power of 170.2 W at 90 GHz, corresponding to 36.9 dB gain and 69.6 mm interaction distance. A comparison between the novel folded waveguide traveling-wave tube (FWTWT) and the conventional one is also carried out to verify the effect of groove loading on the large-signal performance of TWT. Within the same working conditions, the double groove-loaded FWTWT could obtain higher saturated output power and gain in a shorter interaction length. The maximum of output power and gain of this novel TWT is 58.6% and 10% higher than those of the conventional FWTWT, while the 3-dB bandwidth of TWT is reduced to 4 GHz. With the additional advantage of ease of fabrication based on micro-electro-mechanical systems (MEMS) technologies, the double-groove loaded FWSWS is suitable for a millimeter-wave TWT with high power capacity and gain.展开更多
文摘理论推导了绝缘体上硅(SOI)双槽隔离结构的耐压模型.该模型表明,在SOI双槽隔离结构中,因隔离氧化层压降的不均衡,高压侧隔离氧化层提前发生介质击穿,从而导致SOI双槽隔离结构的临界击穿电压小于理论值.增大沟槽纵横比和减小槽间距可以减弱隔离氧化层上压降的不均衡性,提高SOI双槽隔离结构的临界击穿电压.Sentaurus器件仿真软件的模拟结果和华润上华半导体有限公司0.5μm 200 V SOI工艺平台下的流片测试结果均证明,减小槽间距和增大沟槽纵横比是提高双槽隔离结构临界击穿电压的有效方法,同时也证明了该耐压模型的正确性.
基金supported by the National Natural Science Foundation of China(Grant No. 60971038)the Talent Fund of Chinese Education Administration
文摘A W-band traveling-wave tube (TWT) with double-groove loaded folded waveguide structure (FWSWS) has been designed and numerically modelled. The nonlinear performance of such a TWT is investigated by a particle-in-cell code MAGIC3D. Simulation results indicate this TWT produces a saturated electromagnetic power of 170.2 W at 90 GHz, corresponding to 36.9 dB gain and 69.6 mm interaction distance. A comparison between the novel folded waveguide traveling-wave tube (FWTWT) and the conventional one is also carried out to verify the effect of groove loading on the large-signal performance of TWT. Within the same working conditions, the double groove-loaded FWTWT could obtain higher saturated output power and gain in a shorter interaction length. The maximum of output power and gain of this novel TWT is 58.6% and 10% higher than those of the conventional FWTWT, while the 3-dB bandwidth of TWT is reduced to 4 GHz. With the additional advantage of ease of fabrication based on micro-electro-mechanical systems (MEMS) technologies, the double-groove loaded FWSWS is suitable for a millimeter-wave TWT with high power capacity and gain.
